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1. 发明申请

US20110070810A1 MULTIPLE ZONE CARRIER HEAD WITH FLEXIBLE MEMBRANE 有权
标题翻译：带有柔性膜的多区域载体头
公开(公告)号：US20110070810A1
公开(公告)日：2011-03-24
申请号：US12955803
申请日：2010-11-29
申请人： Hung Chih Chen , Jeonghoon Oh , Tsz-Sin Siu , Thomas Brezoczky , Steven M. Zuniga
发明人： Hung Chih Chen , Jeonghoon Oh , Tsz-Sin Siu , Thomas Brezoczky , Steven M. Zuniga
IPC分类号： B24B1/00
CPC分类号： B24B37/30
摘要： A carrier head for chemical mechanical polishing of a substrate includes a base and a flexible membrane extending beneath the base. The flexible membrane includes a central portion with an outer surface providing a substrate receiving surface, a perimeter portion connecting the central portion to the base, and at least one flap extending from an inner surface of the central portion. The flap divides a volume between the flexible membrane and the base into a plurality of chambers, and the flap includes a laterally extending first section and an angled second section extending beneath the first section and connecting the laterally extending first section to the central portion.
摘要翻译：用于基板的化学机械抛光的承载头包括基部和在基部下方延伸的柔性膜。柔性膜包括具有提供基板接收表面的外表面的中心部分，将中心部分连接到基部的周边部分和从中心部分的内表面延伸的至少一个折片。翼片将柔性膜和基部之间的体积分成多个室，并且该翼片包括横向延伸的第一部分和在第一部分下方延伸并且将横向延伸的第一部分连接到中心部分的成角度的第二部分。

2. 发明授权

US07255771B2 Multiple zone carrier head with flexible membrane 有权
标题翻译：带有柔性膜的多区域载体头
公开(公告)号：US07255771B2
公开(公告)日：2007-08-14
申请号：US10810784
申请日：2004-03-26
申请人： Hung Chih Chen , Jeonghoon Oh , Tsz-Sin Siu , Thomas Brezoczky , Steven M. Zuniga
发明人： Hung Chih Chen , Jeonghoon Oh , Tsz-Sin Siu , Thomas Brezoczky , Steven M. Zuniga
IPC分类号： B24B29/00
CPC分类号： B24B37/30
摘要： A carrier head for chemical mechanical polishing of a substrate includes a base and a flexible membrane extending beneath the base. The flexible membrane includes a central portion with an outer surface providing a substrate receiving surface, a perimeter portion connecting the central portion to the base, and at least one flap extending from an inner surface of the central portion. The flap divides a volume between the flexible membrane and the base into a plurality of chambers, and the flap includes a laterally extending first section and an angled second section extending beneath the first section and connecting the laterally extending first section to the central portion.
摘要翻译：用于基板的化学机械抛光的承载头包括基部和在基部下方延伸的柔性膜。柔性膜包括具有提供基板接收表面的外表面的中心部分，将中心部分连接到基部的周边部分和从中心部分的内表面延伸的至少一个折片。翼片将柔性膜和基部之间的体积分成多个室，并且该翼片包括横向延伸的第一部分和在第一部分下方延伸并且将横向延伸的第一部分连接到中心部分的成角度的第二部分。

3. 发明授权

US08088299B2 Multiple zone carrier head with flexible membrane 有权
标题翻译：带有柔性膜的多区域载体头
公开(公告)号：US08088299B2
公开(公告)日：2012-01-03
申请号：US12955803
申请日：2010-11-29
申请人： Hung Chih Chen , Jeonghoon Oh , Tsz-Sin Siu , Thomas Brezoczky , Steven M. Zuniga
发明人： Hung Chih Chen , Jeonghoon Oh , Tsz-Sin Siu , Thomas Brezoczky , Steven M. Zuniga
IPC分类号： C23C16/00 , H01L21/00
CPC分类号： B24B37/30
摘要： A carrier head for chemical mechanical polishing of a substrate includes a base and a flexible membrane extending beneath the base. The flexible membrane includes a central portion with an outer surface providing a substrate receiving surface, a perimeter portion connecting the central portion to the base, and at least one flap extending from an inner surface of the central portion. The flap divides a volume between the flexible membrane and the base into a plurality of chambers, and the flap includes a laterally extending first section and an angled second section extending beneath the first section and connecting the laterally extending first section to the central portion.
摘要翻译：用于基板的化学机械抛光的承载头包括基部和在基部下方延伸的柔性膜。柔性膜包括具有提供基板接收表面的外表面的中心部分，将中心部分连接到基部的周边部分和从中心部分的内表面延伸的至少一个折片。翼片将柔性膜和基部之间的体积分成多个室，并且该翼片包括横向延伸的第一部分和在第一部分下方延伸并且将横向延伸的第一部分连接到中心部分的成角度的第二部分。

