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1. 发明申请

US20080291448A1 METHODS AND APPARATUS FOR FINDING A SUBSTRATE NOTCH CENTER 审中-公开
标题翻译：用于发现底板凹陷中心的方法和装置
公开(公告)号：US20080291448A1
公开(公告)日：2008-11-27
申请号：US12124135
申请日：2008-05-20
申请人： Hui Chen , Noel Manto , Haochuan Zhang , Alpay Yilmaz
发明人： Hui Chen , Noel Manto , Haochuan Zhang , Alpay Yilmaz
IPC分类号： G01B11/00
CPC分类号： G01B11/002
摘要： Methods and apparatus are provided for locating a notch and/or a center of the notch of a substrate. An exemplary method includes rotating a substrate; illuminating an edge of the substrate with a light beam as the substrate rotates; detecting a change in light intensity of the light beam as the substrate rotates; determining a rough location of a notch in the edge of the substrate based on a position of the substrate when the change in light intensity of the light beam is detected; and reversing a rotational direction of the substrate to determine a fine location of the notch in the edge of the substrate. Numerous other aspects are provided.
摘要翻译：提供了用于定位基板的凹口和/或中心的方法和装置。一种示例性方法包括旋转衬底; 当衬底旋转时，用光束照射衬底的边缘; 检测基板旋转时光束的光强度的变化; 当检测到光束的光强度的变化时，基于衬底的位置确定衬底的边缘中的凹口的粗略位置; 并且反转衬底的旋转方向以确定衬底边缘中凹口的精细位置。提供了许多其他方面。

2. 发明申请

US20080006785A1 METHODS AND APPARATUS FOR DETECTING A SUBSTRATE NOTCH OR FLAT 有权
标题翻译：用于检测基底凹陷或平面的方法和装置
公开(公告)号：US20080006785A1
公开(公告)日：2008-01-10
申请号：US11683420
申请日：2007-03-07
申请人： Hui Chen , Haochuan Zhang , Noel Manto
发明人： Hui Chen , Haochuan Zhang , Noel Manto
IPC分类号： G01N21/86
CPC分类号： G01V8/12
摘要： In a first aspect, a first apparatus is provided. The first apparatus includes a through-beam sensor coupled to a scrubber and adapted to detect a notch or flat of a substrate in the scrubber during processing. The through-beam sensor has (1) an emitter facing a first major surface of a substrate in the scrubber and adapted to transmit a beam toward an edge of the first major surface; and (2) a receiver facing a second major surface of the substrate and adapted to receive the beam transmitted from the emitter when the edge of the substrate does not obstruct the beam. Numerous other aspects are provided.
摘要翻译：在第一方面中，提供了一种第一装置。第一装置包括耦合到洗涤器并适于在处理期间检测洗涤器中的基板的凹口或平面的通过光束传感器。通过光束传感器具有（1）发射器面向洗涤器中的基板的第一主表面并且适于将光束传送到第一主表面的边缘; 和（2）接触器，其面对衬底的第二主表面，并且适于在衬底的边缘不阻挡光束时接收从发射器发射的光束。提供了许多其他方面。

3. 发明申请

US20050176349A1 Load cup for chemical mechanical polishing 有权
标题翻译：负载杯用于化学机械抛光
公开(公告)号：US20050176349A1
公开(公告)日：2005-08-11
申请号：US10988647
申请日：2004-11-15
申请人： Alpay Yilmaz , Simon Yavelberg , Toshikazu Tomita , Hui Chen , Noel Manto , David Lischka , Hung Chen
发明人： Alpay Yilmaz , Simon Yavelberg , Toshikazu Tomita , Hui Chen , Noel Manto , David Lischka , Hung Chen
IPC分类号： B24B37/04 , B24B49/00
CPC分类号： B24B37/345
摘要： Embodiments of a load cup for transferring a substrate are provided. The load cup includes a pedestal assembly having a substrate support and a de-chucking nozzle. The de-chucking nozzle is positioned to flow a fluid between the polishing head and the back side of a substrate during transfer of the substrate from the polishing head to the substrate support.
摘要翻译：提供了用于转移衬底的负载杯的实施例。负载杯包括具有基板支撑件和去夹紧喷嘴的基座组件。在将基板从抛光头转移到基板支撑件的过程中，去夹紧喷嘴定位成使流体在基板的抛光头和背面之间流动。

