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1. 发明授权

US08375538B2 Method for manufacturing piezoelectric actuator 失效
标题翻译：制造压电致动器的方法
公开(公告)号：US08375538B2
公开(公告)日：2013-02-19
申请号：US12729532
申请日：2010-03-23
申请人： Hideki Shimizu , Takao Ohnishi , Takashi Ebigase , Naoki Goto
发明人： Hideki Shimizu , Takao Ohnishi , Takashi Ebigase , Naoki Goto
IPC分类号： H04R17/10 , H01L41/22
CPC分类号： H01L41/094 , H01L41/257 , Y10T29/42 , Y10T29/49155 , Y10T29/49163
摘要： There is provided a method for manufacturing a piezoelectric actuator where the planar shape is adjusted by subjecting the piezoelectric body layer located on one of the outer surfaces in the two or more piezoelectric body layers to a polarization treatment to control remnant polarization of the piezoelectric body layer. The piezoelectric actuator is used as a drive portion of a piezoelectric drive type variable capacitor. The variable capacitor has high mechanical strength and excellent reliability for a long period of time. The relation between the displacement amount of the piezoelectric actuator and the capacity of the capacitor is stable, and the variable capacity is wide.
摘要翻译：提供一种制造压电致动器的方法，其中通过使位于两个或更多个压电体层中的一个外表面上的压电体层进行极化处理来调节压电体层的残留极化，从而调整平面形状。压电致动器用作压电驱动型可变电容器的驱动部分。可变电容器长时间具有高机械强度和优异的可靠性。压电致动器的位移量与电容器的容量之间的关系是稳定的，并且可变容量很宽。

2. 发明申请

US20100242242A1 METHOD FOR MANUFACTURING PIEZOELECTRIC ACTUATOR 失效
标题翻译：制造压电致动器的方法
公开(公告)号：US20100242242A1
公开(公告)日：2010-09-30
申请号：US12729532
申请日：2010-03-23
申请人： Hideki SHIMIZU , Takao Ohnishi , Takashi Ebigase , Naoki Goto
发明人： Hideki SHIMIZU , Takao Ohnishi , Takashi Ebigase , Naoki Goto
IPC分类号： H04R17/00
CPC分类号： H01L41/094 , H01L41/257 , Y10T29/42 , Y10T29/49155 , Y10T29/49163
摘要： There is provided a method for manufacturing a piezoelectric actuator where the planar shape is adjusted by subjecting the piezoelectric body layer located on one of the outer surfaces in the two or more piezoelectric body layers to a polarization treatment to control remnant polarization of the piezoelectric body layer. The piezoelectric actuator is used as a drive portion of a piezoelectric drive type variable capacitor. The variable capacitor has high mechanical strength and excellent reliability for a long period of time. The relation between the displacement amount of the piezoelectric actuator and the capacity of the capacitor is stable, and the variable capacity is wide.
摘要翻译：提供一种制造压电致动器的方法，其中通过使位于两个或更多个压电体层中的一个外表面上的压电体层进行极化处理来调节压电体层的残留极化，从而调整平面形状。压电致动器用作压电驱动型可变电容器的驱动部分。可变电容器长时间具有高机械强度和优异的可靠性。压电致动器的位移量与电容器的容量之间的关系是稳定的，并且可变容量很宽。

