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1. 发明授权

US08704431B2 Discharge lamp, light source apparatus, exposure apparatus, and exposure apparatus manufacturing method 有权
标题翻译：放电灯，光源装置，曝光装置和曝光装置的制造方法
公开(公告)号：US08704431B2
公开(公告)日：2014-04-22
申请号：US13462454
申请日：2012-05-02
申请人： Hiroshi Shirasu , Yasuo Aoki , Motoo Koyama , Takayuki Kikuchi
发明人： Hiroshi Shirasu , Yasuo Aoki , Motoo Koyama , Takayuki Kikuchi
IPC分类号： H01J61/52
CPC分类号： F21V19/006 , G03F7/70016 , H01J5/56 , H01J61/523 , H01J61/822
摘要： A light source apparatus is equipped with a discharge lamp, which has a glass tube that forms a light emitting part and a base member that is coupled thereto, and a mounting apparatus that holds the discharge lamp via the base member. Therein, the base member has a flange part that contacts positioning plate of the mounting apparatus, and a fixed part that is urged with a pressing force that presses the flange part to the positioning plate. Furthermore, the mounting apparatus has a fixing arm that urges the fixed part by a compression coil spring.
摘要翻译：光源装置配备有放电灯，其具有形成发光部的玻璃管和与其连接的基座部件，以及通过基座部件保持放电灯的安装装置。其特征在于，所述基座部件具有与所述安装装置的定位板接触的凸缘部以及将所述凸缘部压向所述定位板的按压力而被推压的固定部。此外，安装装置具有通过压缩螺旋弹簧推压固定部的固定臂。

2. 发明申请

US20120248960A1 DISCHARGE LAMP, LIGHT SOURCE APPARATUS, EXPOSURE APPARATUS, AND EXPOSURE APPARATUS MANUFACTURING METHOD 有权
标题翻译：放电灯，光源装置，曝光装置和曝光装置制造方法
公开(公告)号：US20120248960A1
公开(公告)日：2012-10-04
申请号：US13462454
申请日：2012-05-02
申请人： Hiroshi SHIRASU , Yasuo Aoki , Motoo Koyama , Takayuki Kikuchi
发明人： Hiroshi SHIRASU , Yasuo Aoki , Motoo Koyama , Takayuki Kikuchi
IPC分类号： H01J61/52
CPC分类号： F21V19/006 , G03F7/70016 , H01J5/56 , H01J61/523 , H01J61/822
摘要： A light source apparatus is equipped with a discharge lamp, which has a glass tube that forms a light emitting part and a base member that is coupled thereto, and a mounting apparatus that holds the discharge lamp via the base member. Therein, the base member has a flange part that contacts positioning plate of the mounting apparatus, and a fixed part that is urged with a pressing force that presses the flange part to the positioning plate. Furthermore, the mounting apparatus has a fixing arm that urges the fixed part by a compression coil spring.
摘要翻译：光源装置配备有放电灯，其具有形成发光部的玻璃管和与其连接的基座部件，以及通过基座部件保持放电灯的安装装置。其特征在于，所述基座部件具有与所述安装装置的定位板接触的凸缘部以及将所述凸缘部压向所述定位板的按压力而被推压的固定部。此外，安装装置具有通过压缩螺旋弹簧推压固定部的固定臂。

3. 发明授权

US08531093B2 Discharge lamp, light source apparatus, exposure apparatus, and exposure apparatus manufacturing method 有权
标题翻译：放电灯，光源装置，曝光装置和曝光装置的制造方法
公开(公告)号：US08531093B2
公开(公告)日：2013-09-10
申请号：US11896416
申请日：2007-08-31
申请人： Hiroshi Shirasu , Yasuo Aoki , Motoo Koyama , Takayuki Kikuchi
发明人： Hiroshi Shirasu , Yasuo Aoki , Motoo Koyama , Takayuki Kikuchi
IPC分类号： H01J7/26 , H01J1/02 , H01J61/52 , F21V29/00 , H01R13/00
CPC分类号： F21V19/006 , G03F7/70016 , H01J5/56 , H01J61/523 , H01J61/822
摘要： A light source apparatus is equipped with a discharge lamp, which has a glass tube that forms a light emitting part and a base member that is coupled thereto, and a mounting apparatus that holds the discharge lamp via the base member. Therein, the base member has a flange part that contacts positioning plate of the mounting apparatus, and a fixed part that is urged with a pressing force that presses the flange part to the positioning plate. Furthermore, the mounting apparatus has a fixing arm that urges the fixed part by a compression coil spring.
摘要翻译：光源装置配备有放电灯，其具有形成发光部的玻璃管和与其连接的基座部件，以及通过基座部件保持放电灯的安装装置。其特征在于，所述基座部件具有与所述安装装置的定位板接触的凸缘部以及将所述凸缘部压向所述定位板的按压力而被推压的固定部。此外，安装装置具有通过压缩螺旋弹簧推压固定部的固定臂。

