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1. 发明授权

US06530276B2 Acceleration sensor and acceleration apparatus using acceleration sensor 失效
公开(公告)号：US06530276B2
公开(公告)日：2003-03-11
申请号：US10081635
申请日：2002-02-22
申请人： Hirofumi Tajika , Kazunari Nishihara , Koji Nomura , Motoyuki Taji , Yoshihiro Tomita
发明人： Hirofumi Tajika , Kazunari Nishihara , Koji Nomura , Motoyuki Taji , Yoshihiro Tomita
IPC分类号： G01P1509
CPC分类号： G01P1/023 , G01P1/02 , G01P15/0922
摘要： An acceleration sensor having a well controlled dispersion in the detection characteristics and improved detection characteristics in the low frequency detection comprises a first piezoelectric plate (11), a second piezoelectric plate (12) bonded to the first piezoelectric plate (11) by direct bonding, a first external electrode (13) provided on the main surface of the first piezoelectric plate (11) and a second external electrode (14) provided on the main surface of the second piezoelectric plate (12). The first piezoelectric plate (11) and the second piezoelectric plate (12) are bonded together with their polarization axes reversed to each other. Appearance of the acceleration sensor resembles to a letter “L” in the cross section; thickness of the supporting section (15) is greater than that of the rest part (free vibration section).

2. 发明授权

US06382026B1 Acceleration sensor and acceleration apparatus using acceleration sensor 有权
标题翻译：加速度传感器和使用加速度传感器的加速装置
公开(公告)号：US06382026B1
公开(公告)日：2002-05-07
申请号：US09463140
申请日：2000-04-12
申请人： Hirofumi Tajika , Kazunari Nishihara , Koji Nomura , Motoyuki Taji , Yoshihiro Tomita
发明人： Hirofumi Tajika , Kazunari Nishihara , Koji Nomura , Motoyuki Taji , Yoshihiro Tomita
IPC分类号： G01P1509
CPC分类号： G01P1/023 , G01P1/02 , G01P15/0922
摘要： An acceleration sensor having a well controlled dispersion in the detection, characteristics and improved detection characteristics in the low frequency detection comprises a first piezoelectric plate (11), a second piezoelectric plate (12) bonded to the first piezoelectric plate (11) by direct bonding, a first external electrode (13) provided on the main surface of the first piezoelectric plate (11) and a second external electrode (14) provided on the main surface of the second piezoelectric plate (12). The first piezoelectric plate (11) and the second piezoelectric plate (12) are bonded together with their polarization axes reversed to each other. Appearance of the acceleration sensor resembles to a letter “L” in the cross section; thickness of the supporting section (15) is greater than that of the rest part (free vibration section).
摘要翻译：具有在低频检测中的检测，特性和改进的检测特性中良好控制的色散的加速度传感器包括：第一压电板（11），通过直接接合结合到第一压电板（11）的第二压电板（12），设置在第一压电板（11）的主表面上的第一外部电极（13）和设置在第二压电板（12）的主表面上的第二外部电极（14）。第一压电板（11）和第二压电板（12）以它们的偏振轴彼此相反地接合在一起。加速度传感器的外观类似于截面中的字母“L”; 支撑部分（15）的厚度大于其余部分（自由振动部分）的厚度。

3. 发明申请

US20060048575A1 Drop shock measurement system and acceleration sensor element used in the same 审中-公开
公开(公告)号：US20060048575A1
公开(公告)日：2006-03-09
申请号：US11268193
申请日：2005-11-07
申请人： Kazunari Nishihara , Hirofumi Tajika , Koji Nomura , Motoyuki Toji
发明人： Kazunari Nishihara , Hirofumi Tajika , Koji Nomura , Motoyuki Toji
IPC分类号： G01P15/097
CPC分类号： G01P15/0891 , G01N2291/02827 , G01P15/0922 , G01P15/097
摘要： The drop impact measuring system has i) a plurality of bimorph-type acceleration sensor containing a plurality of free vibrating sections each of which has individual draw-out electrodes; ii) a switch section for selecting output from the bimorph-type acceleration sensors; iii) an amplifying circuit for amplifying a signal applied via the switch section from the acceleration sensors; and iv) a logic circuit for logically evaluating the output from the amplifying circuit and controlling the switch section according to the result acquired from the logical evaluation.

