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    • 5. 发明申请
    • Method for implanting carbon nanotube
    • 植入碳纳米管的方法
    • US20070161133A1
    • 2007-07-12
    • US11580295
    • 2006-10-13
    • Shih-Chieh LiaoHui-Ta Chen
    • Shih-Chieh LiaoHui-Ta Chen
    • H01L21/428H01L21/00
    • H01L21/268B82Y10/00H01J9/025H01J31/127H01J2201/30469
    • The present invention relates to a method of implanting carbon nanotube (CNT), which is especially being adopted for forming CNTs in carbon nanotube field emitting displays (CNT-FEDs). The method comprises steps of: transferring a medium by an electromagnetic wave generating means for forming a media layer of adhesive and conductive ability; and exposing a CNT material to the electromagnetic wave generating means for implanting CNTs in a plurality of gate apertures by the light pressure of the electromagnetic wave generating means. By the aforesaid method, the problems troubling conventional CNT formation methods, such as the density of CNT formed thereby is not sufficient, the adhesion of the substrate used thereby is low, and the CNT formation requires to be performed under a high temperature ambient, etc., can be solved.
    • 本发明涉及一种特别用于在碳纳米管场发射显示器(CNT-FED)中形成CNT的碳纳米管(CNT)的注入方法。 该方法包括以下步骤:通过用于形成粘合剂和导电能力的介质层的电磁波产生装置传送介质; 以及将CNT材料暴露于所述电磁波产生装置,用于通过所述电磁波产生装置的光压将CNT注入到多个栅极孔中。 通过上述方法,常规CNT形成方法(如由此形成的CNT的密度)困扰的问题是不够的,因此使用的基板的粘附性低,并且CNT形成需要在高温环境等下进行 可以解决。