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    • 3. 发明申请
    • Acoustically coupled resonators and method of making the same
    • 声耦合谐振器及其制作方法
    • US20060232361A1
    • 2006-10-19
    • US11109596
    • 2005-04-18
    • Kun WangPaul BradleyRichard Ruby
    • Kun WangPaul BradleyRichard Ruby
    • H03H9/72H03H9/56
    • H03H9/587H03H3/02H03H7/1708H03H9/0095H03H9/0571H03H9/583H03H9/584H03H9/706H03H2003/0428Y10T29/49002
    • An apparatus includes a substrate with a cavity and a two-stage resonator filter fabricated over the cavity. The two-stage resonator filter includes a first stage and a second stage. The first stage includes a first resonator and a second resonator, the second resonator acoustically coupled to the first resonator. The second stage includes a third resonator and a fourth resonator, the fourth resonator acoustically coupled to the third resonator. The second resonator and the third resonators are electrically coupled. A decoupling layer couples the first resonator and the second resonator. The decoupling layer extends between the third resonator and the fourth resonator. The first resonator and the fourth resonator are above the substrate. The decoupling layer is above the first resonator and the fourth resonator. The second resonator and the third resonators are above the decoupling layer.
    • 一种装置包括具有空腔的衬底和在空腔上制造的两级谐振器滤波器。 两级谐振滤波器包括第一级和第二级。 第一级包括第一谐振器和第二谐振器,第二谐振器声耦合到第一谐振器。 第二级包括第三谐振器和第四谐振器,第四谐振器声耦合到第三谐振器。 第二谐振器和第三谐振器电耦合。 去耦层耦合第一谐振器和第二谐振器。 解耦层在第三谐振器和第四谐振器之间延伸。 第一谐振器和第四谐振器在衬底之上。 去耦层位于第一谐振器和第四谐振器之上。 第二谐振器和第三谐振器在去耦层之上。