3. 发明授权

US09240544B2 Method of manufacturing piezoelectric element 有权
标题翻译：制造压电元件的方法
公开(公告)号：US09240544B2
公开(公告)日：2016-01-19
申请号：US13115442
申请日：2011-05-25
申请人： Takao Ohnishi , Hideki Shimizu , Takashi Ebigase
发明人： Takao Ohnishi , Hideki Shimizu , Takashi Ebigase
IPC分类号： H04R17/00 , H01L41/33 , C04B35/493 , H01L41/29 , H01L41/43
CPC分类号： H01L41/33 , C04B35/493 , C04B2235/3206 , C04B2235/3255 , C04B2235/3279 , C04B2235/6025 , C04B2235/768 , H01L41/29 , H01L41/43 , Y10T29/42
摘要： A method of manufacturing a piezoelectric element including a step of preparing a green sheet A including a portion which becomes a fired piezoelectric body later, by use of a piezoelectric material; a step of joining, to at least one surface of the green sheet A, a green sheet B having an opening in a portion facing the portion which becomes the fired piezoelectric body later, followed by firing to obtain the fired piezoelectric body provided with a reinforcing plate to which the reinforcing plate formed owing to the firing of the green sheet B is attached; and a step of forming a film-like electrode in a portion obtained by the firing of the green sheet A in the fired piezoelectric body provided with the reinforcing plate.
摘要翻译：一种制造压电元件的方法，包括以下步骤：通过使用压电材料制备包括成为烧结压电体的部分的生片A. 在生坯片A的至少一个表面上接合具有开口的生坯片B，其后面部分成为烧结压电体的部分，然后进行烧制，以获得具有加强层的烧结压电体安装由于生坯B的烧制而形成的加强板的板; 以及在设置有加强板的烧结压电体中通过焙烧生片A而获得的部分中形成膜状电极的步骤。

4. 发明申请

US20110289744A1 METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT 有权
标题翻译：制造压电元件的方法
公开(公告)号：US20110289744A1
公开(公告)日：2011-12-01
申请号：US13115442
申请日：2011-05-25
申请人： Takao Ohnishi , Hideki Shimizu , Takashi Ebigase
发明人： Takao Ohnishi , Hideki Shimizu , Takashi Ebigase
IPC分类号： H01L41/22
CPC分类号： H01L41/33 , C04B35/493 , C04B2235/3206 , C04B2235/3255 , C04B2235/3279 , C04B2235/6025 , C04B2235/768 , H01L41/29 , H01L41/43 , Y10T29/42
摘要： There is disclosed a method of manufacturing a piezoelectric element including a step of preparing a green sheet A including a portion which becomes a fired piezoelectric body later, by use of a piezoelectric material; a step of joining, to at least one surface of the green sheet A, a green sheet B having an opening in a portion facing the portion which becomes the fired piezoelectric body later, followed by firing to obtain the fired piezoelectric body provided with a reinforcing plate to which the reinforcing plate formed owing to the firing of the green sheet B is attached; and a step of forming a film-like electrode in a portion obtained by the firing of the green sheet A in the fired piezoelectric body provided with the reinforcing plate.
摘要翻译：公开了一种制造压电元件的方法，包括以下步骤：通过使用压电材料制备包括成为烧结压电体的部分的生片A. 在生坯片A的至少一个表面上接合具有开口的生坯片B，其后面部分成为烧结压电体的部分，然后进行烧制，以获得具有加强层的烧结压电体安装由于生坯B的烧制而形成的加强板的板; 以及在设置有加强板的烧结压电体中通过焙烧生片A而获得的部分中形成膜状电极的步骤。

5. 发明申请

US20080213575A1 PIEZOELECTRIC/ELECTROSTRICTIVE ELEMENT 有权
标题翻译：压电元件
公开(公告)号：US20080213575A1
公开(公告)日：2008-09-04
申请号：US12032128
申请日：2008-02-15
申请人： Hideki Shimizu , Takashi Ebigase
发明人： Hideki Shimizu , Takashi Ebigase
IPC分类号： B32B7/02
CPC分类号： H01L41/0477 , B41J2/14233 , B41J2002/14258 , B41J2202/03 , H01L41/083 , H01L41/0973 , H01L41/187 , H01L41/1871 , H01L41/1876 , H01L41/27 , H01L41/273 , Y10T428/26
摘要： In the manufacture of a laminated piezoelectric/electrostrictive element by lamination of a piezoelectric/electrostrictive film and an electrode film containing either platinum or an alloy composed mainly of platinum and having a thickness of 2.0 μm or less, both or either one of yttrium oxide (Y2O3) and cerium oxide (CeO2) is added to the electrode film or the piezoelectric/electrostrictive film, and the electrode film and the piezoelectric/electrostrictive film are fired simultaneously. This simultaneously achieves a reduced thickness and improved thermal resistance of the electrode film and a reduced change in piezoelectric/electrostrictive properties with time, thereby producing a piezoelectric/electrostrictive element with good initial piezoelectric/electrostrictive properties and with a small change in the piezoelectric/electrostrictive properties with time.
摘要翻译：在通过层叠压电/电致伸缩膜和包含铂或主要由铂组成的并且厚度为2.0μm或更小的合金的电极膜制造层压压电/电致伸缩元件时，氧化钇（ Y 2 N 3 O 3）和氧化铈（CeO 2 S 2）加入到电极膜或压电/电致伸缩膜中，并且电极膜同时对压电/电致伸缩膜进行烧制。这同时实现了电极膜的减小的厚度和改善的热阻，并且随着时间的推移，压电/电致伸缩特性的变化减小，从而产生具有良好的初始压电/电致伸缩特性的压电/电致伸缩元件，并且压电/电致伸缩随着时间的推移。