4. 发明授权

US07493818B2 Drop shock measurement system and acceleration sensor element used in the same 失效
标题翻译：跌落震动测量系统和加速度传感器元件相同
公开(公告)号：US07493818B2
公开(公告)日：2009-02-24
申请号：US10769263
申请日：2004-01-30
申请人： Kazunari Nishihara , Hirofumi Tajika , Koji Nomura , Motoyuki Toji
发明人： Kazunari Nishihara , Hirofumi Tajika , Koji Nomura , Motoyuki Toji
IPC分类号： G01D21/00
CPC分类号： G01P15/0891 , G01N2291/02827 , G01P15/0922 , G01P15/097
摘要： The drop impact measuring system has i) a plurality of bimorph-type acceleration sensor containing a plurality of free vibrating sections each of which has individual draw-out electrodes; ii) a switch section for selecting output from the bimorph-type acceleration sensors; iii) an amplifying circuit for amplifying a signal applied via the switch section from the acceleration sensors; and iv) a logic circuit for logically evaluating the output from the amplifying circuit and controlling the switch section according to the result acquired from the logical evaluation.
摘要翻译：跌落冲击测量系统具有i）多个双压电晶片式加速度传感器，其包含多个自由振动部分，每个自由振动部分具有各自的引出电极; ii）用于选择双压电晶片式加速度传感器的输出的开关部分; iii）放大电路，用于放大从加速度传感器经由开关部分施加的信号; 以及iv）用于逻辑地评估来自放大电路的输出并根据从逻辑评估获得的结果来控制开关部分的逻辑电路。

5. 发明授权

US07275412B2 Drop shock measurement system and acceleration sensor element used in the same 失效
标题翻译：跌落震动测量系统和加速度传感器元件相同
公开(公告)号：US07275412B2
公开(公告)日：2007-10-02
申请号：US11170333
申请日：2005-06-29
申请人： Kazunari Nishihara , Hirofumi Tajika , Koji Nomura , Motoyuki Toji
发明人： Kazunari Nishihara , Hirofumi Tajika , Koji Nomura , Motoyuki Toji
IPC分类号： G01N19/00
CPC分类号： G01P15/0891 , G01N2291/02827 , G01P15/0922 , G01P15/097
摘要： The drop impact measuring system has i) a plurality of bimorph-type acceleration sensor containing a plurality of free vibrating sections each of which has individual draw-out electrodes; ii) a switch section for selecting output from the bimorph-type acceleration sensors; iii) an amplifying circuit for amplifying a signal applied via the switch section from the acceleration sensors; and iv) a logic circuit for logically evaluating the output from the amplifying circuit and controlling the switch section according to the result acquired from the logical evaluation.
摘要翻译：跌落冲击测量系统具有i）多个双压电晶片式加速度传感器，其包含多个自由振动部分，每个自由振动部分具有各自的引出电极; ii）用于选择双压电晶片式加速度传感器的输出的开关部分; iii）放大电路，用于放大从加速度传感器经由开关部分施加的信号; 以及iv）用于逻辑地评估来自放大电路的输出并根据从逻辑评估获得的结果来控制开关部分的逻辑电路。

6. 发明申请

US20050284240A1 Drop shock measurement system and acceleration sensor element used in the same 失效
标题翻译：跌落震动测量系统和加速度传感器元件相同
公开(公告)号：US20050284240A1
公开(公告)日：2005-12-29
申请号：US11170333
申请日：2005-06-29
申请人： Kazunari Nishihara , Hirofumi Tajika , Koji Nomura , Motoyuki Toji
发明人： Kazunari Nishihara , Hirofumi Tajika , Koji Nomura , Motoyuki Toji
IPC分类号： G01N21/00 , G01P15/08 , G01P15/09 , G01P15/097
CPC分类号： G01P15/0891 , G01N2291/02827 , G01P15/0922 , G01P15/097
摘要： The drop impact measuring system has i) a plurality of bimorph-type acceleration sensor containing a plurality of free vibrating sections each of which has individual draw-out electrodes; ii) a switch section for selecting output from the bimorph-type acceleration sensors; iii) an amplifying circuit for amplifying a signal applied via the switch section from the acceleration sensors; and iv) a logic circuit for logically evaluating the output from the amplifying circuit and controlling the switch section according to the result acquired from the logical evaluation.
摘要翻译：跌落冲击测量系统具有i）多个双压电晶片式加速度传感器，其包含多个自由振动部分，每个自由振动部分具有各自的引出电极; ii）用于选择双压电晶片式加速度传感器的输出的开关部分; iii）放大电路，用于放大从加速度传感器经由开关部分施加的信号; 以及iv）用于逻辑地评估来自放大电路的输出并根据从逻辑评估获得的结果来控制开关部分的逻辑电路。

