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1. 发明申请

US20160104736A1 SOLID-STATE IMAGING DEVICE AND MANUFACTURING METHOD OF THE SAME, ELECTRONIC EQUIPMENT, AND SEMICONDUCTOR DEVICE 审中-公开
标题翻译：固态成像装置及其制造方法，电子设备和半导体器件
公开(公告)号：US20160104736A1
公开(公告)日：2016-04-14
申请号：US14851857
申请日：2015-09-11
申请人： Hideki Hirano , Akiko Ogino , Kenju Nishikido , Iwao Sugiura , Haruhiko Ajisawa , Ikuo Yoshihara
发明人： Hideki Hirano , Akiko Ogino , Kenju Nishikido , Iwao Sugiura , Haruhiko Ajisawa , Ikuo Yoshihara
IPC分类号： H01L27/146
CPC分类号： H01L27/14625 , H01L27/14618 , H01L27/14621 , H01L27/14627 , H01L27/14632 , H01L27/14636 , H01L27/14645 , H01L29/0619 , H01L29/0623 , H01L2224/05 , Y10S148/07
摘要： A solid-state imaging device includes: a photodiode formed to be segmented with respect to each pixel in a pixel area in which plural pixels are integrated on a light receiving surface of a semiconductor substrate; an insulator film formed on the semiconductor substrate to cover the photodiode; a recessed part formed with respect to each of the pixels in the insulator film in an upper part of the photodiode; a first light transmission layer of a siloxane resin formed to fill the recessed part and configure an optical waveguide in the pixel area; a second light transmission layer formed to configure an on-chip lens with respect to each of the pixels in the pixel area; and a guard ring formed to surround an outer circumference of the pixel area to partition an inner area containing the pixel area and an outer dicing area.
摘要翻译：一种固态成像装置，包括：形成为相对于其中多个像素集成在半导体衬底的光接收表面上的像素区域中的每个像素被分割的光电二极管; 形成在半导体衬底上以覆盖光电二极管的绝缘膜; 相对于光电二极管的上部中的绝缘体膜中的每个像素形成的凹部; 形成为填充凹部的硅氧烷树脂的第一透光层，并且构成像素区域中的光波导; 形成为相对于像素区域中的每个像素配置片上透镜的第二透光层; 以及保护环，其形成为围绕像素区域的外周，以分隔包含像素区域和外部切割区域的内部区域。

2. 发明授权

US09171877B2 Semiconductor imaging device having ligth transmission layers formed relative to a guard ring structure in a predetermined manner 有权
标题翻译：具有相对于保护环结构以预定方式形成的透光层的半导体成像装置
公开(公告)号：US09171877B2
公开(公告)日：2015-10-27
申请号：US12634338
申请日：2009-12-09
申请人： Hideki Hirano , Akiko Ogino , Kenju Nishikido , Iwao Sugiura , Haruhiko Ajisawa , Ikuo Yoshihara
发明人： Hideki Hirano , Akiko Ogino , Kenju Nishikido , Iwao Sugiura , Haruhiko Ajisawa , Ikuo Yoshihara
IPC分类号： H01L27/146 , H01L29/06
CPC分类号： H01L27/14625 , H01L27/14618 , H01L27/14621 , H01L27/14627 , H01L27/14632 , H01L27/14636 , H01L27/14645 , H01L29/0619 , H01L29/0623 , H01L2224/05 , Y10S148/07
摘要： A solid-state imaging device includes: a photodiode formed to be segmented with respect to each pixel in a pixel area in which plural pixels are integrated on a light receiving surface of a semiconductor substrate; an insulator film formed on the semiconductor substrate to cover the photodiode; a recessed part formed with respect to each of the pixels in the insulator film in an upper part of the photodiode; a first light transmission layer of a siloxane resin formed to fill the recessed part and configure an optical waveguide in the pixel area; a second light transmission layer formed to configure an on-chip lens with respect to each of the pixels in the pixel area; and a guard ring formed to surround an outer circumference of the pixel area to partition an inner area containing the pixel area and an outer dicing area.
摘要翻译：一种固态成像装置，包括：形成为相对于其中多个像素集成在半导体衬底的光接收表面上的像素区域中的每个像素被分割的光电二极管; 形成在半导体衬底上以覆盖光电二极管的绝缘膜; 相对于光电二极管的上部中的绝缘体膜中的每个像素形成的凹部; 形成为填充凹部的硅氧烷树脂的第一透光层，并且构成像素区域中的光波导; 形成为相对于像素区域中的每个像素配置片上透镜的第二透光层; 以及保护环，其形成为围绕像素区域的外周，以分隔包含像素区域和外部切割区域的内部区域。