6. 发明授权

US08742650B2 Piezoelectric/electrostrictive element 有权
标题翻译：压电/电致伸缩元件
公开(公告)号：US08742650B2
公开(公告)日：2014-06-03
申请号：US12032128
申请日：2008-02-15
申请人： Hideki Shimizu , Takashi Ebigase
发明人： Hideki Shimizu , Takashi Ebigase
IPC分类号： H01L41/04 , H01L41/187 , H01L41/047
CPC分类号： H01L41/0477 , B41J2/14233 , B41J2002/14258 , B41J2202/03 , H01L41/083 , H01L41/0973 , H01L41/187 , H01L41/1871 , H01L41/1876 , H01L41/27 , H01L41/273 , Y10T428/26
摘要： In the manufacture of a laminated piezoelectric/electrostrictive element by lamination of a piezoelectric/electrostrictive film and an electrode film containing either platinum or an alloy composed mainly of platinum and having a thickness of 2.0 μm or less, both or either one of yttrium oxide (Y2O3) and cerium oxide (CeO2) is added to the electrode film or the piezoelectric/electrostrictive film, and the electrode film and the piezoelectric/electrostrictive film are fired simultaneously. This simultaneously achieves a reduced thickness and improved thermal resistance of the electrode film and a reduced change in piezoelectric/electrostrictive properties with time, thereby producing a piezoelectric/electrostrictive element with good initial piezoelectric/electrostrictive properties and with a small change in the piezoelectric/electrostrictive properties with time.
摘要翻译：在通过层叠压电/电致伸缩膜和包含铂或主要由铂组成的并且厚度为2.0μm或更小的合金的电极膜制造层压压电/电致伸缩元件时，氧化钇（ Y2O3）和氧化铈（CeO 2）加入到电极膜或压电/电致伸缩膜中，同时对电极膜和压电/电致伸缩膜进行烧制。这同时实现了电极膜的减小的厚度和改善的热阻，并且随着时间的推移，压电/电致伸缩特性的变化减小，从而产生具有良好的初始压电/电致伸缩特性的压电/电致伸缩元件，并且压电/电致伸缩随着时间的推移。

