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    • 4. 发明授权
    • Method of making thin film magnetic head having upper auxillary magnetic pole of accurately set thickness
    • 制造具有精确设定厚度的上辅助磁极的薄膜磁头的方法
    • US06614621B2
    • 2003-09-02
    • US10005011
    • 2001-12-04
    • Masahiro KakehiHiroshi MaedaTakashi Sekikawa
    • Masahiro KakehiHiroshi MaedaTakashi Sekikawa
    • G11B5147
    • B82Y25/00B82Y10/00G11B5/1278G11B5/3116G11B5/3163G11B5/3166G11B5/3967G11B2005/3996
    • An upper auxiliary magnetic pole is formed in a space on a lower magnetic pole layer. A first insulating layer is then formed over the surface of the lower magnetic pole layer. The upper auxiliary magnetic pole is embedded within a swell formed on the surface of the first insulating layer. A second insulating layer is then formed over the surface of the first insulating layer. The second insulating layer has a property less abrasive than the first insulating layer. The second insulating layer is subjected to grinding over a wider area just after the swell has completely been removed. The abrasion can be suppressed at the thin film magnetic head in which the swell has been removed. The first insulating layer of a predetermined thickness reliably remains in each of the thin film magnetic heads on the wafer. An accurate adjustment of the thickness of the first insulating layer leads to a reliable establishment of a predetermined thickness in the upper auxiliary magnetic pole with less error.
    • 上辅助磁极形成在下磁极层的空间中。 然后在下磁极层的表面上形成第一绝缘层。 上辅助磁极嵌入在第一绝缘层的表面上形成的隆起中。 然后在第一绝缘层的表面上形成第二绝缘层。 第二绝缘层具有比第一绝缘层更少磨损的性质。 第二绝缘层在溶胀完全去除之后在更宽的区域上进行研磨。 在去除了膨胀的薄膜磁头上可以抑制磨损。 预定厚度的第一绝缘层可靠地保留在晶片上的每个薄膜磁头中。 精确调整第一绝缘层的厚度导致在上辅助磁极中以较小误差可靠地建立预定厚度。
    • 8. 发明申请
    • Wafer and insulation characteristic monitoring method
    • 晶圆和绝缘特性监测方法
    • US20080100960A1
    • 2008-05-01
    • US11731558
    • 2007-03-30
    • Masahiro KakehiRyuei Ono
    • Masahiro KakehiRyuei Ono
    • G11B5/127
    • G11B5/3166G11B5/17G11B5/3133G11B5/3173
    • The present invention provides an insulation characteristic measuring method of measuring electrical insulation of magnetic head elements formed on a wafer. Each of the magnetic head elements includes an upper magnetic pole layer, a lower magnetic pole layer, insulation layers disposed between the upper and lower magnetic pole layers, and a coil layer formed of a conductive material and disposed between the insulation layers. In at least one of the magnetic head elements, the upper and lower magnetic pole layers are electrically insulated from each other, and the upper and lower magnetic pole layers and the coil layer of the element are respectively connected to terminals of electrodes for measuring insulation. The insulation characteristic of the magnetic head elements is measured by the electrodes. It is therefore possible to measure whether insulation is ensured between layers of the magnetic head elements, which need to be insulated from each other.
    • 本发明提供一种测量在晶片上形成的磁头元件的电绝缘性的绝缘特性测量方法。 每个磁头元件包括上磁极层,下磁极层,设置在上磁极层和下磁极层之间的绝缘层,以及由导电材料形成并设置在绝缘层之间的线圈层。 在至少一个磁头元件中,上磁极层和下磁极层彼此电绝缘,并且元件的上下磁极层和线圈层分别连接到用于测量绝缘的电极的端子。 磁头元件的绝缘特性由电极测量。 因此,可以测量需要彼此绝缘的磁头元件的层之间的绝缘是否被确保。