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热词
    • 3. 发明授权
    • Method for forming a micro-pattern on a substrate
    • 在基板上形成微图案的方法
    • US06818139B1
    • 2004-11-16
    • US09959057
    • 2001-10-15
    • Hong Hie LeeDahl Young Khang
    • Hong Hie LeeDahl Young Khang
    • B44C122
    • B29C43/021B29C43/003B29C43/04B29C43/14B29C2043/025B29C2043/142B29C2043/144B29C2043/3634B82Y10/00B82Y40/00G03F7/0002G03F7/168H01L21/0271
    • In a method for forming a micro-pattern on a substrate (200), polymer material having a solvent is coated on the substrate, thereby forming a polymer film on the substrate. Then, a mold (204) having a predetermined shape is compressed into the polymer film (202) on the substrate by employing a predetermined compression technique to entail a plastic deformation of the polymer film, thereby patterning the polymer film. This compression procedure is performed at a room temperature, e.g., of about 10 to about 30° C. In the present invention, before the mold (204) is pressed into the polymer film (202), a free volume in the polymer film is previously increased so that a pressure applied on the polymer material needed to plastically deform the polymer film is reduced. Thereafter, etching is performed on the substrate through the use of the patterned polymer film as an etching mask, thereby forming a micro-pattern on the substrate.
    • 在基板(200)上形成微图案的方法中,在基板上涂布具有溶剂的聚合物材料,从而在基板上形成聚合物膜。 然后,通过使用预定的压缩技术将具有预定形状的模具(204)压缩到基板上的聚合物膜(202)中,以引起聚合物膜的塑性变形,从而对聚合物膜进行图案化。 该压缩过程在室温下进行,例如约10至约30℃。在本发明中,在将模具(204)压入聚合物膜(202)之前,聚合物膜中的自由体积为 预先增加,使得施加在聚合物材料上的压力需要塑性变形聚合物膜。 此后,通过使用图案化的聚合物膜作为蚀刻掩模在衬底上进行蚀刻,从而在衬底上形成微图案。