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    • 5. 发明申请
    • THIN FILM TRANSISTOR ARRAY PANEL AND METHOD FOR MANUFACTURING THE SAME
    • 薄膜晶体管阵列及其制造方法
    • US20100144076A1
    • 2010-06-10
    • US12699764
    • 2010-02-03
    • Hong-Sick PARK
    • Hong-Sick PARK
    • H01L21/336
    • H01L27/12H01L27/124H01L51/5228
    • The present invention provides a thin film transistor array panel including an insulating substrate, a gate line formed on the insulating substrate, a gate insulating layer formed on the gate line, a drain electrode and a data line having a source electrode formed on the gate insulating layer wherein the drain electrode faces the source electrode with a gap therebetween, and a pixel electrode connected to the drain electrode. At least one of the gate line, the data line, and the drain electrode includes a first conductive layer made of a conductive oxide and a second conductive layer of Ag that is deposited adjacent to the first conductive layer.
    • 本发明提供一种薄膜晶体管阵列面板,其包括绝缘基板,形成在绝缘基板上的栅极线,形成在栅极线上的栅极绝缘层,漏极电极和数据线,该栅极绝缘层上形成有栅极绝缘 层,其中漏电极面对源电极,其间具有间隙,以及连接到漏电极的像素电极。 栅极线,数据线和漏电极中的至少一个包括由导电氧化物制成的第一导电层和与第一导电层相邻沉积的Ag的第二导电层。