7. 发明授权

US07002284B2 Thin-film micromechanical resonator, thin-film micromechanical resonator gyro, and navigation system and automobile using the resonator gyro 有权
标题翻译：薄膜微机械谐振器，薄膜微机械谐振陀螺，以及使用谐振陀螺的导航系统和汽车
公开(公告)号：US07002284B2
公开(公告)日：2006-02-21
申请号：US10470669
申请日：2002-11-26
申请人： Satoshi Ouchi , Toshiyuki Nozoe , Koji Nomura , Hirofumi Tajika
发明人： Satoshi Ouchi , Toshiyuki Nozoe , Koji Nomura , Hirofumi Tajika
IPC分类号： H03H9/21
CPC分类号： G01C19/5607 , H03H9/21 , H03H9/2484 , H03H2003/0492
摘要： A thin film micromechanical resonator (resonator) having improved drive efficiency, a resonator gyro having improved sensitivity in detecting an angular velocity, and a navigation system and an automobile using the resonator gyro. The resonator includes a tuning fork structure made of a non-piezoelectric material, and a first electrode and a second electrode disposed respectively at the inner side and the outer side of the tuning fork arm. On the first and second electrodes, a first piezo film and a second piezo film are provided respectively, and a third electrode and a fourth are respectively provided electrode thereon. When an alternating voltage is applied to the third and fourth electrodes at the opposite phases each other, the tuning fork resonates in the direction perpendicular to the center line. The resonator gyro detects, at the sensing section which is formed of another electrodes and another piezo film, the Coriolis force generated in proportion to angular velocity given to the resonator.
摘要翻译：具有改进的驱动效率的薄膜微机械谐振器（谐振器），在检测角速度方面具有改进的灵敏度的谐振器陀螺仪以及使用谐振器陀螺仪的导航系统和汽车。谐振器包括由非压电材料制成的音叉结构，以及分别设置在音叉臂的内侧和外侧的第一电极和第二电极。在第一和第二电极上分别设置第一压电膜和第二压电膜，第三电极和第四电极分别设置有电极。当交替电压以相反的相位施加到第三和第四电极时，音叉在垂直于中心线的方向上共振。谐振器陀螺仪在由另一个电极和另一个压电膜形成的感测部分检测到与给予谐振器的角速度成比例地产生的科里奥利力。

8. 发明授权

US06550116B2 Method for manufacturing a bimorph piezoelectric device for acceleration sensor 失效
标题翻译：用于加速度传感器的双压电晶片压电装置的制造方法
公开(公告)号：US06550116B2
公开(公告)日：2003-04-22
申请号：US09768349
申请日：2001-01-25
申请人： Kazunari Nishihara , Kiyotomo Kubota , Hirohumi Tajika , Koji Nomura , Tetsuro Shimamura , Yukinori Sasaki , Masako Yamaguchi
发明人： Kazunari Nishihara , Kiyotomo Kubota , Hirohumi Tajika , Koji Nomura , Tetsuro Shimamura , Yukinori Sasaki , Masako Yamaguchi
IPC分类号： H04R1700
CPC分类号： G01P15/0922 , B06B1/0603 , G01P15/0802 , H01L41/1132 , Y10T29/42 , Y10T29/49155 , Y10T29/49156 , Y10T29/49789 , Y10T29/49798
摘要： A method for manufacturing a bimorph type piezoelectric element including a first step of providing a first piezoelectric single-crystal plate having a first surface and a second surface; a second step of providing a second piezoelectric single-crystal plate having a third surface and a fourth surface; a third step of directly bonding the third surface of the second piezoelectric single-crystal plate to the first surface of the first piezoelectric single-crystal plate without using any adhesives; a fourth step of forming a freely vibrating part by grinding away the second surface of the first piezoelectric single-crystal plate to a first depth and with a first spacing; and a fifth step of producing an element having a supporting member and the freely vibrating part by cutting the first piezoelectric single-crystal plate and second piezoelectric single-crystal plate with the freely vibrating part included, which have been prepared in the fourth step, with a predetermined spacing and at least in one of the directions of rows and columns.
摘要翻译：一种双压电晶片型压电元件的制造方法，包括：第一工序，设置具有第一表面和第二表面的第一压电单晶板; 提供具有第三表面和第四表面的第二压电单晶板的第二步骤; 在不使用任何粘合剂的情况下将第二压电单晶板的第三表面直接接合到第一压电单晶板的第一表面的第三步骤; 第四步骤，通过将第一压电单晶板的第二表面研磨成第一深度并以第一间隔形成自由振动部分; 以及第五步骤，通过在第四步骤中制备的具有包括自由振动部分的第一压电单晶板和第二压电单晶板来制造具有支撑部件和自由振动部件的元件，预定的间距和至少在行和列的方向中的一个方向上。

