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    • 1. 发明授权
    • Processing unit and processing unit structure by assembling thereof
    • 处理单元和处理单元结构包括组装在一起的多个处理单元
    • US06287067B1
    • 2001-09-11
    • US08947543
    • 1997-10-11
    • Hidenori MiyamotoSusumu OkanoKoji UedaTaiichiro Aoki
    • Hidenori MiyamotoSusumu OkanoKoji UedaTaiichiro Aoki
    • B65H100
    • H01L21/67161B23P21/004H01L21/67178H01L21/67184H01L21/67742Y10S414/135Y10S414/136
    • A processing unit structure 1 a plurality of processing units 2, . . . , assembled together continuously in a horizontal direction, wherein a transfer portion 3 is provided on the top of each processing unit 2, . . . , for transferring the plate-like material to be processed between adjacent one of the processing units. A transfer device, such as a shuttle (SH) is provided in each of the transfer portions 3. Each processing unit 2 performs a series of processes on the plate-like material and is constructed with processing blocks 4 and 4 and a transfer portion 3 in the form of a transfer robot (R) positioned between the processing blocks 4 and 4. Further, each processing unit 2. . . is independent from one another so that it is possible to selectively add and remove different ones of the processing units with respect to the processing unit structure 1.
    • 处理单元结构1是多个处理单元2,...。 。 。 在水平方向上连续地组装在一起,其中传送部分3设置在每个处理单元2的顶部。 。 。 用于在相邻的一个处理单元之间传送待处理的板状材料。 在每个转印部分3中设置有诸如梭(SH)的转印装置。每个处理单元2对板状材料执行一系列处理,并且由处理块4和4以及转印部3 以位于处理块4和4之间的传送机器人(R)的形式。此外,每个处理单元2。 。 彼此独立,使得可以相对于处理单元结构1选择性地添加和去除处理单元中的不同处理单元。