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    • 2. 发明申请
    • Multinary deposition film production stabilizing device and method, and tool with multinary deposition film
    • 多层沉积膜生产稳定装置和方法,以及具有多层沉积膜的工具
    • US20060280877A1
    • 2006-12-14
    • US10561248
    • 2004-06-29
    • Hideki SatoMasaru SonobeNorihiro KatoManabu Yasuoka
    • Hideki SatoMasaru SonobeNorihiro KatoManabu Yasuoka
    • C23C16/00H05B6/00
    • C23C14/0641C23C14/32
    • A production stabilizing device and a method produce a multicomponent film containing metal components such as TiAlN having greatly different melting points at high material use efficiency and in a good film quality by using a single crucible (3) and converged plasma (7). For this end, electric power required to evaporate material (4) is first supplied and then electric power stepwise increased from the first electric power is repeatedly supplied until a required maximum electric power is reached. Alternatively, plasma control is performed for converging the plasma (7) into an initial area required to evaporate the material and subsequently plasma control is performed for successively and stepwise moving and expanding the plasma from the initial plasma area up to a maximum plasma area to gradually melt a non-melted portion (4b) of the material. The material is a sintered compact or a green compact (4).
    • 生产稳定装置和方法通过使用单个坩埚(3)和会聚等离子体(7),在高材料利用效率和良好的膜质量下,制造含有金属组分如TiAlN的多组分膜,其具有极高的熔点。 为此,首先供给蒸发材料(4)所需的电力,然后反复提供从第一电力逐步增加的电力直到达到所需的最大电力。 或者,进行等离子体控制,以将等离子体(7)会聚到蒸发材料所需的初始区域,然后执行等离子体控制,以将等离子体从初始等离子体区域逐渐移动和扩展到最大等离子体区域 熔化材料的未熔化部分(4b)。 该材料是烧结体或绿色压实体(4)。
    • 5. 发明授权
    • Objective lens driving device, optical pickup device, and optical information recording and/or reproduction device
    • 物镜驱动装置,光拾取装置以及光信息记录和/或再现装置
    • US06947228B2
    • 2005-09-20
    • US10923849
    • 2004-08-24
    • Norihiro Kato
    • Norihiro Kato
    • G02B7/02G02B27/10G11B7/085G11B7/09G11B7/12G11B7/22
    • G11B7/22G11B7/08582G11B7/0932G11B7/0933G11B7/0935G11B7/123
    • This invention relates to an objective lens driving device which moves an objective lens; an optical pickup device, comprising this objective lens driving device, which condenses a light beam onto the information recording surface of an optical disc; and an optical information recording and/or reproduction device, comprising this optical pickup device, which drives in rotation an optical disc and moves the optical pickup device to record and/or reproduce information signals onto or from the information recording surface. Two printed coil boards, with a first printed coil with a first shape formed on at least one face and a second printed coil with a second shape formed on the other face, are provided in parallel in an objective lens driving device of this invention, and a moveable portion on which an objective lens is provided is connected with the two printed coil boards; also, a magnet is positioned between the two printed coil boards provided in parallel. A driving current is supplied to each of the first and second printed coils to drive the objective lens in the vertical and/or lateral directions. By means of the objective lens driving device of this invention, twice the propelling force is generated by the two printed coil boards positioned on either side of the magnet, so that driving control of the objective lens can be performed satisfactorily using a simple construction.
    • 本发明涉及一种移动物镜的物镜驱动装置, 一种光学拾取装置,包括该物镜驱动装置,其将光束会聚到光盘的信息记录表面上; 以及光学信息记录和/或再现装置,其包括该光学拾取装置,该装置驱动旋转光盘并移动光学拾取装置以将信息信号记录和/或再现到信息记录表面上或从信息记录表面再现信息信号。 在本发明的物镜驱动装置中平行地设置两个印刷线圈板,其具有形成在至少一个面上的第一形状的第一印刷线圈和形成在另一个面上的具有第二形状的第二印刷线圈,并且 设置有物镜的可移动部分与两个印刷线圈板连接; 另外,磁铁位于平行设置的两个印刷线圈板之间。 驱动电流被提供给第一和第二印刷线圈中的每一个以在垂直和/或横向方向上驱动物镜。 通过本发明的物镜驱动装置,位于磁体两侧的两个印刷线圈板产生两倍的推进力,从而能够以简单的结构令人满意地进行物镜的驱动控制。
    • 6. 发明授权
    • Objective lens device, optical pickup device, and optical information recording and/or reproduction device
    • 物镜装置,光学拾取装置和光学信息记录和/或再现装置
    • US06859325B2
    • 2005-02-22
    • US10362074
    • 2002-06-18
    • Norihiro KatoTetsu TanakaTakeshi KuboJunichi Suzuki
    • Norihiro KatoTetsu TanakaTakeshi KuboJunichi Suzuki
    • G02B7/02G02B27/10G11B7/085G11B7/09G11B7/12G11B7/22
    • G11B7/22G11B7/08582G11B7/0932G11B7/0933G11B7/0935G11B7/123
    • This invention relates to an objective lens driving device which moves an objective lens; an optical pickup device, comprising this objective lens driving device, which condenses a light beam onto the information recording surface of an optical disc; and an optical information recording and/or reproduction device, comprising this optical pickup device, which drives in rotation an optical disc and moves the optical pickup device to record and/or reproduce information signals onto or from the information recording surface. Two printed coil boards, with a first printed coil with a first shape formed on at least one face and a second printed coil with a second shape formed on the other face, are provided in parallel in an objective lens driving device of this invention, and a moveable portion on which an objective lens is provided is connected with the two printed coil boards; also, a magnet is positioned between the two printed coil boards provided in parallel. A driving current is supplied to each of the first and second printed coils to drive the objective lens in the vertical and/or lateral directions. By means of the objective lens driving device of this invention, twice the propelling force is generated by the two printed coil boards positioned on either side of the magnet, so that driving control of the objective lens can be performed satisfactorily using a simple construction.
    • 本发明涉及一种移动物镜的物镜驱动装置, 一种光学拾取装置,包括该物镜驱动装置,其将光束会聚到光盘的信息记录表面上; 以及光学信息记录和/或再现装置,其包括该光学拾取装置,该装置驱动旋转光盘并移动光学拾取装置以将信息信号记录和/或再现到信息记录表面上或从信息记录表面再现信息信号。 在本发明的物镜驱动装置中平行地设置两个印刷线圈板,其具有形成在至少一个面上的第一形状的第一印刷线圈和形成在另一个面上的具有第二形状的第二印刷线圈,并且 设置有物镜的可移动部分与两个印刷线圈板连接; 另外,磁铁位于平行设置的两个印刷线圈板之间。 驱动电流被提供给第一和第二印刷线圈中的每一个以在垂直和/或横向方向上驱动物镜。 通过本发明的物镜驱动装置,位于磁体两侧的两个印刷线圈板产生两倍的推进力,从而能够以简单的结构令人满意地进行物镜的驱动控制。