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    • 5. 发明授权
    • Semiconductor device and its manufacturing method
    • 半导体器件及其制造方法
    • US08629529B2
    • 2014-01-14
    • US12519706
    • 2007-12-25
    • Naoya InoueIppei KumeJun KawaharaYoshihiro Hayashi
    • Naoya InoueIppei KumeJun KawaharaYoshihiro Hayashi
    • H01L27/06
    • H01L23/5228H01L23/5223H01L23/53238H01L27/0688H01L2924/0002H01L2924/3011H01L2924/00
    • A semiconductor device is produced by fabricating a capacitor element including a lower electrode, a capacitor insulating film, and an upper electrode, and a thin-film resistor element, in the same step. As the lower electrode of the capacitor element is lined with a lower layer wiring layer (Cu wiring), the lower electrode has extremely low resistance substantially. As such, even if the film thickness of the lower electrode becomes thinner, parasitic resistance does not increased. The resistor element is formed to have the same film thickness as that of the lower electrode of the capacitor element. Since the film thickness of the lower electrode is thin, it works as a resistor having high resistance. In the top layer of the passive element, a passive element cap insulating film is provided, which works as an etching stop layer when etching a contact of the upper electrode of the capacitor element.
    • 通过在同一步骤中制造包括下电极,电容器绝缘膜和上电极的电容器元件和薄膜电阻器元件来制造半导体器件。 由于电容器元件的下电极衬有下层布线层(Cu布线),所以下电极具有极低的电阻。 因此,即使下电极的膜厚变薄,寄生电阻也不会增加。 电阻元件形成为具有与电容器元件的下电极相同的膜厚度。 由于下部电极的膜厚薄,所以作为具有高电阻的电阻器。 在无源元件的顶层中,设置无源元件帽绝缘膜,当蚀刻电容器元件的上电极的接触时,其被用作蚀刻停止层。
    • 9. 发明申请
    • VOLTAGE LEVEL GENERATOR CIRCUIT
    • 电压电平发生器电路
    • US20120249227A1
    • 2012-10-04
    • US13350795
    • 2012-01-15
    • Ryo NAKAYAMAMasaki YoshinagaYoshitaka AbeKenji HirayamaYoshihiro Hayashi
    • Ryo NAKAYAMAMasaki YoshinagaYoshitaka AbeKenji HirayamaYoshihiro Hayashi
    • G05F3/02
    • G05F3/20
    • A voltage level generator circuit comprised of a fixed voltage generator unit for generating a first electrical current in a fixed quantity from a first supply voltage; a first current mirror circuit unit including a first thin-film NMOSFET and a second thin-film NMOSFET and that outputs a second electrical current proportional to the first electrical current; a protective circuit including: a third thin-film NMOSFET and a first thick-film PMOSFET utilized as a grounded gate for protecting the second thin-film NMOSFET, a first diode for preventing inverse current flow to the first supply, and a second diode for preventing the gate-source voltage of the third thin-film NMOSFET from reaching a negative electrical potential; and a second current mirror circuit for outputting a third electrical current proportional to the second electrical current; and a first Zener diode unit for generating a first fixed voltage from a third electrical current.
    • 一种电压电平发生器电路,包括:固定电压发生器单元,用于从第一电源电压产生固定量的第一电流; 第一电流镜电路单元,包括第一薄膜NMOSFET和第二薄膜NMOSFET,并且输出与第一电流成比例的第二电流; 保护电路,包括:第三薄膜NMOSFET和用作保护第二薄膜NMOSFET的接地栅极的第一厚膜PMOSFET,用于防止反向电流流向第一电源的第一二极管和用于 防止第三薄膜NMOSFET的栅极 - 源极电压达到负电位; 以及第二电流镜电路,用于输出与第二电流成比例的第三电流; 以及用于从第三电流产生第一固定电压的第一齐纳二极管单元。