7. 发明申请

US20050153827A1 Piezoelectric/electrostrictive ceramic composition, piezoelectric/electrostrictive material, and piezoelectric/electrostrictive film device 失效
标题翻译：压电/电致伸缩陶瓷组合物，压电/电致伸缩材料和压电/电致伸缩膜装置
公开(公告)号：US20050153827A1
公开(公告)日：2005-07-14
申请号：US11001952
申请日：2004-12-02
申请人： Toshikatsu Kashiwaya , Hideki Shimizu , Takashi Ebigase
发明人： Toshikatsu Kashiwaya , Hideki Shimizu , Takashi Ebigase
IPC分类号： C04B35/49 , C04B35/493 , H01L41/04 , H01L41/083 , H01L41/09 , H01L41/187 , H01L41/22 , H01L41/27 , H01L41/39
CPC分类号： C01G33/006 , C01P2002/52 , C01P2002/54 , C01P2006/40 , C04B35/493 , C04B35/499 , C04B2235/3206 , C04B2235/3234 , C04B2235/3249 , C04B2235/3255 , C04B2235/3279 , C04B2235/3418 , C04B2235/77 , C04B2235/785 , C04B2235/786 , C04B2235/79 , H01L41/0973 , H01L41/098 , H01L41/1875
摘要： A piezoelectric/electrostrictive ceramic composition containing, as a major component, a Pb(Mg1/3Nb2/3)O3—PbTiO3—PbZrO3 ternary solid solution system composition and further containing Ni in an amount of 0.05 to 3.0% by mass in terms of NiO and Si in an amount of 0.003 to 0.01% by mass in terms of SiO2. The piezoelectric/electrostrictive ceramic composition can constitute a piezoelectric/electrostrictive body or a piezoelectric/electrostrictive portion both having an excellent piezoelectric/electrostrictive property and durability even under high-temperature and highly humid conditions.
摘要翻译：一种压电/电致伸缩陶瓷组合物，其包含作为主要成分的Pb（Mg 1/3 N 2 Nb 3/3）O 3 -PbTiO 三元固溶体系组合物，还含有以NiO和Si计为0.05-3.0质量％的量为0.003至0.01的Ni 质量％SiO 2。压电/电致伸缩陶瓷组合物可以构成即使在高温高湿条件下也具有优异的压电/电致伸缩性能和耐久性的压电/电致伸缩体或压电/电致伸缩部分。

8. 发明申请

US20110050049A1 PIEZOELECTRIC/ELECTROSTRICTIVE ELEMENT AND METHOD OF MANUFACTURING PIEZOELECTRIC/ELECTROSTRICTIVE ELEMENT 有权
标题翻译：压电/电气元件及制造压电/电绝缘元件的方法
公开(公告)号：US20110050049A1
公开(公告)日：2011-03-03
申请号：US12552326
申请日：2009-09-02
申请人： Hideki Shimizu , Shinji Shiranita , Takashi Ebigase
发明人： Hideki Shimizu , Shinji Shiranita , Takashi Ebigase
IPC分类号： H01L41/04 , B05D5/12 , H01L41/24
CPC分类号： B41J2/14233 , H01L41/0973 , Y10T29/42
摘要： A piezoelectric/electrostrictive element having a double-layer structure in which a lower layer electrode film, a lower layer piezoelectric/electrostrictive film, an inner layer electrode film, an upper layer piezoelectric/electrostrictive film and an upper layer electrode film are laminated in this order on a thin portion of a substrate. In the piezoelectric/electrostrictive element, a driving signal is applied between an outer layer electrode film and the inner layer electrode film, whereby the thin portion and a laminate can be subjected to bending vibration. The piezoelectric/electrostrictive film has film thickness distribution in which a film thickness becomes larger in a continuous manner from a center portion of a bending vibration region which is an antinode of a bending first mode toward an edge portion of the bending vibration region which is a node of the bending first mode, along a short side direction of the bending vibration region.
摘要翻译：具有下层电极膜，下层压电/电致伸缩膜，内层电极膜，上层压电/电致伸缩膜和上层电极膜的双层结构的压电/电致伸缩元件在基板的薄部分上排列。在压电/电致伸缩元件中，在外层电极膜和内层电极膜之间施加驱动信号，由此能够使薄壁部和层叠体发生弯曲振动。压电/电致伸缩膜具有膜厚分布，其中，从弯曲振动区域的弯曲振动区域的中心部分到弯曲振动区域的边缘部分的连续方式，膜厚度变大弯曲第一模式的节点沿着弯曲振动区域的短边方向。

