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    • 3. 发明授权
    • Apparatus for and method of determining properties of saw substrates
    • 用于确定锯片基材特性的装置和方法
    • US4595853A
    • 1986-06-17
    • US552815
    • 1983-11-17
    • Kazuyuki NagatsumaYukio ItoHirosi TakeuchiSakichi AshidaShigeru Jyomura
    • Kazuyuki NagatsumaYukio ItoHirosi TakeuchiSakichi AshidaShigeru Jyomura
    • G01H1/00H03H9/02H01L41/04
    • G01H1/00H03H9/02559
    • An apparatus for and a method of non-destructively determining properties of a SAW substrate, in which first and second interdigital transducers are formed in a spaced relationship on a single common piezoelectric substrate, a blocking member is formed between said transducers on the substrate for preventing an acoustic wave signal from being transferred between said transducers via the common substrate, spacers are provided for supporting a to-be-determined SAW substrate above the common substrate with a spacing left between the SAW substrate and the fingers of transducers, the SAW substrate to be placed on the spacers is positioned with respect to the transducers so that co-directional mode coupling will, in operation, effectively take place between the SAW substrate and the transducers, adherence between the SAW substrate and the spacers is secured to enhance the co-directional mode coupling, an electric signal is applied to the first transducer for transferring, due to the co-directional mode coupling, an acoustic signal to the SAW substrate along the surface of which the acoustic signal will propagate and will be transferred, due to the co-directional mode coupling, to the second transducer, and the output of the second transducer is measured.
    • 一种用于非破坏性地确定SAW基板的特性的装置和方法,其中第一和第二叉指式换能器在单个公共压电基片上以间隔的关系形成,阻挡构件形成在基板上的所述换能器之间,用于防止 通过公共衬底在所述换能器之间传递的声波信号,用于在公共衬底上方支撑待确定的SAW衬底,间隔物留在SAW衬底和换能器的指状件之间,SAW衬底 放置在间隔物上相对于换能器定位,使得在SAW衬底和换能器之间有效地发生操作中的同向模式耦合,从而确保SAW衬底和衬垫之间的粘附, 方向模式耦合,由于共同方向,电信号被施加到第一换能器以进行传送 声耦合,声表面基底沿声表面的声信号将传播并由于同向模式耦合而传播到第二换能器,并测量第二换能器的输出。
    • 4. 发明授权
    • Piezoelectric substances
    • 压电物质
    • US4565642A
    • 1986-01-21
    • US513424
    • 1983-07-13
    • Shigeru JyomuraHiroshi Takeuchi
    • Shigeru JyomuraHiroshi Takeuchi
    • C04B35/493H01L41/187C04B35/49
    • H01L41/187C04B35/493
    • A piezoelectric substance, which comprises a ternary solid solution having a composition represented by the general formula:xPbZrO.sub.3 --yA--zPbTiO.sub.3and having a composition ratio represented by coordinate in a square formed by successively connecting point P (x=0.905; y=0.095; z=0.000), point Q (x=0.960; y=0.040; z=0.000), point R (x=0.932; y=0.005; z=0.063), point S (x=0.905; y=0.005; z=0.090) and said P by straight lines, including the respective lines except axis y in a ternary composition diagram showing the composition of said ternary solid solution, and said A being Pb(Mn.sub.1/3 Nb.sub.2/3)O.sub.3, Pb(Mn.sub.1/2 Nb.sub.1/2)O.sub.3, Pb(Fe.sub.1/2 Sb.sub.1/2)O.sub.3, Pb(Mn.sub.1/2 Ta.sub.1/2)O.sub.3, Pb(Mn.sub.1/3 Sb.sub.2/3)O.sub.3, Pb(Mn.sub.1/2 Sb.sub.1/2)O.sub.3, Pb(Fe.sub.1/2 Nb.sub.1/2)O.sub.3, Pb(Fe.sub.1/3 Sb.sub.2/3)O.sub.3, Pb(Mn.sub.1/3 Ta.sub.2/3)O.sub.3, Pb(Fe.sub.1/3 Nb.sub.2/3)O.sub.3, Pb(Sb.sub.1/2 Ta.sub.1/2)O.sub.3, Pb(Fe.sub.1/3 Ta.sub.2/3)O.sub.3, Pb(Mn.sub.2/3 W.sub.1/3)O.sub.3, Pb(Sb.sub.1/2 Nb.sub. 1/2)O.sub.3, Pb(Fe.sub.1/2 Ta.sub.1/2)O.sub.3, or Pb(Fe.sub.2/3 Te.sub.1/3)O.sub.3. The piezoelectric substance has a high electromechanical anistoropy in electromechanical coupling factors, a high electromechanical coupling factor of thickness vibration mode, and a low dielectric constant and serves as a distinguished material for ultrasonic vibrator, etc.
    • 一种压电体,其特征在于,具有由下述通式表示的组成的三元固溶体:xPbZrO3-yA-zPbTiO3,其组成比由连续点P(x = 0.905; y = 0.095; 点Q(x = 0.960; y = 0.040; z = 0.000),点R(x = 0.932; y = 0.005; z = 0.063),点S(x = 0.905; y = 0.005; z = 0.090)和所述P的直线,包括示出所述三元固溶体的组成的三元组成图中除轴y以外的各行,所述A为Pb(Mn1 / 3Nb2 / 3)O3,Pb(Mn1 / 2Nb1 / 2)O3,Pb(Fe1 / 2Sb1 / 2)O3,Pb(Mn1 / 2Ta1 / 2)O3,Pb(Mn1 / 3Sb2 / 3)O3,Pb(Mn1 / 2Sb1 / 2)O3,Pb(Fe1 / 2Nb1 / 2)O3,Pb(Fe1 / 3Sb2 / 3)O3,Pb(Mn1 / 3Ta2 / 3)O3,Pb(Fe1 / 3Nb2 / 3)O3,Pb(Sb1 / 2Ta1 / 2)O3,Pb(Fe1 / 3Ta2 / 3)O3,Pb(Mn2 / 3W1 / 3)O3,Pb(Sb1 / 2Nb 1/2)O3,Pb(Fe1 / 2Ta1 / 2)O3或Pb(Fe2 / 3Te1 / 3)O3。 该压电材料在机电耦合系数中具有高机电电阻,厚度振动模式的高机电耦合系数和低介电常数,并且作为超声波振动器等的显着材料。