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1. 发明授权

US09638617B2 MEMS-microviscometer 有权
公开(公告)号：US09638617B2
公开(公告)日：2017-05-02
申请号：US13921515
申请日：2013-06-19
申请人： IHP GmbH
发明人： Mario Birkholz , Jurgen Drews , Karl-Ernst Ehwald , Dieter Genschow , Ulrich Haak , Philip Kulse , Egbert Matthus , Katrin Schulz , Wolfgang Winkler , Dirk Wolansky , Marlen Frohlich
IPC分类号： G01N11/00 , G01N11/16
CPC分类号： G01N11/00 , G01N11/16
摘要： Micro-electromechanical device for measuring the viscosity of a fluid, comprises a measuring chamber with a micromechanical actuator, arranged as a cantilever above a metallically conductive counter electrode, elastically deformable towards the counter electrode, surrounded by the fluid to be measured and made of a metallically conductive material, a two-terminal RF voltage source that can be switched off, having a first output terminal connected to the actuator, and a second output terminal connected to the counter electrode, and which is designed to output an RF voltage signal that is suitable for deflecting the actuator out of its rest position, and a measuring device to detect a change in the frequency, amplitude or phase of the RF signal in order to determine a measurement value for the viscosity-dependent speed at which the actuator is deformed.

2. 发明申请

US20140000344A1 MEMS-Microviscometer 有权
标题翻译：微机电显微镜
公开(公告)号：US20140000344A1
公开(公告)日：2014-01-02
申请号：US13921515
申请日：2013-06-19
申请人： IHP GmbH
发明人： Mario Birkholz , Jurgen Drews , Karl-Ernst Ehwald , Dieter Genschow , Ulrich Haak , Philip Kulse , Egbert Matthus , Katrin Schulz , Wolfgang Winkler , Dirk Wolansky , Marlen Frohlich
IPC分类号： G01N11/00
CPC分类号： G01N11/00 , G01N11/16
摘要： Micro-electromechanical device for measuring the viscosity of a fluid, comprises a measuring chamber with a micromechanical actuator, arranged as a cantilever above a metallically conductive counter electrode, elastically deformable towards the counter electrode, surrounded by the fluid to be measured and made of a metallically conductive material, a two-terminal RF voltage source that can be switched off, having a first output terminal connected to the actuator, and a second output terminal connected to the counter electrode, and which is designed to output an RF voltage signal that is suitable for deflecting the actuator out of its rest position, and a measuring device to detect a change in the frequency, amplitude or phase of the RF signal in order to determine a measurement value for the viscosity-dependent speed at which the actuator is deformed.
摘要翻译：用于测量流体粘度的微机电装置包括具有微机械致动器的测量室，其布置为在金属导电对电极之上的悬臂，可朝向对电极弹性变形，被被测流体包围并由金属导电材料，可以关闭的两端RF电压源，具有连接到致动器的第一输出端子和连接到对电极的第二输出端子，并且被设计成输出RF电压信号，适于将致动器偏离其静止位置;以及测量装置，用于检测RF信号的频率，振幅或相位的变化，以便确定致动器变形时与粘度相关的速度的测量值。

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