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    • 10. 发明授权
    • Semiconductor device and production method thereof
    • 半导体装置及其制造方法
    • US07510910B2
    • 2009-03-31
    • US11588315
    • 2006-10-27
    • Osamu Yamagata
    • Osamu Yamagata
    • H01L21/44H01L21/48
    • H01L21/78H01L23/53238H01L23/53295H01L2924/0002Y10S257/92H01L2924/00
    • A semiconductor device and a production method thereof capable of reducing warps of a semiconductor wafer when packaging at a wafer level in a SiP-type semiconductor device, which is configured so that an insulating layer is formed by stacking a plurality of resin layers on a semiconductor chip formed with an electronic circuit, wiring layers are buried in the insulating layer and electrically connected to electrodes, and formation areas of the plurality of resin layers become gradually smaller from an area of an upper surface of the semiconductor chip as they get farther from the semiconductor chip, so that a side surface and an upper surface of each of the resin layers and the upper surface of the semiconductor chip form a stepwise shape.
    • 一种半导体器件及其制造方法,其能够在SiP型半导体器件中的晶片级封装时减少半导体晶片的翘曲,SiP型半导体器件被构造为通过在半导体上层叠多个树脂层形成绝缘层 芯片由电子电路形成,布线层被埋在绝缘层中并电连接到电极,并且多个树脂层的形成区域从半导体芯片的上表面的区域逐渐变小, 半导体芯片,使得树脂层的侧表面和上表面以及半导体芯片的上表面形成阶梯状。