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    • 4. 发明授权
    • Capacitance type sensitive element and a manufacturing method thereof
    • 电容式敏感元件及其制造方法
    • US4893214A
    • 1990-01-09
    • US242201
    • 1988-09-09
    • Satoru NishiwakiYukinobu TakahashiKouji MurakamiNorisuke Fukuda
    • Satoru NishiwakiYukinobu TakahashiKouji MurakamiNorisuke Fukuda
    • G01N27/12G01N27/22H01G7/00
    • G01N27/225Y10T29/435
    • A capacitance type sensitive element comprises a pair of electrode pairs formed on an insulating substrate and having opposite electrode faces perpendicular or slantingly formed with respect to a face of the insulating substrate; and a sensing material disposed between the opposite electrode faces of the electrodes and having electrical characteristics changed on the basis of the physical or chemical interaction between the sensing material and a substance to be detected.A method for manufacturing a capacitance type sensitive element comprises the steps of forming a groove on an insulating substrate; forming a metallic thin film having a predetermined thickness on the insulating substrate having the groove; performing the etching of a predetermined pattern in a portion including a bottom face portion of the groove in the metallic thin film, and forming a pair of electrodes; coating the entire surface of the pair of electrodes and the insulating substrate with a humidity sensitive material, and thereafter hardening the coated humidity sensitive material; and patterning the hardened humidity sensitive material.A method for manufacturing a capacitance type sensitive element may comprise the steps of forming a metallic thin film having a predetermined thickness on an insulating substrate; patterning the metallic thin film and forming a pair of electrodes at a predetermined distance; coating the entire surface of the insulating substrate including a pair of electrodes with a humidity sensitive material, and thereafter hardening the coated humidity sensitive material; and patterning the hardened humidity sensitive material.
    • 电容型敏感元件包括一对电极对,其形成在绝缘基板上并具有相对于绝缘基板的表面垂直或倾斜地形成的相对电极面; 以及设置在电极的相对电极面之间并且基于感测材料和待检测物质之间的物理或化学相互作用而改变的电特性的感测材料。 电容型敏感元件的制造方法包括在绝缘基板上形成槽的工序; 在具有凹槽的绝缘基板上形成具有预定厚度的金属薄膜; 在包括金属薄膜中的槽的底面部分的部分中进行预定图案的蚀刻,并形成一对电极; 用湿敏材料涂覆一对电极和绝缘基板的整个表面,然后硬化涂覆的湿度敏感材料; 并图案化固化的湿度敏感材料。 电容型敏感元件的制造方法可以包括以下步骤:在绝缘基板上形成具有预定厚度的金属薄膜; 图案化金属薄膜并形成预定距离的一对电极; 涂覆包括一对具有湿敏材料的电极的绝缘基片的整个表面,然后硬化涂覆的湿度敏感材料; 并图案化固化的湿度敏感材料。