4. 发明申请

US20070272356A1 MULTIPE ZONE CARRIER HEAD WITH FLEXIBLE MEMBRANE 有权
标题翻译：带有柔性膜的多区域载体头
公开(公告)号：US20070272356A1
公开(公告)日：2007-11-29
申请号：US11837412
申请日：2007-08-10
申请人： Hung Chen , Jeonghoon Oh , Tsz-Sin Siu , Thomas Brezoczky , Steven Zuniga
发明人： Hung Chen , Jeonghoon Oh , Tsz-Sin Siu , Thomas Brezoczky , Steven Zuniga
IPC分类号： C23F1/00
CPC分类号： B24B37/30
摘要： A carrier head for chemical mechanical polishing of a substrate includes a base and a flexible membrane extending beneath the base. The flexible membrane includes a central portion with an outer surface providing a substrate receiving surface, a perimeter portion connecting the central portion to the base, and at least one flap extending from an inner surface of the central portion. The flap divides a volume between the flexible membrane and the base into a plurality of chambers, and the flap includes a laterally extending first section and an angled second section extending beneath the first section and connecting the laterally extending first section to the central portion.
摘要翻译：用于基板的化学机械抛光的承载头包括基部和在基部下方延伸的柔性膜。柔性膜包括具有提供基板接收表面的外表面的中心部分，将中心部分连接到基部的周边部分和从中心部分的内表面延伸的至少一个折片。翼片将柔性膜和基部之间的体积分成多个室，并且该翼片包括横向延伸的第一部分和在第一部分下方延伸并且将横向延伸的第一部分连接到中心部分的成角度的第二部分。

5. 发明申请

US20070202785A1 MULTI-CHAMBER CARRIER HEAD WITH A TEXTURED MEMBRANE 有权
标题翻译：带有纹理膜的多层车载头
公开(公告)号：US20070202785A1
公开(公告)日：2007-08-30
申请号：US11614940
申请日：2006-12-21
申请人： Jeonghoon Oh , Tsz-Sin Siu , Hung Chen , Andrew Nagengast , Steven Zuniga , Thomas Brezoczky
发明人： Jeonghoon Oh , Tsz-Sin Siu , Hung Chen , Andrew Nagengast , Steven Zuniga , Thomas Brezoczky
IPC分类号： B24B41/06
CPC分类号： B24B37/30 , B24B41/06 , B29C33/424 , B29C35/02 , B29K2023/00 , B29K2083/00 , B29K2995/0074 , B29L2031/755
摘要： A flexible membrane for use in a carrier head has a generally circular main portion with a lower surface, an annular outer portion for connection to a base assembly, and an annular flap extending from the main portion on a side opposite the lower surface for connection to the base assembly. At least one surface of the flap has a surface texture to prevent adhesion.
摘要翻译：用于载体头部的柔性膜具有大致圆形的主要部分，具有下表面，用于连接到基座组件的环形外部部分和从主体部分在与下表面相对的一侧延伸的环形挡片，用于连接到基座组件。翼片的至少一个表面具有表面纹理以防止粘附。

6. 发明申请

US20050211377A1 Multiple zone carrier head with flexible membrane 有权
标题翻译：带有柔性膜的多区域载体头
公开(公告)号：US20050211377A1
公开(公告)日：2005-09-29
申请号：US10810784
申请日：2004-03-26
申请人： Hung Chen , Jeonghoon Oh , Tsz-Sin Siu , Thomas Brezoczky , Steven Zuniga
发明人： Hung Chen , Jeonghoon Oh , Tsz-Sin Siu , Thomas Brezoczky , Steven Zuniga
IPC分类号： B24B37/04 , B44C1/22 , C23F1/00 , H01L21/68
CPC分类号： B24B37/30
摘要： A carrier head for chemical mechanical polishing of a substrate includes a base and a flexible membrane extending beneath the base. The flexible membrane includes a central portion with an outer surface providing a substrate receiving surface, a perimeter portion connecting the central portion to the base, and at least one flap extending from an inner surface of the central portion. The flap divides a volume between the flexible membrane and the base into a plurality of chambers, and the flap includes a laterally extending first section and an angled second section extending beneath the first section and connecting the laterally extending first section to the central portion.
摘要翻译：用于基板的化学机械抛光的承载头包括基部和在基部下方延伸的柔性膜。柔性膜包括具有提供基板接收表面的外表面的中心部分，将中心部分连接到基部的周边部分和从中心部分的内表面延伸的至少一个折片。翼片将柔性膜和基部之间的体积分成多个室，并且该翼片包括横向延伸的第一部分和在第一部分下方延伸并且将横向延伸的第一部分连接到中心部分的成角度的第二部分。