4. 发明授权

US07044832B2 Load cup for chemical mechanical polishing 有权
标题翻译：负载杯用于化学机械抛光
公开(公告)号：US07044832B2
公开(公告)日：2006-05-16
申请号：US10988647
申请日：2004-11-15
申请人： Alpay Yilmaz , Simon Yavelberg , Toshikazu Tomita , Hui Chen , Noel Manto , David J. Lischka , Hung Chih Chen
发明人： Alpay Yilmaz , Simon Yavelberg , Toshikazu Tomita , Hui Chen , Noel Manto , David J. Lischka , Hung Chih Chen
IPC分类号： B24B49/00
CPC分类号： B24B37/345
摘要： Embodiments of a load cup for transferring a substrate are provided. The load cup includes a pedestal assembly having a substrate support and a de-chucking nozzle. The de-chucking nozzle is positioned to flow a fluid between the polishing head and the back side of a substrate during transfer of the substrate from the polishing head to the substrate support.
摘要翻译：提供了用于转移衬底的负载杯的实施例。负载杯包括具有基板支撑件和去夹紧喷嘴的基座组件。在将基板从抛光头转移到基板支撑件的过程中，去夹紧喷嘴定位成使流体在基板的抛光头和背面之间流动。

5. 发明授权

US08101934B2 Methods and apparatus for detecting a substrate notch or flat 有权
标题翻译：用于检测基板切口或平面的方法和装置
公开(公告)号：US08101934B2
公开(公告)日：2012-01-24
申请号：US11683420
申请日：2007-03-07
申请人： Hui Chen , Haochuan Zhang , Noel A. Manto
发明人： Hui Chen , Haochuan Zhang , Noel A. Manto
IPC分类号： G01V8/00
CPC分类号： G01V8/12
摘要： In a first aspect, a first apparatus is provided. The first apparatus includes a through-beam sensor coupled to a scrubber and adapted to detect a notch or flat of a substrate in the scrubber during processing. The through-beam sensor has (1) an emitter facing a first major surface of a substrate in the scrubber and adapted to transmit a beam toward an edge of the first major surface; and (2) a receiver facing a second major surface of the substrate and adapted to receive the beam transmitted from the emitter when the edge of the substrate does not obstruct the beam. Numerous other aspects are provided.
摘要翻译：在第一方面中，提供了一种第一装置。第一装置包括耦合到洗涤器并适于在处理期间检测洗涤器中的基板的凹口或平面的通过光束传感器。通过光束传感器具有（1）发射器面向洗涤器中的基板的第一主表面并且适于将光束传送到第一主表面的边缘; 和（2）接触器，其面对衬底的第二主表面，并且适于在衬底的边缘不阻挡光束时接收从发射器发射的光束。提供了许多其他方面。

6. 发明申请

US20080210258A1 SCRUBBER BOX AND METHODS FOR USING THE SAME 有权
标题翻译： SCRUBBER BOX及其使用方法
公开(公告)号：US20080210258A1
公开(公告)日：2008-09-04
申请号：US12102846
申请日：2008-04-14
申请人： Joseph Yudovsky , Avi Tepman , Kenneth R. Reynolds , Younes Achkire , Dan A. Marohl , Steve G. Ghanayem , Alexander S. Polyak , Gary Ettinger , Haochuan Zhang , Hui Chen
发明人： Joseph Yudovsky , Avi Tepman , Kenneth R. Reynolds , Younes Achkire , Dan A. Marohl , Steve G. Ghanayem , Alexander S. Polyak , Gary Ettinger , Haochuan Zhang , Hui Chen
IPC分类号： B08B7/00 , A47L25/00
CPC分类号： H01L21/67046 , B08B1/04
摘要： A scrubber box is provided that includes a tank adapted to receive a substrate for cleaning, supports outside of the tank and adapted to couple to ends of scrubber brushes disposed within the tank, a motor mounted to each of the supports and adapted to rotate the scrubber brushes, a base to which the supports are pivotally mounted via spherical bearings adapted to permit toe-in of the scrubber brushes, a brush gap actuator adapted, via a crank and rocker mechanism, to substantially simultaneously pivot the supports toward or away from each other so as to permit the scrubber brushes to substantially simultaneously achieve or break contact with the substrate, and a toe-in actuator adapted to move two of the spherical bearings toward or away from each other so as to adjust a toe-in angle between the scrubber brushes.
摘要翻译：提供了一种洗涤器箱，其包括适于接收用于清洁的基底的罐，支撑在罐外部并且适于耦合到设置在罐内的洗涤器刷的端部;马达，其安装到每个支撑件上并适于旋转洗涤器电刷，支架通过适于允许洗涤器刷子进入的球面轴承可枢转地安装的基座，经由曲柄和摇臂机构适应的基本上同时地使支撑件朝向或远离彼此枢转的电刷间隙致动器以便允许洗涤器刷子基本上同时实现或断开与基板的接触，以及适于将两个球形轴承朝向或远离彼此移动的脚趾致动器，以便调节洗涤器之间的束缚角度刷子

