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    • 2. 发明授权
    • Method of forming a titanium film and a barrier film on a surface of a substrate through lamination
    • 通过层压在基板的表面上形成钛膜和阻挡膜的方法
    • US06537621B1
    • 2003-03-25
    • US09473715
    • 1999-12-29
    • Yasuo KobayashiKunihiro TadaHideki Yoshikawa
    • Yasuo KobayashiKunihiro TadaHideki Yoshikawa
    • C23C1634
    • H01L21/76843C23C16/34H01L21/28562H01L21/28568H01L21/76855H01L21/76856H01L21/76879
    • A method for forming a titanium film and a titanium nitride film on a surface of a substrate by lamination, by which contamination of the substrate due to the by-product is suppressed and the contact resistance of the titanium film is reduced. The method comprises the steps of forming a titanium film on the surface of the substrate using a first process gas containing TiCl4 and a reducing gas, subjecting the substrate to a plasma process using a second process gas containing N2 gas and a reducing gas, thereby decreasing Cl in the titanium film and nitriding the surface of the titanium film to form a nitride layer, and forming a barrier metal (e.g., a titanium nitride film) on the titanium film having the nitride layer. Thus, the titanium film and the titanium nitride film are formed on the substrate by lamination. The second process gas contains N2 gas in a ratio of 0.5 or lower with respect to the reducing gas.
    • 通过层叠在基板的表面上形成钛膜和氮化钛膜的方法,由此抑制由副产物引起的基板的污染并降低钛膜的接触电阻。 该方法包括以下步骤:使用包含TiCl 4和还原气体的第一工艺气体在衬底的表面上形成钛膜,使用含有N 2气体和还原气体的第二工艺气体对衬底进行等离子体处理,从而减少 Cl并使钛膜的表面氮化以形成氮化物层,并在具有氮化物层的钛膜上形成阻挡金属(例如,氮化钛膜)。 因此,通过层压在基板上形成钛膜和氮化钛膜。 第二处理气体相对于还原气体含有0.5以下的N 2气体。
    • 3. 发明授权
    • CVD-Ti film forming method
    • CVD-Ti成膜方法
    • US06197674B1
    • 2001-03-06
    • US09112640
    • 1998-07-09
    • Hideki YoshikawaYasuo KobayashiKunihiro Tada
    • Hideki YoshikawaYasuo KobayashiKunihiro Tada
    • H01L2144
    • H01L21/76843C23C16/08H01L21/28568
    • A method of forming a CVD-Ti film includes the steps of loading a Si wafer into a chamber, setting an interior of the chamber at a predetermined reduced-pressure atmosphere, introducing TiCl4 gas, H2 gas, and Ar gas into the chamber, and generating a plasma of the introduced gas in the chamber to form a Ti film in a hole formed in an SiO2 film on the wafer. A wafer temperature is set to 400° to 800°, a supplied power is set to 100 W to 300 W, an internal chamber pressure is set to 0.5 Torr to 3.0 Torr, a flow rate ratio of TiCl4 gas to a sum of H2 gas and Ar gas is 1:100 to 1:300, and a flow rate ratio of H2 gas to Ar gas is 1:1 to 2:1.
