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    • 10. 发明授权
    • Method of forming parylene film
    • 形成聚对二甲苯膜的方法
    • US08889224B2
    • 2014-11-18
    • US12876226
    • 2010-09-06
    • Chun-Hao ChangChuan-Sheng Zhuang
    • Chun-Hao ChangChuan-Sheng Zhuang
    • C23C16/26C23C16/44C23C16/452B05D1/00
    • C23C16/54B05D1/60C23C16/4485C23C16/452C23C16/45561
    • A method for forming a parylene film is provided, which includes following steps. Providing a chemical vapor deposition apparatus including a buffer chamber having first and second valves and a rotative carrying apparatus, an evaporator connected with the second valve, a pyrolysis chamber connected with the evaporator, and a deposition chamber connected with the pyrolysis chamber. Placing a parylene material in the rotative carrying apparatus of the buffer chamber through the first valve. Turning off the first and second valves and balancing a pressure in the buffer chamber and a pressure in the evaporator. Turning on the second valve and delivering the parylene material into the evaporator. Evaporating the parylene material in the evaporator to form a parylene gas. Pyrolyzing the parylene gas in the pyrolysis chamber to form a parylene monomer. Delivering the parylene monomer to the deposition chamber for deposition so as to form a parylene film.
    • 提供了形成聚对二甲苯膜的方法,其包括以下步骤。 提供一种化学气相沉积设备,包括具有第一和第二阀的缓冲室和旋转运载装置,与第二阀连接的蒸发器,与蒸发器连接的热解室以及与热解室连接的沉积室。 通过第一阀将缓冲室的旋转输送装置中的聚对二甲苯材料放置。 关闭第一和第二阀并平衡缓冲室中的压力和蒸发器中的压力。 打开第二个阀门并将聚对二甲苯材料输送到蒸发器中。 在蒸发器中蒸发聚对二甲苯材料以形成对二甲苯气体。 在热解室中热解聚对二甲苯以形成聚对二甲苯单体。 将聚对二甲苯单体输送到沉积室以进行沉积以形成聚对二甲苯膜。