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    • 5. 发明授权
    • Method for producing silicon oxide film
    • 氧化硅膜的制造方法
    • US07488693B2
    • 2009-02-10
    • US10589077
    • 2005-02-17
    • Hiroaki TakeuchiSatoshi HattoriHiroshi SuzukiKatsuyoshi Harada
    • Hiroaki TakeuchiSatoshi HattoriHiroshi SuzukiKatsuyoshi Harada
    • H01L21/26
    • C23C16/401H01L21/31604
    • [Problems] It is to provide a method for producing a silicon oxide film having better quality than a TEOS at low temperature. And it is to provide a method for manufacturing a semiconductor device wherein an insulating film composed of a silicon oxide is formed.[Means for solving problems] A film composed of a silicon oxide is produced by CVD method where a silane compound represented by the following general formula is reacted. An insulating film is deposited by CVD method where a silane compound represented by the following general formula is reacted. HnSi2(OR)6−n (In the above formula, R is an alkyl group of carbon number from 1 to 5, and n is an integer from 0 to 2.)
    • [问题]提供一种在低温下具有比TEOS更好质量的氧化硅膜的方法。 并且提供一种制造其中形成由氧化硅构成的绝缘膜的半导体器件的方法。 解决问题的手段通过CVD法制造由氧化硅构成的膜,其中由以下通式表示的硅烷化合物反应。 通过CVD法沉积绝缘膜,其中由以下通式表示的硅烷化合物反应。 <?in-line-formula description =“In-line Formulas”end =“lead”?> HnSi2(OR)6-n <?in-line-formula description =“In-line Formulas”end =“tail”? >(在上式中,R为碳原子数1〜5的烷基,n为0〜2的整数)
    • 10. 发明授权
    • Toy vehicle with shock absorbing steering mechanism
    • 具有减震转向机构的玩具车
    • US06796874B2
    • 2004-09-28
    • US09842142
    • 2001-04-26
    • Katsuyoshi Harada
    • Katsuyoshi Harada
    • A63H1736
    • A63H17/36
    • A remote control running toy comprises a pair of uprights (24), each having a kingpin (22) for steerably supporting the wheels (20); and a steering mechanism (32) which is coupled through steering rods (30) with the uprights (24); wherein the running toy comprises a coil-shaped spring member (40) for absorbing a shock transmitted via the uprights (22) to the steering rods (28). Thereby, the remote control running toy is provided, which is able to prevent the steering rods from being damaged, even if a strong shock acts onto the front wheels, thus improving the reliability of the running toy.
    • 遥控器运行玩具包括一对立柱(24),每个立柱具有用于可转向地支撑车轮(20)的中心销(22); 以及通过转向杆(30)与立柱(24)联接的转向机构(32); 其中跑步玩具包括用于吸收通过立柱(22)传递到转向杆(28)的冲击的螺旋形弹簧构件(40)。 由此,即使在前轮上产生强烈的冲击,也能够防止转向杆受到损伤,从而提高跑步玩具的可靠性。