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    • 1. 发明授权
    • 8 bit per cell non-volatile semiconductor memory structure utilizing trench technology and dielectric floating gate
    • 8位每单元非易失性半导体存储器结构利用沟槽技术和介质浮栅
    • US06204529B1
    • 2001-03-20
    • US09384482
    • 1999-08-27
    • Hsing Lan LungTao Cheng LuMam Tsung Wang
    • Hsing Lan LungTao Cheng LuMam Tsung Wang
    • H01L218247
    • H01L27/11568H01L27/115H01L29/7923H01L29/7926
    • The present application discloses a non-volatile semiconductor memory device for storing up to eight-bits of information. The device has a semiconductor substrate of one conductivity type, a central bottom diffusion region on top of a portion of the semiconductor substrate, a second semiconductor layer on top of the bottom diffusion region, and left and right diffusion regions formed in the second semiconductor layer apart from the central bottom diffusion region thus forming a first vertical channel between the right and central bottom diffusion regions. The device further includes a trapping dielectric layer formed over exposed portions of the semiconductor substrate, left, central and right bottom diffusion regions and second semiconductor layer and a wordline formed over the trapping dielectric layer. A methods of fabricating this novel cell using trench technology is also disclosed.
    • 本申请公开了一种用于存储多达8位信息的非易失性半导体存储器件。 该器件具有一个导电类型的半导体衬底,半导体衬底的一部分的顶部上的中心底部扩散区域,在底部扩散区域的顶部上的第二半导体层,以及形成在第二半导体层中的左右扩散区域 除了中心底部扩散区域,从而在右侧和中央底部扩散区域之间形成第一垂直通道。 该器件还包括形成在半导体衬底,左,中,右底部扩散区和第二半导体层的暴露部分之上的俘获电介质层,以及形成在俘获电介质层上的字线。 还公开了使用沟槽技术制造这种新型电池的方法。
    • 2. 发明授权
    • 8 bit per cell non-volatile semiconductor memory structure utilizing trench technology and dielectric floating gate
    • 8位每单元非易失性半导体存储器结构利用沟槽技术和介质浮栅
    • US06432782B1
    • 2002-08-13
    • US09776290
    • 2001-02-02
    • Hsing Lan LungTao Cheng LuMam Tsung Wang
    • Hsing Lan LungTao Cheng LuMam Tsung Wang
    • H01L21336
    • H01L27/11568H01L27/115H01L29/7923H01L29/7926
    • The present application discloses a non-volatile semiconductor memory device for storing up to eight-bits of information. The device has a semiconductor substrate of one conductivity type, a central bottom diffusion region on top of a portion of the semiconductor substrate, a second semiconductor layer on top of the bottom diffusion region, and left and right diffusion regions formed in the second semiconductor layer apart from the central bottom diffusion region thus forming a first vertical channel between the right and central bottom diffusion regions. The device further includes a trapping dielectric layer formed over exposed portions of the semiconductor substrate, left, central and right bottom diffusion regions and second semiconductor layer and a wordline formed over the trapping dielectric layer. A methods of fabricating this novel cell using trench technology is also disclosed.
    • 本申请公开了一种用于存储多达8位信息的非易失性半导体存储器件。 该器件具有一个导电类型的半导体衬底,半导体衬底的一部分的顶部上的中心底部扩散区域,在底部扩散区域的顶部上的第二半导体层,以及形成在第二半导体层中的左右扩散区域 除了中心底部扩散区域,从而在右侧和中央底部扩散区域之间形成第一垂直通道。 该器件还包括形成在半导体衬底,左,中,右底部扩散区和第二半导体层的暴露部分之上的俘获电介质层,以及形成在俘获电介质层上的字线。 还公开了使用沟槽技术制造这种新型电池的方法。