4. 发明申请

US20080218049A1 Discharge lamp, light source apparatus, exposure apparatus, and exposure apparatus manufacturing method 有权
标题翻译：放电灯，光源装置，曝光装置和曝光装置的制造方法
公开(公告)号：US20080218049A1
公开(公告)日：2008-09-11
申请号：US11896416
申请日：2007-08-31
申请人： Hiroshi Shirasu , Yasuo Aoki , Motoo Koyama , Takayuki Kikuchi
发明人： Hiroshi Shirasu , Yasuo Aoki , Motoo Koyama , Takayuki Kikuchi
IPC分类号： H01J7/26 , H01J61/52 , H01J9/46
CPC分类号： F21V19/006 , G03F7/70016 , H01J5/56 , H01J61/523 , H01J61/822
摘要： A light source apparatus is equipped with a discharge lamp, which has a glass tube that forms a light emitting part and a base member that is coupled thereto, and a mounting apparatus that holds the discharge lamp via the base member. Therein, the base member has a flange part that contacts positioning plate of the mounting apparatus, and a fixed part that is urged with a pressing force that presses the flange part to the positioning plate. Furthermore, the mounting apparatus has a fixing arm that urges the fixed part by a compression coil spring.
摘要翻译：光源装置配备有放电灯，其具有形成发光部的玻璃管和与其连接的基座部件，以及通过基座部件保持放电灯的安装装置。其特征在于，所述基座部件具有与所述安装装置的定位板接触的凸缘部以及将所述凸缘部压向所述定位板的按压力而被推压的固定部。此外，安装装置具有通过压缩螺旋弹簧推压固定部的固定臂。

5. 发明授权

US09311947B2 Metal magnetic powder and process for producing the same, magnetic coating material, and magnetic recording medium 有权
标题翻译：金属磁粉及其制造方法，磁性涂料和磁记录介质
公开(公告)号：US09311947B2
公开(公告)日：2016-04-12
申请号：US13638151
申请日：2011-03-31
申请人： Hirohisa Omoto , Takayuki Kikuchi , Toshihiko Ueyama
发明人： Hirohisa Omoto , Takayuki Kikuchi , Toshihiko Ueyama
IPC分类号： H01F1/147 , H01F1/20 , G11B5/712 , B22F1/02 , H01F1/06
CPC分类号： G11B5/712 , B22F1/02 , C22C2202/02 , H01F1/065
摘要： A metal magnetic powder having a metal magnetic phase mainly composed of ferromagnetic elements, and composed of particles containing one or more kinds of elements selected from rare earth elements including Y, and Al, Si. And the method for producing the metal magnetic powder, including the steps of: eluting the non-magnetic components in the particles under an action of a reducing agent acting on the metal magnetic powder, in a solution containing a complexing agent capable of forming the complex with the non-magnetic components; and forming an oxide layer on the particles in the solution after eluting the non-magnetic components into the solution, without drying the particles.
摘要翻译：一种金属磁性粉末，具有主要由铁磁性元素构成的金属磁性相，并且由含有选自Y，和Al，Si的稀土元素中的一种或多种元素的粒子构成。以及金属磁性粉末的制造方法，其特征在于，包括以下步骤：在作用于所述金属磁性粉末的还原剂的作用下，将所述颗粒中的非磁性成分洗脱在含有能够形成所述络合物的络合剂与非磁性部件; 以及在将非磁性组分洗脱到溶液中之后，在溶液中的颗粒上形成氧化物层，而不干燥颗粒。

