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    • 3. 发明授权
    • Semiconductor device
    • 半导体器件
    • US06501178B1
    • 2002-12-31
    • US08795176
    • 1997-02-04
    • Hirotada KuriyamaKazuhito Tsutsumi
    • Hirotada KuriyamaKazuhito Tsutsumi
    • H01L2348
    • H01L27/11H01L23/5226H01L27/1108H01L2924/0002Y10S257/903H01L2924/00
    • In a semiconductor device, a first conductive layer (2) is located on a semiconductor substrate (14) through an insulating film (13a) and beneath a first insulating layer (13f). On the first insulating layer (13f) is formed a second conductive layer (8) followed by a second insulating layer (13g), either or both of which are very thin. A third conductive layer (6) is placed on the second insulating layer (13g). A connecting column (16) extends from the third conducting layer (6) through and forming an end contact with the second conductive layer (8) to the first conducting layer (2) and the substrate (14), with a greater portion of the column resting upon the substrate (14). The third conductive layer (6) forms the gate electrode (6b) of a top gate type TFT.
    • 在半导体器件中,第一导电层(2)通过绝缘膜(13a)位于半导体衬底(14)上并位于第一绝缘层(13f)下方。 在第一绝缘层(13f)上形成第二导电层(8),随后是第二绝缘层(13g),其中一个或两者都非常薄。 第三导电层(6)放置在第二绝缘层(13g)上。 连接柱(16)从第三导电层(6)延伸穿过并与第二导电层(8)形成与第一导电层(2)和基板(14)的端部接触,其中较大部分的 柱放置在基底(14)上。 第三导电层(6)形成顶栅型TFT的栅电极(6b)。