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    • 1. 发明授权
    • Plasma processing apparatus and plasma processing method
    • 等离子体处理装置和等离子体处理方法
    • US6092486A
    • 2000-07-25
    • US13258
    • 1998-01-26
    • Hiroshi MabuchiToshihiro HayamiShigeki Honda
    • Hiroshi MabuchiToshihiro HayamiShigeki Honda
    • C23C16/511C23C16/00C23C14/00C23F1/02
    • H01J37/32467C23C16/511H01J37/32192H01J37/32477H01J37/32522
    • The plasma processing apparatus and plasma processing method of the present invention are suitable for the application of plasma processing to etching, ashing, CVD, etc. in the manufacturing of large scale integrated circuits (LSIs) and liquid crystal display panels (LCDs), and useful for the manufacturing of LSIs and LCDs. The apparatus is characterized in that the reaction chamber has its side wall separated into an inner side wall which faces to the interior of the reaction chamber and an outer side wall which faces to the exterior of the reaction chamber, with the inner side wall being isolated electrically from other portions of the reaction chamber and not grounded electrically. This structure improves the repeatability of plasma processing. The apparatus is also characterized in that the inner side wall of reaction chamber is isolated thermally from other portions of the reaction chamber and equipped with temperature control means. This structure improves the temperature control performance for the inner side wall and also improves the maintainability of the apparatus.
    • 本发明的等离子体处理装置和等离子体处理方法适用于制造大规模集成电路(LSI)和液晶显示面板(LCD)时的等离子体处理对蚀刻,灰化,CVD等的应用, 对LSI和LCD的制造有用。 该装置的特征在于,反应室的侧壁分成面向反应室内部的内侧壁和面向反应室外部的外侧壁,内侧壁被隔离 与反应室的其它部分电连接,而不是电接地。 这种结构提高了等离子体处理的重复性。 该装置的特征还在于,反应室的内侧壁与反应室的其它部分热隔离并配备有温度控制装置。 该结构提高了内侧壁的温度控制性能,并且还提高了装置的可维护性。
    • 3. 发明申请
    • SEALING APPARATUS
    • 密封装置
    • US20100230903A1
    • 2010-09-16
    • US12680340
    • 2009-07-03
    • Shigeki Honda
    • Shigeki Honda
    • F16J15/53
    • F16J15/43
    • The objective of the present invention is to provide a sealing apparatus having a simple structure and good sliding lifetime, and suitable to transfer a motion from an outside into the closed space such as a clean room or a chamber or so. The present invention is a sealing apparatus comprising a shaft transferring the mechanical motion, a housing through which the shaft penetrates, a magnetic force generating means generating a magnetic force, a pair of inner protruded edge forming a sealing groove by projecting toward the shaft from the housing, a magnetism transferring member transferring the magnetic force generated from the magnetic force generating means by provided adjacent to the magnetic force generating means, a sealing member sliding against the outer face of the shaft, and a magnetic fluid held between the shaft and the magnetism transferring member due to the magnetic force generated by the magnetic force generating means; wherein a fluid holding projection portion projecting out towards the shaft and the sealing member is formed at an end portion near by the shaft of a first inner protruded edge among said pair of the inner protruded edge adjacent to the magnetic force generating means.
    • 本发明的目的是提供一种具有简单结构和良好滑动寿命的密封装置,并且适于将运动从外部传递到诸如洁净室或室之类的封闭空间中。 本发明是一种密封装置,其包括:传递机械运动的轴,轴穿过的壳体,产生磁力的磁力产生装置,通过从所述轴向从轴突出来形成密封槽的一对内部突出边缘 壳体,传递由磁力产生装置产生的磁力靠近磁力产生装置的磁传递部件,抵靠轴的外表面滑动的密封部件和保持在轴和磁体之间的磁性流体 由于由磁力产生装置产生的磁力,传递构件; 其特征在于,在与所述磁力产生装置相邻的所述一对所述内突出边缘中的靠近所述第一内突出部的轴的端部处形成朝向所述轴突出的流体保持突起部分和所述密封部件。
    • 4. 发明授权
    • Core-sheath composite conductive fiber
    • 芯鞘复合导电纤维
    • US06710242B1
    • 2004-03-23
    • US10070885
    • 2002-07-22
    • Toshihiro IguroMasayuki MiyamotoShigeki HondaKeiji NakanishiHidenobu Tsutsumi
    • Toshihiro IguroMasayuki MiyamotoShigeki HondaKeiji NakanishiHidenobu Tsutsumi
    • H01B734
    • D01F8/00D01F1/09D01F8/12D01F8/14Y10T428/2927Y10T428/2929
    • A sheath-core composite conductive fiber having a sheath component made of a fiber-forming polymer containing conductive carbon black, is characterized in that, with respect to an inscribed circle of a core component and an inscribed circle of a sheath component in a cross section of the fiber, a radius (R) of the inscribed circle of the sheath component and a distance (r) between the centers of two inscribed circles satisfy a specific relationship, and a sheath-core composite conductive fiber having: a core component made of a polyester containing ethylene terephthalate as a main component, and a sheath component made of a mixture of a copolyester wherein ethylene terephthalate accounts for 10 to 90 mol % of constituent units thereof and carbon black. The conductive fiber can be used alone or in combination with other fibers in various applications, e.g., special working clothes such as dust-free clothes and interiors such as carpets.