9. 发明授权

US06246155B1 Bimorph piezoelectric device for acceleration sensor and method of its manufacture 有权
标题翻译：用于加速度传感器的双压电晶片及其制造方法
公开(公告)号：US06246155B1
公开(公告)日：2001-06-12
申请号：US09147789
申请日：1999-03-09
申请人： Kazunari Nishihara , Kiyotomo Kubota , Hirohumi Tajika , Koji Nomura , Tetsuro Shimamura , Yukinori Sasaki , Masako Yamaguchi
发明人： Kazunari Nishihara , Kiyotomo Kubota , Hirohumi Tajika , Koji Nomura , Tetsuro Shimamura , Yukinori Sasaki , Masako Yamaguchi
IPC分类号： H01L4108
CPC分类号： H01L41/1132 , B06B1/0603 , G01P15/0802 , G01P15/0922
摘要： The present invention relates to a bimorph type piezoelectric acceleration sensor used in detecting vibrations of a variety of equipment such as a hard disk, CD-ROM and the like and has the objective of providing a bimorph type piezoelectric element for acceleration sensor of a small size, high sensitivity, a narrow range of sensitivity variation and a low cost by forming a freely vibrating part and a supporting means at the same time in single-piece construction through a grinding away process applied to lithium niobate. One section of a structure formed of two of a lithium niobate single-crystal plate directly bonded together with the polarization directions thereof reversed each other is applied with a grinding away process to produce a freely vibrating part (32a) and the remaining section, where no grinding away process has been applied, serves as a supporting member (33a), thus both being formed simultaneously and made integral with each other, and electrodes (31a, 31b) are formed by electroless plating.
摘要翻译：本发明涉及用于检测诸如硬盘，CD-ROM等各种设备的振动的双压电晶片型压电加速度传感器，其目的是提供一种小型加速度传感器的双压电晶片式压电元件灵敏度高，灵敏度变化范围窄，成本低，通过在铌酸锂中的磨削工艺，通过自由振动部件和支撑装置同时进行单件式构造。将由两个直接接合在一起的极性方向的铌酸锂单晶板形成的结构的一个部分用磨削过程施加以产生自由振动部分（32a），其余部分已经施加了磨削过程，用作支撑构件（33a），因此两者同时形成并且彼此一体形成，并且通过无电镀形成电极（31a，31b）。

10. 发明授权

US08077900B2 Microphone and method for fabricating the same 有权
标题翻译：麦克风及其制造方法
公开(公告)号：US08077900B2
公开(公告)日：2011-12-13
申请号：US12396010
申请日：2009-03-02
申请人： Masanori Minamio , Yoshihiro Tomita , Koji Nomura
发明人： Masanori Minamio , Yoshihiro Tomita , Koji Nomura
IPC分类号： H04R11/04
CPC分类号： H04R31/00 , Y10T29/49005
摘要： A microphone includes: a substrate including a tone hole and having a top surface on which a substrate electrode is provided; a converter provided on the top surface of the substrate and including a main body having a back space, a diaphragm provided at the bottom of the back space of the main body, and a converter electrode provided on a region of a bottom surface of the main body facing the substrate electrode; and a bump connecting the substrate electrode and the converter electrode to each other. The diaphragm vibrates in response to sound entering from the tone hole. The converter converts sound into a signal.
摘要翻译：麦克风包括：包括音孔并具有其上设置有基板电极的顶表面的基板; 设置在所述基板的上表面上的转换器，具有设置在所述主体的后部空间的底部的隔膜，设置在所述主体的后部空间的底部的隔膜以及设置在所述主体的底面的区域的转换电极身体面向衬底电极; 以及将基板电极和转换器电极彼此连接的凸块。响应于从音孔进入的声音，隔膜振动。转换器将声音转换为信号。

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