6. 发明授权

US09165738B2 Discharge lamp, connecting cable, light source apparatus, and exposure apparatus 有权
标题翻译：放电灯，连接电缆，光源装置和曝光装置
公开(公告)号：US09165738B2
公开(公告)日：2015-10-20
申请号：US13652449
申请日：2012-10-15
申请人： Takayuki Kikuchi , Hiroshi Kitano
发明人： Takayuki Kikuchi , Hiroshi Kitano
IPC分类号： H01J5/54 , H01J5/56 , H01J61/52
CPC分类号： H01J5/56 , H01J5/54 , H01J61/523
摘要： A light source device having a large cooling action on the base member of a discharge lamp. A connector on the sides of the power supply and the air blower and the base-side connector of a discharge lamp are connected to each other through a connection cable having a power cable in which an air blow pipe is contained. An electric power is supplied from the power supply to a base part through the power cable of the connection cable, the base-side connector and a flow passage bending member. The cool air from the air blower is supplied to the groove part of the base part through the air blow pipe of the connection cable, the base-side connector and an air blow passage in the flow passage-bending member.
摘要翻译：一种在放电灯的基底构件上具有大的冷却作用的光源装置。电源和鼓风机两侧的连接器和放电灯的基座侧连接器通过具有包含吹气管的电力电缆的连接电缆相互连接。通过连接电缆的电力电缆，基座侧连接器和流路弯曲部件，从电源向基部供给电力。来自鼓风机的冷空气通过连接电缆的吹气管，基部侧连接器和流路弯曲部件中的吹风通道供给到基部的槽部。

7. 发明授权

US09140549B2 Physical quantity detection element, physical quantity detection device, and electronic apparatus 有权
标题翻译：物理量检测元件，物理量检测装置和电子设备
公开(公告)号：US09140549B2
公开(公告)日：2015-09-22
申请号：US13568454
申请日：2012-08-07
申请人： Fumio Ichikawa , Yoichi Okumura , Takayuki Kikuchi
发明人： Fumio Ichikawa , Yoichi Okumura , Takayuki Kikuchi
IPC分类号： G01C19/56 , G01C19/5607
CPC分类号： G01C19/5607
摘要： A physical quantity detection element includes a base part, a first connection part and a second connection part respectively extending from the base part in opposite directions to each other along the X-axis, a pair of first drive vibrating arm and second drive vibrating arm and a pair of third drive vibrating arm and fourth drive vibrating arm respectively extending from the first connection part or the second connection part in opposite directions to each other along the Y-axis, a first drive detection vibrating arm and a second drive detection vibrating arm obliquely extending from the first connection part, a third drive detection vibrating arm and a fourth drive detection vibrating arm obliquely extending from the second connection part, and a first detection vibrating arm and a second detection vibrating arm respectively extending from the base part in opposite directions to each other along the Y-axis.
摘要翻译：物理量检测元件包括基部，第一连接部和第二连接部，其分别沿着X轴相对于彼此沿相反方向从基部延伸;一对第一驱动振动臂和第二驱动振动臂，一对第三驱动振动臂和第四驱动振动臂，其分别从所述第一连接部或所述第二连接部沿着相对于所述Y轴彼此相反的方向延伸;第一驱动检测振动臂和第二驱动检测振动臂，从第一连接部分延伸，第三驱动检测振动臂和从第二连接部分倾斜延伸的第四驱动检测振动臂，以及第一检测振动臂和第二检测振动臂，分别从基部向相反方向延伸到彼此沿着Y轴。

8. 发明授权

US09030082B2 Vibrator element, sensor unit, electronic apparatus, manufacturing method of vibrator element, and manufacturing method of sensor unit 有权
标题翻译：振动元件，传感器单元，电子设备，振动元件的制造方法以及传感器单元的制造方法
公开(公告)号：US09030082B2
公开(公告)日：2015-05-12
申请号：US13298855
申请日：2011-11-17
申请人： Seiichiro Ogura , Takayuki Kikuchi
发明人： Seiichiro Ogura , Takayuki Kikuchi
IPC分类号： H01L41/053 , H03H9/21 , G01C19/5607
CPC分类号： H01L41/253 , G01C19/5607 , H01L41/0475 , H01L41/09 , H01L41/107 , H03H9/21 , Y10T29/42
摘要： A vibration gyro device has a base part and a pair of drive vibrating arms and a pair of detection vibrating arms respectively extended from both ends in a Y-axis direction of the base part. Further, adjustment vibrating arms extended from respective ends of connecting parts respectively extended from both ends in an X-axis direction of the base part in parallel to the drive vibrating arms are provided. At the end sides of the respective adjustment vibrating arms, spindle parts as wider parts are provided. On principal surfaces of the respective adjustment vibrating arms, adjustment electrodes as membranes for adjustment of leakage output of the vibration gyro device are provided.
摘要翻译：振动陀螺装置具有分别从基部的Y轴方向的两端延伸的基部和一对驱动振动臂和一对检测振动臂。此外，设置了从驱动振动臂平行的基部的X轴方向的两端分别延伸的连接部的各端部延伸的调节振动臂。在相应的调节振动臂的端侧设有主轴部件作为较宽的部件。在各个调节振动臂的主表面上，设置有作为用于调节振动陀螺仪装置的泄漏输出的膜的调节电极。

