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    • 3. 发明授权
    • Method and apparatus for measuring trigger and latchback voltage of a
semiconductor device
    • 用于测量半导体器件的触发和闭锁电压的方法和装置
    • US5057780A
    • 1991-10-15
    • US659532
    • 1991-02-22
    • Hideo AkamaNorio Sone
    • Hideo AkamaNorio Sone
    • G01R31/26
    • G01R31/2607
    • Disclosed is a measurement method and apparatus by which measurement of the breakdown voltage of a semiconductor device under test (DUT) may be conducted with an inexpensive measuring system in which thermal stress applied to the DUT is small and thus measurement error caused by characteristic change of the DUT is less. A constant current smaller than the breakdown current of the DUT is applied to a DUT using a constant current source, and waveforms between terminals of said DUT are observed by a waveform observation device, thereby measuring the trigger voltage and the latchback voltage. When a constant current I is applied to the DUT from the constant current source, a stray capacitance C between terminals of said DUT is charged. Thus, the voltage between terminals of said DUT is increased with a constant inclination (I/C) as time goes by.
    • 本发明公开了一种测量方法和装置,通过该方法和装置,可以用一种廉价的测量系统来测试待测半导体器件(DUT)的击穿电压,其中施加于DUT的热应力小,因此由特性变化引起的测量误差 DUT较少。 使用恒定电流源将DUT小于DUT的击穿电流的恒定电流施加到DUT,并且通过波形观察装置观察所述DUT的端子之间的波形,从而测量触发电压和闩锁电压。 当从恒流源向DUT施加恒定电流I时,对所述DUT的端子之间的寄生电容C进行充电。 因此,随着时间的流逝,所述DUT的端子之间的电压以恒定的倾斜度(I / C)增加。
    • 6. 发明授权
    • Switching apparatus with current limiting circuit
    • 具有限流电路的开关装置
    • US5880540A
    • 1999-03-09
    • US704182
    • 1996-08-28
    • Yoshiyuki BesshoYuko IwasakiNorio Sone
    • Yoshiyuki BesshoYuko IwasakiNorio Sone
    • G01R31/26G01R19/00G01R31/28
    • G01R31/2849Y10T307/865
    • A signal switching apparatus performs precise and high speed measurements that indicate DUT breakdown. Several switching circuits having multiple signal switching apparatus provided in parallel with input terminals and output terminals. Each switching circuit is structured to have; (a) A first switch circuit which inputs the guard signal together with the low current measurement signal; (b) a current limiting circuit connected to a stress signal terminal on the input; (c) a second switch circuit connected on the input to the output of the current limiting circuit, having a guard terminal connected to the output of the first switch circuit; (d) A guarded line, one end of which is connected to the output terminals, and the other end of which is connected to the first switch circuit and the output of second switch circuit.
    • 信号切换装置执行指示DUT击穿的精确和高速测量。 具有与输入端子和输出端子并联设置的多个信号切换装置的多个开关电路。 每个开关电路的结构是: (a)第一开关电路,其与低电流测量信号一起输入保护信号; (b)连接到输入端的应力信号端子的限流电路; (c)连接到所述限流电路的输出的输入端的第二开关电路,具有连接到所述第一开关电路的输出的保护端子; (d)保护线路,其一端连接到输出端子,另一端连接到第一开关电路和第二开关电路的输出端。