    • 形成CVD-Ti膜的方法包括以下步骤:将Si晶片装载到腔室中,将腔室的内部设置在预定的减压气氛下,将TiCl 4气体,H 2气体和Ar气体引入室中;以及 在室中产生引入气体的等离子体,以在晶片上的SiO 2膜形成的孔中形成Ti膜。 将晶片温度设定为400°〜800°,供给功率设定为100W〜300W,内部室压设定为0.5Torr〜3.0Torr,TiCl4气体与H2气体的流量比 Ar气体为1:100〜1:300,H2气体与Ar气体的流量比为1:1〜2:1。
    • 6. 发明申请
    • IMAGE DIAGNOSTIC DEVICE AND IMAGE ASSESSMENT METHOD
    • 图像诊断装置和图像评估方法
    • US20140219539A1
    • 2014-08-07
    • US14342087
    • 2012-06-26
    • Hideki Yoshikawa
    • Hideki Yoshikawa
    • G06T7/00
    • G06T7/0012A61B5/055A61B5/489A61B6/481A61B6/504A61B8/06A61B8/481G01R33/5601G01R33/5635G06K2009/00932G06K2209/05G06T7/0016G06T2207/10016G06T2207/10081G06T2207/10088G06T2207/10132G06T2207/30104
    • Provided is an image diagnostic device with which the start and end of the in-flow of a contrast medium are automatically assessed. An image diagnostic device assesses the start and end times of the in-flow of a contrast medium into organs in a lifeform which is a subject. The image diagnostic device comprises: an input unit (11) which receives an input of a signal from a contrast medium which is acquired from such as an image acquisition unit (22); a luminosity evaluation unit (13) which creates a luminosity curve that denotes a change over time in signal strength; a function evaluation unit (14) which approximates the luminosity curve with an S-shaped function and creates a model function; an assessment unit (12), further comprising a circulation evaluation unit (15) which uses a tangent line at an inflection point of the model function and assesses the start and end of the in-flow of the contrast medium; and a display unit (19) which displays the result which is evaluated with the assessment unit (12). The present invention allows automatically assessing the start and end times of the in-flow of the contrast medium.
    • 提供了一种图像诊断装置,其中自动评估造影剂的流入的开始和结束。 图像诊断装置评估作为受试者的生命方式中造影剂进入器官的流入的开始和结束时间。 图像诊断装置包括:输入单元(11),其从诸如图像获取单元(22)等获取的造影剂接收信号的输入; 光度评估单元(13),其产生指示信号强度随时间变化的亮度曲线; 函数评估单元(14),其用S形函数近似亮度曲线并产生模型函数; 评估单元(12),还包括循环评估单元(15),其在所述模型函数的拐点处使用切线,并且评估所述造影剂的流入的开始和结束; 以及显示单元(19),其显示由评估单元(12)评估的结果。 本发明允许自动评估造影剂的流入的开始和结束时间。
    • 8. 发明申请
    • ULTRASOUND DIAGNOSTIC APPARATUS AND METHOD
    • 超声诊断设备及方法
    • US20130317361A1
    • 2013-11-28
    • US13982801
    • 2011-12-28
    • Marie TabaruTakashi AzumaHideki YoshikawaKunio Hashiba
    • Marie TabaruTakashi AzumaHideki YoshikawaKunio Hashiba
    • A61B8/08
    • A61B8/485A61B8/42A61B8/469A61B8/5246G01S7/52042
    • An ultrasound diagnostic apparatus with which elastic modulus can be measured when measuring elastic modulus using shear wave generation. The ultrasound diagnostic apparatus includes an ultrasound probe that sends and receives echo signals, a strain-computing unit that receives an echo signal from the body by radiating a first displacement-detecting beam and computes strain information in a Region 1, a measurement position-selecting unit that selects a Region 2, within Region 1, based on the strain information, a displacement-generating unit that radiates a focused beam into the body and displaces the tissue, an elastic modulus-computing unit that receives an echo signal from the body by radiating a second displacement-detecting beam, detects the shear wave displacement that results from the focused beam, and computes the elastic modulus in Region 2, and a display unit that displays the strain image that is based on the strain information in Region 1 and the elastic modulus.
    • 一种使用剪切波产生测量弹性模量时可以测量弹性模量的超声波诊断装置。 超声波诊断装置包括发送和接收回波信号的超声波探头,应变计算单元,其通过辐射第一位移检测光束从身体接收回波信号,并计算区域1中的应变信息,测量位置选择 基于应变信息在区域1内选择区域2的单元,将聚焦光束照射到体内并使组织发生位移的位移产生单元,弹性模量计算单元,其从身体接收回波信号, 辐射第二位移检测光束,检测由聚焦光束产生的剪切波位移,并计算区域2中的弹性模量;以及显示单元,其显示基于区域1中的应变信息的应变图像,以及 弹性模量。