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1. 发明申请

US20060280877A1 Multinary deposition film production stabilizing device and method, and tool with multinary deposition film 审中-公开
标题翻译：多层沉积膜生产稳定装置和方法，以及具有多层沉积膜的工具
公开(公告)号：US20060280877A1
公开(公告)日：2006-12-14
申请号：US10561248
申请日：2004-06-29
申请人： Hideki Sato , Masaru Sonobe , Norihiro Kato , Manabu Yasuoka
发明人： Hideki Sato , Masaru Sonobe , Norihiro Kato , Manabu Yasuoka
IPC分类号： C23C16/00 , H05B6/00
CPC分类号： C23C14/0641 , C23C14/32
摘要： A production stabilizing device and a method produce a multicomponent film containing metal components such as TiAlN having greatly different melting points at high material use efficiency and in a good film quality by using a single crucible (3) and converged plasma (7). For this end, electric power required to evaporate material (4) is first supplied and then electric power stepwise increased from the first electric power is repeatedly supplied until a required maximum electric power is reached. Alternatively, plasma control is performed for converging the plasma (7) into an initial area required to evaporate the material and subsequently plasma control is performed for successively and stepwise moving and expanding the plasma from the initial plasma area up to a maximum plasma area to gradually melt a non-melted portion (4b) of the material. The material is a sintered compact or a green compact (4).
摘要翻译：生产稳定装置和方法通过使用单个坩埚（3）和会聚等离子体（7），在高材料利用效率和良好的膜质量下，制造含有金属组分如TiAlN的多组分膜，其具有极高的熔点。为此，首先供给蒸发材料（4）所需的电力，然后反复提供从第一电力逐步增加的电力直到达到所需的最大电力。或者，进行等离子体控制，以将等离子体（7）会聚到蒸发材料所需的初始区域，然后执行等离子体控制，以将等离子体从初始等离子体区域逐渐移动和扩展到最大等离子体区域熔化材料的未熔化部分（4b）。该材料是烧结体或绿色压实体（4）。

2. 发明授权

US4775495A Process for disposing of radioactive liquid waste 失效
标题翻译：处理放射性废物废物的处理方法
公开(公告)号：US4775495A
公开(公告)日：1988-10-04
申请号：US826677
申请日：1986-02-06
申请人： Tatsuo Izumida , Tsutomu Baba , Akihiko Noie , Masaru Sonobe , Makoto Kikuchi
发明人： Tatsuo Izumida , Tsutomu Baba , Akihiko Noie , Masaru Sonobe , Makoto Kikuchi
IPC分类号： C02F1/00 , G21F9/00 , G21F9/16 , G21F9/30 , C01G56/00 , C01G57/00 , G21F9/08
CPC分类号： G21F9/162
摘要： The process of the present invention comprises adding an alkaline earth metal hydroxide such as barium hydroxide to a radioactive liquid waste containing sodium sulfate as the main component to convert the latter into an insoluble alkaline earth metal salt such as barium sulfate, adding silicic acid to by-product sodium hydroxide to prepare water glass and solidifying the radioactive insoluble alkaline earth metal salt with the water glass. According to this process, exudation of radioactive substances from the solid can be prevented and the solid having a high durability can be obtained at a low cost.
摘要翻译：本发明的方法包括将碱土金属氢氧化物如氢氧化钡加入到以硫酸钠为主要成分的放射性废液中，将其转化为不溶性碱土金属盐如硫酸钡，将硅酸加入到 - 产品氢氧化钠，制备水玻璃，并用水玻璃固化放射性不溶性碱土金属盐。根据该方法，能够防止放射性物质从固体渗出，能够以低成本获得耐久性高的固体。

3. 发明申请

US20060222767A1 Production device for multiple-system film and coating tool for multiple-system film 审中-公开
标题翻译：用于多系统胶片的多系统胶片和涂层工具的生产设备
公开(公告)号：US20060222767A1
公开(公告)日：2006-10-05
申请号：US10561246
申请日：2004-06-29
申请人： Hideki Sato , Kazuo Kitajima , Masaru Sonobe , Norihiro Kato , Manabu Yasuoka
发明人： Hideki Sato , Kazuo Kitajima , Masaru Sonobe , Norihiro Kato , Manabu Yasuoka
IPC分类号： H05H1/24 , C23C16/00
CPC分类号： C23C14/32 , C23C14/54
摘要： A production device and a method produce a multicomponent film containing metal components such as TiAlN having greatly different melting points by a melting-evaporation type ion plating method which has high material use efficiency and provides a good film quality. For this end, electric power required to evaporate material (4) is first supplied and then electric power stepwise increased from the first electric power is repeatedly supplied until a required maximum electric power is reached. At the same time, plasma control is performed for converging plasma (7) into an initial area required to evaporate the material and then plasma control is performed for successively and stepwise moving and expanding the plasma from the initial plasma area up to a maximum plasma area to gradually melt a non-melted portion of the material.
摘要翻译：制造装置和方法通过熔融蒸发型离子镀法生产含有金属成分如TiAlN等金属成分的多组分膜，其具有高的材料利用效率并提供良好的膜质量。为此，首先供给蒸发材料（4）所需的电力，然后反复提供从第一电力逐步增加的电力直到达到所需的最大电力。同时，进行等离子体控制以将等离子体（7）会聚到蒸发材料所需的初始区域，然后执行等离子体控制，以将等离子体从初始等离子体区域逐渐移动和扩展到最大等离子体区域以逐渐熔化材料的未熔融部分。

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