7. 发明授权

US07774887B2 Scrubber box and methods for using the same 有权
标题翻译：洗涤箱和使用方法
公开(公告)号：US07774887B2
公开(公告)日：2010-08-17
申请号：US12102846
申请日：2008-04-14
申请人： Joseph Yudovsky , Avi Tepman , Kenneth R. Reynolds , Younes Achkire , Dan A. Marohl , Steve G. Ghanayem , Alexander S. Polyak , Gary Ettinger , Haochuan Zhang , Hui Chen
发明人： Joseph Yudovsky , Avi Tepman , Kenneth R. Reynolds , Younes Achkire , Dan A. Marohl , Steve G. Ghanayem , Alexander S. Polyak , Gary Ettinger , Haochuan Zhang , Hui Chen
IPC分类号： B08B7/00 , A47L25/00
CPC分类号： H01L21/67046 , B08B1/04
摘要： A scrubber box is provided that includes a tank adapted to receive a substrate for cleaning, supports outside of the tank and adapted to couple to ends of scrubber brushes disposed within the tank, a motor mounted to each of the supports and adapted to rotate the scrubber brushes, a base to which the supports are pivotally mounted via spherical bearings adapted to permit toe-in of the scrubber brushes, a brush gap actuator adapted, via a crank and rocker mechanism, to substantially simultaneously pivot the supports toward or away from each other so as to permit the scrubber brushes to substantially simultaneously achieve or break contact with the substrate, and a toe-in actuator adapted to move two of the spherical bearings toward or away from each other so as to adjust a toe-in angle between the scrubber brushes.
摘要翻译：提供了一种洗涤器箱，其包括适于接收用于清洁的基底的罐，支撑在罐外部并且适于耦合到设置在罐内的洗涤器刷的端部;马达，其安装到每个支撑件上并适于旋转洗涤器电刷，支架通过适于允许洗涤器刷子进入的球面轴承可枢转地安装的基座，经由曲柄和摇臂机构适应的基本上同时地使支撑件朝向或远离彼此枢转的电刷间隙致动器以便允许洗涤器刷子基本上同时实现或断开与基板的接触，以及适于将两个球形轴承朝向或远离彼此移动的脚趾致动器，以便调节洗涤器之间的束缚角度刷子

