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    • 2. 发明申请
    • Magnetic transducer with milling mask
    • 具有铣削面罩的磁性换能器
    • US20070139816A1
    • 2007-06-21
    • US11707524
    • 2007-02-12
    • Tsung ChenDavid DruistQuang LeKim LeeChun-Ming WangHoward Zolla
    • Tsung ChenDavid DruistQuang LeKim LeeChun-Ming WangHoward Zolla
    • B44C1/22G11B5/127
    • G11B5/3163G11B5/1278G11B5/3116Y10T29/49032
    • A method for fabricating a magnetic head with a trapezoidal shaped pole piece tip is described. The body of the main pole piece is deposited; then one or more layers for the pole piece tip are deposited. A bed material is deposited over the pole piece tip material. A void is formed in the bed material over the area for the pole piece tip. The void is filled with an ion-milling resistant material such as alumina preferably using atomic layer deposition or atomic layer chemical vapor deposition. The excess ion-milling resistant material and the bed material are removed. The result is an ion-milling mask formed over the area for the pole piece tip. Ion milling is then used to remove the unmasked material in the pole piece tip layer and to form a beveled pole piece tip and preferably a beveled face on the main pole piece.
    • 描述了制造具有梯形极片尖端的磁头的方法。 主极片的主体被沉积; 然后沉积用于极片尖端的一个或多个层。 床材料沉积在极片末端材料上。 在用于极片尖端的区域上的床材料中形成空隙。 空隙填充有耐离子碾磨材料,例如氧化铝,优选使用原子层沉积或原子层化学气相沉积。 除去过量的抗离子碾磨材料和床料。 结果是在极片尖端的区域上形成离子铣削掩模。 然后使用离子铣削去除极片末端层中的未掩模材料,并且在主极片上形成斜面极片末端,并且优选地形成斜面。
    • 3. 发明申请
    • Method for fabricating a pole tip in a magnetic transducer
    • 用于在磁换能器中制造极尖的方法
    • US20060000795A1
    • 2006-01-05
    • US10882883
    • 2004-06-30
    • Tsung ChenDavid DruistQuang LeKim LeeChun-Ming WangHoward Zolla
    • Tsung ChenDavid DruistQuang LeKim LeeChun-Ming WangHoward Zolla
    • B44C1/22
    • G11B5/3163G11B5/1278G11B5/3116Y10T29/49032
    • A method for fabricating a magnetic head with a trapezoidal shaped pole piece tip is described. The body of the main pole piece is deposited, then one or more layers for the pole piece tip are deposited. A bed material is deposited over the pole piece tip material. A void is formed in the bed material over the area for the pole piece tip. The void is filled with an ion-milling resistant material such as alumina preferably using atomic layer deposition or atomic layer chemical vapor deposition. The excess ion-milling resistant material and the bed material are removed. The result is an ion-milling mask formed over the area for the pole piece tip. Ion milling is then used to remove the unmasked material in the pole piece tip layer and to form a beveled pole piece tip and preferably a beveled face on the main pole piece.
    • 描述了制造具有梯形极片尖端的磁头的方法。 沉积主极片的主体,然后沉积用于极片尖端的一个或多个层。 床材料沉积在极片末端材料上。 在用于极片尖端的区域上的床材料中形成空隙。 空隙填充有耐离子碾磨材料,例如氧化铝,优选使用原子层沉积或原子层化学气相沉积。 除去过量的抗离子碾磨材料和床料。 结果是在极片尖端的区域上形成离子铣削掩模。 然后使用离子铣削去除极片末端层中的未掩模材料,并且在主极片上形成斜面极片末端,并且优选地形成斜面。