9. 发明授权

US07176155B2 Piezoelectric/electrostrictive ceramic composition, piezoelectric/electrosrictive material, and piezoelectric/electrostrictive film device 失效
标题翻译：压电/电致伸缩陶瓷组合物，压电/电绝缘材料和压电/电致伸缩膜装置
公开(公告)号：US07176155B2
公开(公告)日：2007-02-13
申请号：US11001952
申请日：2004-12-02
申请人： Toshikatsu Kashiwaya , Hideki Shimizu , Takashi Ebigase
发明人： Toshikatsu Kashiwaya , Hideki Shimizu , Takashi Ebigase
IPC分类号： H01L41/04 , C04B35/493
CPC分类号： C01G33/006 , C01P2002/52 , C01P2002/54 , C01P2006/40 , C04B35/493 , C04B35/499 , C04B2235/3206 , C04B2235/3234 , C04B2235/3249 , C04B2235/3255 , C04B2235/3279 , C04B2235/3418 , C04B2235/77 , C04B2235/785 , C04B2235/786 , C04B2235/79 , H01L41/0973 , H01L41/098 , H01L41/1875
摘要： A piezoelectric/electrostrictive ceramic composition containing, as a major component, a Pb(Mg1/3Nb2/3)O3—PbTiO3—PbZrO3 ternary solid solution system composition and further containing Ni in an amount of 0.05 to 3.0% by mass in terms of NiO and Si in an amount of 0.003 to 0.01% by mass in terms of SiO2. The piezoelectric/electrostrictive ceramic composition can constitute a piezoelectric/electrostrictive body or a piezoelectric/electrostrictive portion both having an excellent piezoelectric/electrostrictive property and durability even under high-temperature and highly humid conditions.
摘要翻译：一种压电/电致伸缩陶瓷组合物，其包含作为主要成分的Pb（Mg 1/3 N 2 Nb 3/3）O 3 -PbTiO 三元固溶体系组合物，还含有以NiO和Si计为0.05-3.0质量％的量为0.003至0.01的Ni 质量％SiO 2。压电/电致伸缩陶瓷组合物可以构成即使在高温高湿条件下也具有优异的压电/电致伸缩性能和耐久性的压电/电致伸缩体或压电/电致伸缩部分。

10. 发明授权

US07161284B2 Multilayered piezoelectric/electrostrictive device 有权
标题翻译：多层压电/电致伸缩器件
公开(公告)号：US07161284B2
公开(公告)日：2007-01-09
申请号：US10847791
申请日：2004-05-18
申请人： Takashi Ebigase , Hideki Shimizu
发明人： Takashi Ebigase , Hideki Shimizu
IPC分类号： H01L41/187 , H01L41/083
CPC分类号： C04B35/493 , C04B35/499 , C04B2235/3206 , C04B2235/3234 , C04B2235/3249 , C04B2235/3255 , C04B2235/3279 , C04B2235/3418 , C04B2235/785 , C04B2235/786 , H01L41/083 , H01L41/0973 , H01L41/187
摘要： A multilayered piezoelectric/electrostrictive device is provided, including a substrate, a plurality of piezoelectric/electrostrictive portions, and a plurality of electrodes. The piezoelectric/electrostrictive portions and the electrodes are alternately layered on the substrate, and the piezoelectric/electrostrictive portion positioned in the lowermost layer is anchored to the substrate directly or through an electrode. The ratio (α=A/B) of the average particle size (A) (μm) of the piezoelectric/electrostrictive ceramic of the piezoelectric/electrostrictive portion to the thickness (B) (μm) of the piezoelectric/electrostrictive portion satisfies the relationship expressed by “0.02≦α≦0.6” in each of the piezoelectric/electrostrictive portions.
摘要翻译：提供了一种多层压电/电致伸缩器件，包括衬底，多个压电/电致伸缩部分和多个电极。压电/电致伸缩部分和电极在衬底上交替层叠，并且位于最下层的压电/电致伸缩部分直接或通过电极锚定到衬底上。压电/电致伸缩部分的压电/电致伸缩陶瓷的平均粒径（A）（母体）与压电/电致伸缩部分的厚度（B）（母体）的比（α= A / B）满足关系式在每个压电/电致伸缩部分中由“0.02 <=α<= 0.6”表示。

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