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    • 4. 发明申请
    • FILM FORMATION DEVICE
    • 胶片形成装置
    • US20130247820A1
    • 2013-09-26
    • US13990641
    • 2011-03-15
    • Hiroyuki OritaTakahiro ShirahataAkio Yoshida
    • Hiroyuki OritaTakahiro ShirahataAkio Yoshida
    • H01L31/18
    • H01L31/1876B05B1/04B05B7/0012B05B7/0416B05B7/0458C23C16/4486C23C16/45514C23C16/45595
    • An object of the present invention is to provide a film formation device that is able to prevent a size increase in a configuration around a mist jet nozzle while maintaining uniform spouting of a mist to a substrate on which a film is to be formed. The present invention includes a mist generator (2) that generates a mist of a raw material of a film to be formed, and a mist jet nozzle (1) that jets the mist generated by the mist generator to a substrate on which a film is to be formed. The mist jet nozzle includes: a main body (1A) having a hollow portion (1H); a mist supply port (5a) that supplies the mist; a spout (8) that jets the mist to the outside; a carrier gas supply port (6a) that supplies a carrier gas; and a shower plate (7) having a plurality of holes (7a) formed therein. By the arrangement of the shower plate, the hollow portion is divided into a first space (1S) connected to the carrier gas supply port and a second space (1T) connected to the spout. The mist supply port is connected to the second space.
    • 本发明的目的是提供一种成膜装置,其能够防止喷雾喷嘴周围的构造的尺寸增大,同时保持喷雾到将要形成膜的基板上的均匀喷射。 本发明包括产生要形成的膜的原料雾的雾发生器(2)和将由雾发生器产生的雾喷射到其上的膜的喷雾喷嘴(1) 要形成 雾喷嘴包括:具有中空部分(1H)的主体(1A); 供给雾的雾供给口(5a) 喷雾器(8)将雾气喷射到外面; 供给载气的载气供给口(6a) 和具有形成在其中的多个孔(7a)的喷淋板(7)。 通过喷淋板的布置,中空部被分成连接到载气供给口的第一空间(1S)和连接到喷口的第二空间(1T)。 雾供应端口连接到第二个空间。