会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 2. 发明授权
    • Method of fabricating a micro device
    • 制造微型器件的方法
    • US07160500B2
    • 2007-01-09
    • US10270519
    • 2002-10-16
    • Joon-Shik ParkSoon-Sup ParkSuk-Won JungJin-Woo Cho
    • Joon-Shik ParkSoon-Sup ParkSuk-Won JungJin-Woo Cho
    • C04B33/32
    • B81C99/0085C04B2235/6022C04B2235/94C04B2235/95
    • The present invention relates to a method of fabricating a micro device, comprising the steps of pressing an upper mold formed with a plurality of recesses for molding a plurality of rods and a lower mold formed with a seat recess for molding a plate supporting the plurality of rods against each other; injecting ceramic material mixed with a polymer into the mold; releasing a resultant ceramic molding mixed with the polymer from the molds; removing the polymer from the ceramic molding by burning out or melting away the polymer; sintering the ceramic molding; filling a polymer into spaces between the plurality of rods of the sintered ceramic molding so that the top surfaces of the plurality of rods are exposed to the outside; and removing the plate through a polishing process so that bottom surfaces of the plurality of rods are exposed to the outside.
    • 微型装置的制造方法技术领域本发明涉及一种微型装置的制造方法,其特征在于,包括以下步骤:将形成有多个凹部的上模压制成多个杆;形成有用于模制支撑所述多个 杆对彼此; 将与聚合物混合的陶瓷材料注入模具中; 从模具中释放与聚合物混合的所得陶瓷模制品; 通过烧掉或熔化聚合物从陶瓷模制品中除去聚合物; 烧结陶瓷成型; 将聚合物填充到烧结陶瓷模制品的多个棒之间的空间中,使得多个棒的顶表面暴露于外部; 以及通过抛光工艺去除所述板,使得所述多个杆的底表面暴露于外部。