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1. 发明授权

US4426577A Electron microscope of scanning type 失效
标题翻译：扫描型电子显微镜
公开(公告)号：US4426577A
公开(公告)日：1984-01-17
申请号：US234790
申请日：1981-02-17
申请人： Hirotami Koike , Hideaki Kyogoku , Masaru Watanabe
发明人： Hirotami Koike , Hideaki Kyogoku , Masaru Watanabe
IPC分类号： H01J37/244 , H01J37/28
CPC分类号： H01J37/244 , H01J37/28
摘要： An electron microscope of scanning type comprises first and second detectors for detecting secondary electrons emitted from a specimen irradiated by a scanning electron beam are disposed across the magnetic field of an objective lens of an electron-optical system of the microscope. The detection signals obtained from the outputs of both detectors are subjected to simultaneous signal processings.
摘要翻译：扫描型电子显微镜包括用于检测从扫描电子束照射的样本发射的二次电子的第一和第二检测器，跨越显微镜的电子 - 光学系统的物镜的磁场。从两个检测器的输出获得的检测信号经受同时信号处理。

2. 发明授权

US4597288A Barometer 失效
标题翻译：晴雨表
公开(公告)号：US4597288A
公开(公告)日：1986-07-01
申请号：US715496
申请日：1985-03-25
申请人： Hideaki Kyogoku , Fujio Tamura
发明人： Hideaki Kyogoku , Fujio Tamura
IPC分类号： G01L9/00
CPC分类号： G01L9/0022 , Y10S73/04
摘要： The present invention provides a barometer which includes a frequency control circuit connected to the input of the piezoelectric oscillator, a current-voltage converter connected to the output of the piezoelectric oscillator, a phase comparator connected to the output of the frequency control circuit and to the output of the current-voltage converter, a voltmeter connected to the current-voltage converter, a voltmeter connected to the phase comparator, a low-pass filter connected to the phase comparator, and input means for applying the output of the low-pass filter to the frequency control circuit. In the construction described above, the ambient pressure of the gas around the piezoelectric oscillator is represented by the a.c. voltage value of the piezoelectric oscillator.
摘要翻译：本发明提供一种气压计，其包括连接到压电振荡器的输入的频率控制电路，连接到压电振荡器的输出的电流 - 电压转换器，连接到频率控制电路的输出的相位比较器电流 - 电压转换器的输出，连接到电流 - 电压转换器的电压表，连接到相位比较器的电压表，连接到相位比较器的低通滤波器，以及用于施加低通滤波器的输出的输入装置到频率控制电路。在上述结构中，压电振荡器周围的气体的环境压力由a.c. 压电振荡器的电压值。

3. 发明授权

US4704526A Apparatus of regulating shape of focused ion beams 失效
标题翻译：调节聚焦离子束形状的装置
公开(公告)号：US4704526A
公开(公告)日：1987-11-03
申请号：US783247
申请日：1985-10-02
申请人： Hideaki Kyogoku , Takashi Kaito
发明人： Hideaki Kyogoku , Takashi Kaito
IPC分类号： G03F1/00 , G03F1/72 , G03F1/74 , H01J37/153 , H01J37/304 , H01L21/027 , G01N23/00
CPC分类号： G03F1/74 , H01J37/153 , H01J37/304
摘要： An apparatus for regulating the shape of a focused ion beam irradiates a sample which is comprised of a pattern on a substrate with a scanning ion beam, detectors for detecting two kinds of secondary ions one emitted from the substrate and the other emitted from the pattern, comparators for comparing the detected signals with respective predetermined values and then converting the detected signals into binary signals, and a color display for displaying the shapes of the substrate and the pattern in the form of pictures of different colors on the basis of the binary signals corresponding to each kind of secondary ions. The spot shape of the ion beam is corrected with an astigmatic correction electrode and/or an object lens while observing the shape of the overlapping portions of the pictures of different colors.
摘要翻译：用于调节聚焦离子束的形状的装置用扫描离子束照射由衬底上的图案构成的样品，用于检测从衬底发射的两种二次离子的检测器和从该图案发射的另一种二次离子，比较器，用于将检测到的信号与各个预定值进行比较，然后将检测到的信号转换为二进制信号;以及彩色显示器，用于基于相应的二进制信号以不同颜色的图像的形式显示基板和图案的形状对各种二次离子。在观察不同颜色的图像的重叠部分的形状的同时，用散光校正电极和/或物镜校正离子束的斑点形状。

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