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    • 7. 发明授权
    • Manufacturing method for solar cell
    • 太阳能电池制造方法
    • US08460965B2
    • 2013-06-11
    • US13124529
    • 2009-10-15
    • Hirohisa TakahashiSatoru IshibashiKyuzo Nakamura
    • Hirohisa TakahashiSatoru IshibashiKyuzo Nakamura
    • H01L21/00
    • H01L31/02366H01L31/022466H01L31/1884Y02E10/50
    • A manufacturing method for a solar cell including an upper electrode extracting an electrode at an incident light side, the upper electrode including a transparent conductive film, a basic structural element of the transparent conductive film being any one of an indium (In), a zinc (Zn), and tin (Sn), the manufacturing method including: a step A forming a texture on a front surface of a transparent substrate using a wet etching method, the transparent conductive film being formed on the transparent substrate, wherein in the step A, when the texture is formed, a metal thin film is formed on the transparent substrate, and an anisotropic etching is performed with the metal thin film being a mask.
    • 一种太阳能电池的制造方法,其特征在于,包括在入射光侧提取电极的上部电极,所述上部电极包括透明导电膜,所述透明导电膜的基本结构元素为铟(In),锌 (Zn)和锡(Sn),所述制造方法包括:步骤A,其使用湿式蚀刻方法在透明基板的正面上形成纹理,所述透明导电膜形成在所述透明基板上,其中,在所述工序 如图A所示,当形成纹理时,在透明基板上形成金属薄膜,以金属薄膜为掩模进行各向异性蚀刻。