    • 具有由含有导电性炭黑的纤维形成性聚合物构成的护套成分的皮芯型复合导电性纤维的特征在于,对于芯部件的内切圆和外皮部件的内切圆截面 的外皮组分的内切圆的半径(R)和两个内接圆的中心之间的距离(r)满足特定关系,并且具有:芯 - 芯复合导电纤维,其具有:芯组分由 含有对苯二甲酸乙二醇酯作为主要成分的聚酯和由共聚酯,其中对苯二甲酸乙二醇酯占其组成单元和碳黑的共混聚酯的混合物组成的皮组分。 导电纤维可以单独使用或与各种应用中的其它纤维组合使用,例如特殊工作服,例如无尘衣物和诸如地毯的内部。
    • 6. 发明申请
    • MAGNETIC FLUID SEAL DEVICE
    • 磁流体密封装置
    • US20090179385A1
    • 2009-07-16
    • US12295515
    • 2007-03-20
    • Mitsuaki KominoShigeki Honda
    • Mitsuaki KominoShigeki Honda
    • F16J15/43
    • F16J15/43
    • The present invention provides a magnetic fluid seal device which enables to avoid the increase of the torque due to the aggregation of the solute of the magnetic fluid or the condition in which it is unable to start. According to the magnetic fluid seal device of the present invention, the hearer 151 is buried in the area where the magnetic fluid seal portion 140 is position inside the shaft 110. The torque meter 171 detects the rotation torque and the starting torque of the shaft 110, and when it is larger than the standard value, the magnetic fluid seal portion 140 is heated via the heater 151 inside the shaft 110. Thereby, the temperature of the magnetic fluid 146 and 147 rises, the solute of the magnetic fluid 146 and 147 is dispersed which lowers the viscosity thereof, and the rotation torque and the starting torque of the shaft 110 is lowered.
    • 本发明提供一种磁流体密封装置,其能够避免由于磁性流体的溶质的聚集引起的扭矩的增加或其不能启动的状态。 根据本发明的磁性流体密封装置,听筒151被埋在磁性流体密封部分140位于轴110内部的区域中。扭矩计171检测轴110的旋转扭矩和起动扭矩 ,并且当其大于标准值时,磁性流体密封部分140经由轴110内部的加热器151被加热。由此,磁性流体146和147的温度升高,磁性流体146和147的溶质 分散,降低其粘度,并且轴110的旋转扭矩和起动扭矩降低。
    • 9. 发明申请
    • MAGNETIC FLUID SEAL DEVICE
    • 磁流体密封装置
    • US20130193647A1
    • 2013-08-01
    • US13820438
    • 2011-11-04
    • Shigeki Honda
    • Shigeki Honda
    • F16J15/43
    • F16J15/43F16C33/765F16J15/3232
    • A cartridge-type magnetic fluid seal device has a flanged sleeve fixed to an external peripheral surface of the radially inside member of two members and which rotates together with the inside member is provided facing a pair of magnetic pole members. A packing is disposed in an annular space formed by the radial inside of a magnetic source and the pair of magnetic pole members. The packing is provided in the annular space so as to slide on an external peripheral surface of the flanged sleeve, and a magnetic fluid seal part, the packing, and the flanged sleeve form a unit.
    • 盒式磁性流体密封装置具有固定到两个构件的径向内侧构件的外周面的凸缘套筒,并且与内部构件一起旋转设置成面对一对磁极构件。 密封件设置在由磁源的径向内侧和一对磁极构件形成的环形空间中。 填料设置在环形空间中,以在凸缘套筒的外周表面上滑动,并且磁性流体密封部分,填料和凸缘套筒形成一个单元。