7. 发明授权

US07207871B1 Carrier head with multiple chambers 有权
标题翻译：具有多个腔室的承载头
公开(公告)号：US07207871B1
公开(公告)日：2007-04-24
申请号：US11245867
申请日：2005-10-06
申请人： Steven M. Zuniga , Hung Chih Chen , Thomas Brezoczky , Steven T. Mear
发明人： Steven M. Zuniga , Hung Chih Chen , Thomas Brezoczky , Steven T. Mear
IPC分类号： B24B5/00
CPC分类号： B24B37/30 , B24B49/16
摘要： A system for chemical mechanical polishing having a carrier head with pressurizeable chambers that can be configured into pressure zones is described. The system includes a carrier head with a membrane for contacting a substrate during polishing. Pressurizeable chambers behind the membrane are in communication with pressure inputs. The pressure inputs can each supply a different pressure to the pressurizeable chambers. Some of the pressurizeable chambers can be in communication with more than one pressure input. Zones of pressure can be arranged, where each zone includes one or more pressurizeable chambers. The zones can be configurable by altering the pressurizeable chambers that make up each zone.
摘要翻译：描述了一种用于化学机械抛光的系统，该系统具有可被构造成压力区的具有可加压室的载体头。该系统包括具有用于在抛光期间接触基底的膜的载体头部。膜后面的可加压室与压力输入连通。压力输入可以为可加压室提供不同的压力。一些可加压室可以与多于一个的压力输入连通。可以布置压力区域，其中每个区域包括一个或多个可加压室。这些区域可以通过改变构成每个区域的可加压室来配置。

8. 发明申请

US20060240750A1 Composite retaining ring 有权
标题翻译：复合保持环
公开(公告)号：US20060240750A1
公开(公告)日：2006-10-26
申请号：US11407695
申请日：2006-04-19
申请人： Jeonghoon Oh , Hung Chen , Thomas Brezoczky , Douglas McAllister , David Huo
发明人： Jeonghoon Oh , Hung Chen , Thomas Brezoczky , Douglas McAllister , David Huo
IPC分类号： B24B29/00 , B24B47/02
CPC分类号： B24B37/32
摘要： A two part retaining ring is described that has a lower ring and an upper ring. The lower ring contacts a polishing surface during chemical mechanical polishing. The upper surface and the lower surface of the lower ring have matching grooves formed therein to increase the flexibility of the lower ring.
摘要翻译：描述了具有下环和上环的两部分保持环。在化学机械抛光期间，下环接触抛光表面。下环的上表面和下表面具有形成在其中的匹配凹槽，以增加下环的柔性。

9. 发明申请

US20070197146A1 COMPOSITE RETAINING RING 有权
标题翻译：复合保持环
公开(公告)号：US20070197146A1
公开(公告)日：2007-08-23
申请号：US11682257
申请日：2007-03-05
申请人： Jeonghoon Oh , Hung Chen , Thomas Brezoczky , Douglas McAllister , David Huo
发明人： Jeonghoon Oh , Hung Chen , Thomas Brezoczky , Douglas McAllister , David Huo
IPC分类号： B24B29/00 , B24B5/00 , B24B21/00
CPC分类号： B24B37/32
摘要： A two part retaining ring is described that has a lower ring and an upper ring. The lower ring contacts a polishing surface during chemical mechanical polishing. The upper surface and the lower surface of the lower ring have thick and thin subportions to increase the flexibility of the lower ring.
摘要翻译：描述了具有下环和上环的两部分保持环。在化学机械抛光期间，下环接触抛光表面。下环的上表面和下表面具有厚而薄的子部分，以增加下环的柔性。

10. 发明申请

US20130206936A1 Support System for Solar Energy Generator Panels 审中-公开
标题翻译：太阳能发电机组支撑系统
公开(公告)号：US20130206936A1
公开(公告)日：2013-08-15
申请号：US13749666
申请日：2013-01-24
申请人： Benyamin Buller , Chris Gronet , J. Kelly Truman , Thomas Brezoczky
发明人： Benyamin Buller , Chris Gronet , J. Kelly Truman , Thomas Brezoczky
IPC分类号： F24J2/52
CPC分类号： F24S25/61 , F24S25/12 , F24S25/16 , F24S2020/10 , H01L31/035281 , H02S20/24 , Y02B10/12 , Y02B10/20 , Y02E10/47 , Y02E10/50
摘要： A support system for a solar panel comprises a plurality of legs configured to receive multiple solar panels. The legs each comprise a base, a plurality of shafts, and a support precipice. The support precipice is divided into two sides by a t-bar. The first side comprises a guiding wing to effectuate modular assembly of the support system. The second side comprises a beveled edge to effectuate secure coupling of a solar panel. The system is able to be assembled and disassembled without the use of tools or implements. The system is also movable.
摘要翻译：太阳能面板的支撑系统包括被配置为容纳多个太阳能电池板的多个支脚。腿部各自包括基部，多个轴和支撑悬臂。支撑悬崖由一个t形杆分成两边。第一侧包括用于实现支撑系统的模块化组装的引导翼。第二侧包括斜边以实现太阳能面板的固定耦合。该系统能够在不使用工具或工具的情况下进行组装和拆卸。该系统也是可移动的。

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