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    • 3. 发明申请
    • Gas Distribution Apparatus and Substrate Processing Apparatus Having the Same
    • 气体分配装置和具有相同功能的基板处理装置
    • US20110048325A1
    • 2011-03-03
    • US12746505
    • 2010-02-26
    • Sun Hong ChoiSeung Ho LeeYoung Hee Lee
    • Sun Hong ChoiSeung Ho LeeYoung Hee Lee
    • C23C16/455C23C16/458
    • C23C16/45565C23C16/452C23C16/45574C23C16/45591
    • Provided are a gas distribution apparatus and a substrate treating apparatus including the same. The substrate treating apparatus includes a chamber comprising a reaction space, a substrate seat unit disposed in the reaction space of the chamber to radially seat a plurality of substrates with respect to a center thereof, and a gas distribution device comprising a first gas distribution part configured to eject at least two source materials onto a substrate through routes different from each other and a second gas distribution part configured to eject a source material having a decomposition temperature greater than an average of decomposition temperatures of the at least two source materials onto the substrate. The first gas distribution part is divided into at least two sections and disposed such that the second gas distribution part is positioned therebetween; and couplable and separable to/from one another.
    • 提供一种气体分配装置和包括该气体分配装置的基板处理装置。 基板处理装置包括:室,包括反应空间;基板座单元,设置在所述室的反作用空间中,以相对于其中心径向安置多个基板;以及气体分配装置,包括:第一气体分配部, 通过彼此不同的路线将至少两种源材料喷射到基板上;以及第二气体分配部件,其配置成将具有大于所述至少两种源材料的分解温度的平均分解温度的源材料喷射到所述基板上。 第一气体分配部分被分成至少两个部分并且被布置成使得第二气体分配部分位于它们之间; 并且可以彼此联接和分离。
    • 6. 发明授权
    • Semiconductor device isolation structure and fabrication method of semiconductor device using the same
    • 半导体器件隔离结构及使用其的半导体器件的制造方法
    • US06214657B1
    • 2001-04-10
    • US09083438
    • 1998-05-22
    • Seung Ho Lee
    • Seung Ho Lee
    • H01L218238
    • H01L21/823481H01L21/76264H01L21/76267H01L21/76283
    • A semiconductor device isolation structure includes a semiconductor substrate including an active region and a field region, an insulation layer buried in the active region of the substrate, and an isolation layer formed in the field region of the substrate deeper than the buried insulation layer. A method for isolating a semiconductor device includes the steps of preparing a semiconductor substrate, defining an active region and a field region in the substrate, forming an insulation layer buried in the active region of the substrate, and forming an isolation layer in the field region of the substrate to be deeper than the buried insulation layer. The invention applies to an SOI (Silicon On Insulator) provided with a SIMOX (Separation by Implanted Oxygen) type, for effectively overcoming interfacial defects between a buried oxide film and a semiconductor substrate, and improves a reliability of the semiconductor device by planarizing the same.
    • 半导体器件隔离结构包括:包括有源区和场区的半导体衬底,埋在衬底的有源区中的绝缘层,以及形成在比掩埋绝缘层更深的衬底的场区中的隔离层。 一种用于隔离半导体器件的方法包括以下步骤:制备半导体衬底,在衬底中限定有源区和场区,形成掩埋在衬底的有源区中的绝缘层,以及在场区中形成隔离层 的衬底比掩埋绝缘层更深。 本发明适用于具有SIMOX(通过注入氧分离)型的SOI(绝缘体上硅),用于有效地克服掩埋氧化膜和半导体衬底之间的界面缺陷,并且通过使其平坦化来提高半导体器件的可靠性 。
    • 9. 发明授权
    • Cap having a foldable visor
    • 帽子有一个可折叠的遮阳板
    • US06357051B1
    • 2002-03-19
    • US09705673
    • 2000-11-03
    • Seung Ho Lee
    • Seung Ho Lee
    • A42B100
    • A42B1/064A42B1/201A42B1/241
    • According to the present invention, a cap having a foldable visor is provided, the cap comprising a visor core and cloth fixed to a upper surface and a lower surface of the visor core, the visor located in a wearer's forehead portion when the wearer wears the cap, wherein said visor core is divided into a plurality of pieces and is foldable about the dividing portions of the visor core, and wherein each cloth with sizes of said divided pieces of said visor core is fixed to one surfaces of the upper and lower surfaces of said divided pieces of said visor core, and a cloth with a total size of said divided pieces of said visor core in a state that said divided pieces of said visor core are adjacent to each other is fixed to the other surfaces of the upper and lower surfaces of said divided pieces of said visor core, so that a gap is formed between said divided pieces of said visor core and said cloth with a total size of said divided pieces of said visor core.
    • 根据本发明,提供了一种具有可折叠遮阳板的盖,所述盖包括固定在所述面板芯的上表面和下表面上的面膜芯和布,所述遮阳板位于佩戴者的前额部分时, 帽,其中所述遮阳板芯被分成多个片,并且围绕所述面片芯的分割部分可折叠,并且其中所述面片芯的所述分割片的尺寸的每个布被固定到所述上表面和下表面的一个表面 所述遮阳板芯的所述分割片和所述遮阳板芯的所述分割片的总尺寸的布在所述遮阳板的所述分割片彼此相邻的状态下固定到所述顶板的另一个表面 所述遮阳板芯的所述分割片的下表面,使得所述遮阳板芯和所述布的所述分割片之间形成有所述遮片芯的所述分割片的总尺寸的间隙。