9. 发明授权

US08850887B2 Detection circuit, physical quantity detection apparatus, angular velocity detection apparatus, integrated circuit device, and electronic instrument 有权
标题翻译：检测电路，物理量检测装置，角速度检测装置，集成电路装置和电子仪器
公开(公告)号：US08850887B2
公开(公告)日：2014-10-07
申请号：US13404475
申请日：2012-02-24
申请人： Yoshinao Yanagisawa , Masahiro Oshio , Takayuki Kikuchi , Toshihiro Nishida , Masayuki Takahashi
发明人： Yoshinao Yanagisawa , Masahiro Oshio , Takayuki Kikuchi , Toshihiro Nishida , Masayuki Takahashi
IPC分类号： G01C19/56 , H03H9/24 , G01C19/5776
CPC分类号： G01C19/56 , G01C19/5776 , H03H9/2468
摘要： A detection circuit includes a synchronous detection circuit (synchronous detection section) that synchronously detects a signal that includes a detection signal of a vibrator (an output signal of an amplifier), a switched capacitor filter (SCF) circuit that filters a signal that has been synchronously detected by the synchronous detection circuit (an output signal of a programmable gain amplifier), and an output buffer that buffers and outputs a signal that has been filtered by the SCF circuit, the gain of the SCF circuit being larger than 1.
摘要翻译：检测电路包括同步检测电路（同步检测部分），其同步地检测包括振动器的检测信号（放大器的输出信号）的信号，对已经被存储的信号进行滤波的开关电容滤波器（SCF）电路由同步检测电路（可编程增益放大器的输出信号）同步检测的缓冲器，其输出缓冲并输出由SCF电路滤波的信号，SCF电路的增益大于1。

10. 发明授权

US08652587B2 Method and apparatus for forming film 有权
标题翻译：薄膜成膜方法及装置
公开(公告)号：US08652587B2
公开(公告)日：2014-02-18
申请号：US13046208
申请日：2011-03-11
申请人： Kazuyuki Nakanishi , Takashi Iseki , Yasuhiro Ozawa , Yuka Yamada , Seiji Mizuno , Katsumi Sato , Masafumi Koizumi , Yoshiyuki Funaki , Kyouji Kondo , Takayuki Kikuchi
发明人： Kazuyuki Nakanishi , Takashi Iseki , Yasuhiro Ozawa , Yuka Yamada , Seiji Mizuno , Katsumi Sato , Masafumi Koizumi , Yoshiyuki Funaki , Kyouji Kondo , Takayuki Kikuchi
IPC分类号： H05H1/24
CPC分类号： C23C16/26 , C23C16/503 , C23C16/545
摘要： This invention adopts plasma-enhanced chemical vapor deposition using the apparatus including a chamber, a pair of rotary electrode reels including a feed-out reel and a take-up reel, a plasma source, a material gas supplier, and an exhaust unit, and includes applying a negative voltage applied to the rotary electrode reels from the plasma source while a conductive substrate is fed-out from the feed-out reel and is wound on the take-up reel so that the entire surface of the substrate portion between reels contacts the material gas, whereby plasma sheath is formed along the surface of the substrate portion between reels, and the material gas is activated in the plasma sheath and thus contacts the surface of the substrate, thus forming the film on the surface of the substrate.
摘要翻译：本发明采用等离子体增强化学气相沉积法，该装置包括一个室，一对旋转电极卷轴，包括一个送出卷轴和一个卷取卷轴，等离子体源，原料气体供应器和排气单元，以及包括在从所述送出卷轴送出导电性基板并卷绕在所述卷取卷轴上时，施加从所述等离子体源施加到所述旋转电极卷轴上的负电压，使得所述基板部分在卷盘接触之间的整个表面材料气体，由此在卷轴之间沿着基板部分的表面形成等离子体护套，并且材料气体在等离子体护套中被激活，并且因此接触基板的表面，从而在基板的表面上形成膜。

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