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    • 1. 发明申请
    • APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
    • 制造半导体器件的装置及制造半导体器件的方法
    • US20090263976A1
    • 2009-10-22
    • US12472118
    • 2009-05-26
    • Ichiro YAMAMOTOKoji WATANABE
    • Ichiro YAMAMOTOKoji WATANABE
    • H01L21/46
    • C23C16/56C23C16/401C23C16/44
    • Variation in the thickness of the deposited films depending on number of the processed product wafers in the deposition process employing a batch type CVD apparatus is inhibited to provide a manufacture of the film having a predetermined thickness with an improved reproducibility. The deposition apparatus 100 comprises a deposition reactor 101 that is capable of containing product wafers 107 and dummy wafers 109, boat 105, on which product wafer 107 or the dummy wafer 109 is mounted, and a heater 111 provided outside of the deposition reactor 101 along a reactor wall 103. Further, the deposition apparatus 100 comprises a gas supplying system including a high-k source material supplying line 113 and SiO2 source material supplying line 115, and a controller 121 that provides a control to the supply of a gas from the gas supplying system to the deposition reactor 101.
    • 根据使用间歇型CVD装置的沉积工艺中的加工产品晶片的数量,沉积膜厚度的变化被抑制,从而提供具有预定厚度的膜,并且具有改进的再现性。 沉积设备100包括能够容纳产品晶片107和虚设晶片109,安装有产品晶片107或虚设晶片109的船105的沉积反应器101和沿着沉积反应器101的外部设置的加热器111 反应器壁103.此外,沉积设备100包括包括高k源材料供应管线113和SiO2源材料供应管线115的气体供应系统,以及控制器121,其提供对来自 气体供给系统到沉积反应器101。
    • 5. 发明申请
    • MOBILE COMMUNICATION SYSTEM AND ACCESS GATEWAY HAVING PLURAL USER PLANE AGWS
    • 移动通信系统和具有多用户平面设备的接入网关
    • US20090252133A1
    • 2009-10-08
    • US12416183
    • 2009-04-01
    • Koji WATANABEYosuke TAKAHASHI
    • Koji WATANABEYosuke TAKAHASHI
    • H04W88/16H04W4/00
    • H04W76/022H04W28/08H04W76/12H04W88/16
    • In a mobile communication system including an access gateway (AGW) comprising a C-AGW for handling control messages and a plurality of U-AGWs for forwarding data packets, the C-AGW is provided with a management table indicating an address of U-AGW to be an endpoint of tunnel, in association with each of mobile station IDs. When a tunnel setup request message including a mobile station ID is received from one of base stations, the C-AGW searches the management table for the address of U-AGW corresponding to the mobile station ID and notifies the base station of the U-AGW address, and if the mobile station ID is not found in the management table, the C-AGW notifies the base station of an address of a particular U-AGW selected out of the U-AGWs, so that the base station establishes a tunnel for forwarding data packets toward the notified U-AGW.
    • 在包括用于处理控制消息的C-AGW的接入网关(AGW)和用于转发数据分组的多个U-AGW的移动通信系统中,C-AGW具有指示U-AGW的地址的管理表 与每个移动台ID相关联以成为隧道的端点。 当从基站之一接收到包括移动台ID的隧道建立请求消息时,C-AGW在管理表中搜索对应于移动站ID的U-AGW的地址,并向基站通知U-AGW 地址,并且如果在管理表中没有找到移动台ID,则C-AGW向基站通知从U-AGW中选出的特定U-AGW的地址,使得基站建立隧道 将数据包转发到通知的U-AGW。
    • 10. 发明申请
    • AIRCRAFT STARTER GENERATOR
    • 飞机启动发电机
    • US20110101693A1
    • 2011-05-05
    • US12916898
    • 2010-11-01
    • Tatsuhiko GOIKenichiro TANAKAKoji WATANABE
    • Tatsuhiko GOIKenichiro TANAKAKoji WATANABE
    • H02K23/52
    • F02N11/04F02C7/275F02C7/36F02D2400/08F02N15/022F02N15/043F02N15/046Y02T50/671
    • A starter generator has an electric rotating machine having a rotating shaft and designed to carry two reverse operations—motor and generator. A first clutch is connected between the rotating machine and the first rotating shaft for transmitting rotations of the rotating machine to the first rotating shaft. A second clutch is connected between the rotating machine and the second rotating shaft for transmitting rotations of the second rotating shaft to the rotating machine. A continuously variable transmission is provided for changing the number of rotations transmitted from the second rotating shaft to the rotating machine. The rotating machine is supplied with electric power to rotate the rotating shaft, or the number of rotations of the rotating shaft is kept constant by controlling a transmission ratio of the continuously variable transmission.
    • 起动发电机具有旋转电机,其具有旋转轴,设计用于承载两个反向操作 - 电机和发电机。 第一离合器连接在旋转机器和第一旋转轴之间,用于将旋转机器的旋转传递到第一旋转轴。 第二离合器连接在旋转机器和第二旋转轴之间,用于将第二旋转轴的旋转传递到旋转机器。 提供了一种无级变速器,用于改变从第二旋转轴传递到旋转机器的转数。 通过控制无级变速器的传动比,旋转机器被供给电力以使旋转轴旋转,或者旋转轴的转数保持恒定。