8. 发明申请

US20050087212A1 Scrubber box and methods for using the same 有权
标题翻译：洗涤箱和使用方法
公开(公告)号：US20050087212A1
公开(公告)日：2005-04-28
申请号：US10976012
申请日：2004-10-28
申请人： Joseph Yudovsky , Avi Tepman , Kenneth Reynolds , Younes Achkire , Dan Marohl , Steve Ghanayem , Alexander Polyak , Gary Ettinger , Haochuan Zhang , Hui Chen
发明人： Joseph Yudovsky , Avi Tepman , Kenneth Reynolds , Younes Achkire , Dan Marohl , Steve Ghanayem , Alexander Polyak , Gary Ettinger , Haochuan Zhang , Hui Chen
IPC分类号： B08B1/04 , H01L21/00
CPC分类号： H01L21/67046 , B08B1/04
摘要： A scrubber box is provided that includes a tank adapted to receive a substrate for cleaning, supports outside of the tank and adapted to couple to ends of scrubber brushes disposed within the tank, a motor mounted to each of the supports and adapted to rotate the scrubber brushes, a base to which the supports are pivotally mounted via spherical bearings adapted to permit toe-in of the scrubber brushes, a brush gap actuator adapted, via a crank and rocker mechanism, to substantially simultaneously pivot the supports toward or away from each other so as to permit the scrubber brushes to substantially simultaneously achieve or break contact with the substrate, and a toe-in actuator adapted to move two of the spherical bearings toward or away from each other so as to adjust a toe-in angle between the scrubber brushes.
摘要翻译：提供了一种洗涤器箱，其包括适于接收用于清洁的基底的罐，支撑在罐外部并且适于耦合到设置在罐内的洗涤器刷的端部;马达，其安装到每个支撑件上并适于旋转洗涤器电刷，支架通过适于允许洗涤器刷子进入的球面轴承可枢转地安装的基座，经由曲柄和摇臂机构适应的基本上同时地使支撑件朝向或远离彼此枢转的电刷间隙致动器以便允许洗涤器刷子基本上同时实现或断开与基板的接触，以及适于将两个球形轴承朝向或远离彼此移动的脚趾致动器，以便调节洗涤器之间的束缚角度刷子

9. 发明授权

US07377002B2 Scrubber box 有权
标题翻译：洗衣盒
公开(公告)号：US07377002B2
公开(公告)日：2008-05-27
申请号：US10976012
申请日：2004-10-28
申请人： Joseph Yudovsky , Avi Tepman , Kenneth R. Reynolds , Younes Achkire , Dan A. Marohl , Steve G. Ghanayem , Alexander S. Polyak , Gary Ettinger , Haochuan Zhang , Hui Chen
发明人： Joseph Yudovsky , Avi Tepman , Kenneth R. Reynolds , Younes Achkire , Dan A. Marohl , Steve G. Ghanayem , Alexander S. Polyak , Gary Ettinger , Haochuan Zhang , Hui Chen
IPC分类号： B08B1/04
CPC分类号： H01L21/67046 , B08B1/04
摘要： A scrubber box is provided that includes a tank adapted to receive a substrate for cleaning, supports outside of the tank and adapted to couple to ends of scrubber brushes disposed within the tank, a motor mounted to each of the supports and adapted to rotate the scrubber brushes, a base to which the supports are pivotally mounted via spherical bearings adapted to permit toe-in of the scrubber brushes, a brush gap actuator adapted, via a crank and rocker mechanism, to substantially simultaneously pivot the supports toward or away from each other so as to permit the scrubber brushes to substantially simultaneously achieve or break contact with the substrate, and a toe-in actuator adapted to move two of the spherical bearings toward or away from each other so as to adjust a toe-in angle between the scrubber brushes.
摘要翻译：提供了一种洗涤器箱，其包括适于接收用于清洁的基底的罐，支撑在罐外部并且适于耦合到设置在罐内的洗涤器刷的端部;马达，其安装到每个支撑件上并适于旋转洗涤器电刷，支架通过适于允许洗涤器刷子进入的球面轴承可枢转地安装的基座，经由曲柄和摇臂机构适应的基本上同时地使支撑件朝向或远离彼此枢转的电刷间隙致动器以便允许洗涤器刷子基本上同时实现或断开与基板的接触，以及适于将两个球形轴承朝向或远离彼此移动的脚趾致动器，以便调节洗涤器之间的束缚角度刷子

10. 外观设计

USD861137S1 Faucet 有权
公开(公告)号：USD861137S1
公开(公告)日：2019-09-24
申请号：US29643387
申请日：2018-04-08
申请人： Hui Chen
设计人： Hui Chen
摘要： FIG. 1 is a perspective view of the faucet showing my new design;
FIG. 2 is a right view thereof;
FIG. 3 is a left view thereof;
FIG. 4 is a front view thereof;
FIG. 5 is a rear view thereof;
FIG. 6 is a top perspective view thereof; and,
FIG. 7 is a bottom perspective view thereof.
The dashed broken lines depict portions of the faucet that form no part of the claim.

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