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    • 1. 发明授权
    • Semiconductor device
    • 半导体器件
    • US06365925B2
    • 2002-04-02
    • US09151584
    • 1998-09-11
    • Ichiro HaseMitsuhiro NakamuraHidetoshi KawasakiShinichi Wada
    • Ichiro HaseMitsuhiro NakamuraHidetoshi KawasakiShinichi Wada
    • H01L31072
    • H01L29/7785
    • A semiconductor device that is easily operated with a single positive voltage supply and exhibits an excellent linearity of mutual conductance and source-gate capacitance with regard to a gate voltage is provided. The semiconductor device comprises a second barrier layer of AlGaAs, a channel layer of InGaAs and a first barrier layer of AlGaAs that are stacked in this order on a substrate of GaAs with a buffer layer of u-GaAs between the substrate and the second barrier layer. Carrier supply regions doped with n-type impurity are formed in part of the first and second barrier layers. A low resistivity region including a high concentration of p-type impurity (Zn) is formed in the first barrier layer. The low resistivity region is buried in a high resistivity region and brought to contact with a gate electrode. Upon an application of positive voltage to the gate electrode, a carrier deficient region disappears in the channel layer and no parasitic resistance component remains.
    • 提供了一种使用单个正电压电源容易操作且相对于栅极电压具有优异的互导线性和源极 - 栅极电容的半导体器件。 半导体器件包括AlGaAs的第二阻挡层,InGaAs的沟道层和AlGaAs的第一势垒层,其依次层叠在具有衬底和第二势垒层之间的具有u-GaAs缓冲层的GaAs衬底上 。 在第一和第二阻挡层的一部分中形成掺杂有n型杂质的载流子供应区。 在第一阻挡层中形成包含高浓度p型杂质(Zn)的低电阻率区域。 低电阻率区域被埋在高电阻率区域中并与栅电极接触。 当向栅极施加正电压时,载流子缺陷区域在沟道层中消失,并且不存在寄生电阻分量。
    • 10. 发明授权
    • Semiconductor device
    • 半导体器件
    • US06903387B2
    • 2005-06-07
    • US10742751
    • 2003-12-23
    • Ichiro Hase
    • Ichiro Hase
    • H01L21/331H01L29/201H01L29/737H01L31/0328
    • H01L29/201H01L29/7371
    • A semiconductor device having a heterojunction bipolar transistor capable of suppressing the deterioration of basic transistor characteristics, such as a decline of an injection efficiency from an emitter layer to a base layer due to the rising of emitter resistance, a decline of breakdown strength between the base layer and a collector layer, or a decline of reliability due to an introduction of a defect; configured to comprise a heterojunction bipolar transistor having an emitter layer, base layer and a collector layer, wherein an electron affinity of the base layer is smaller than that of the emitter layer and that of the collector layer, an interlayer is formed at least either between the emitter layer and the base layer or between the base layer and the collector layer, and the electron affinity of the interlayer has a value between the electron affinities of the two layers sandwiching the interlayer.
    • 具有异质结双极晶体管的半导体器件能够抑制基极晶体管特性的恶化,例如由于发射极电阻的上升而从发射极层向基极层的注入效率的下降,基极之间的击穿强度的下降 层和集电体层,或由于引入缺陷导致的可靠性下降; 被配置为包括具有发射极层,基极层和集电极层的异质结双极晶体管,其中所述基极层的电子亲和力小于所述发射极层的电子亲和力,并且所述集电极层的电子亲和力形成在中间层之间, 发射极层和基极层之间或基极层与集电极层之间的电子亲和力,夹层中间层的两层的电子亲和力之间的值。