3. 发明申请

US20110073751A1 SOLID-STATE IMAGING DEVICE, SOLID-STATE IMAGING DEVICE MANUFACTURING METHOD, ELECTRONIC DEVICE, AND LENS ARRAY 有权
标题翻译：固态成像装置，固态成像装置的制造方法，电子装置和透镜阵列
公开(公告)号：US20110073751A1
公开(公告)日：2011-03-31
申请号：US12886952
申请日：2010-09-21
申请人： Akiko Ogino , Yoichi Otsuka
发明人： Akiko Ogino , Yoichi Otsuka
IPC分类号： H01L27/146 , G02B27/12
CPC分类号： H01L27/14627 , G02B3/0056 , H01L27/146 , H01L27/14609 , H01L27/14612 , H01L27/14625 , H01L27/1464 , H01L27/14643 , H01L27/14685 , H01L27/148 , H04N1/195 , H04N1/19526 , H04N5/3575 , H04N5/365 , H04N5/3765
摘要： A solid-state imaging device includes: multiple micro lenses, which are disposed in each of a first direction and a second direction orthogonal to the first direction, focus the incident light into the light-receiving surface; with the multiple micro lenses of which the planar shape is a shape including a portion divided by a side extending in the first direction and a side extending in the second direction being disposed arrayed mutually adjacent to each of the first direction and the second direction; and with the multiple micro lenses being formed so that the depth of a groove between micro lenses arrayed in a third direction is deeper than the depth of a groove between micro lenses arrayed in the first direction, and also the curvature of the lens surface in the third direction is higher than the curvature of the lens surface in the first direction.
摘要翻译：固态成像装置包括：多个微透镜，其设置在与第一方向正交的第一方向和第二方向中的每一方向上，将入射光聚焦到光接收表面中; 其中，所述多个微透镜的平面形状为包括沿着所述第一方向延伸的一侧分割的部分和在所述第二方向上延伸的一侧的形状，所述多个微透镜相对于所述第一方向和所述第二方向中的每一方排列配置; 并且多个微透镜被形成为使得在第三方向上排列的微透镜之间的凹槽的深度比在第一方向上排列的微透镜之间的凹槽的深度更深，以及在第一方向上的透镜表面的曲率第三方向高于第一方向上的透镜表面的曲率。

4. 发明申请

US20100301438A1 SOLID-STATE IMAGE PICKUP DEVICE, METHOD OF MANUFACTURING THE SAME AND ELECTRONIC APPARATUS 有权
标题翻译：固态图像拾取装置，其制造方法和电子装置
公开(公告)号：US20100301438A1
公开(公告)日：2010-12-02
申请号：US12775830
申请日：2010-05-07
申请人： Akiko Ogino , Yukihiro Sayama , Takayuki Shoya , Masaya Shimoji
发明人： Akiko Ogino , Yukihiro Sayama , Takayuki Shoya , Masaya Shimoji
IPC分类号： H01L31/0232 , H01L31/18
CPC分类号： H01L27/14685 , H01L27/14621 , H01L27/14627 , H01L27/14629
摘要： Disclosed herein is a solid-state image pickup device including: a trench formed in an insulating film above a light-receiving portion; a first waveguide core portion provided on an inner wall side of the trench; a second waveguide core portion filled in the trench via the first waveguide core portion; and a rectangular lens formed of the same material as that of the second waveguide core portion and provided integrally with the second waveguide core portion.
摘要翻译：本文公开了一种固态摄像装置，包括：形成在光接收部分上方的绝缘膜中的沟槽; 设置在所述沟槽的内壁侧的第一波导芯部; 通过第一波导芯部分填充在沟槽中的第二波导芯部分; 以及与第二波导芯部分相同的材料形成的矩形透镜，并且与第二波导芯部分一体地设置。

5. 发明申请

US20100289939A1 SOLID-STATE IMAGE CAPTURE DEVICE, MANUFACTURING METHOD THEREFOR, AND ELECTRONIC APPARATUS 有权
标题翻译：固态图像捕获设备，其制造方法和电子设备
公开(公告)号：US20100289939A1
公开(公告)日：2010-11-18
申请号：US12765455
申请日：2010-04-22
申请人： Akiko Ogino , Yukihiro Sayama , Takayuki Shoya , Masaya Shimoji , Yoshikazu Tanaka
发明人： Akiko Ogino , Yukihiro Sayama , Takayuki Shoya , Masaya Shimoji , Yoshikazu Tanaka
IPC分类号： H04N5/225 , H01L31/18
CPC分类号： H04N5/2254 , G02B1/11 , G02B7/02 , H01L27/1462 , H01L27/14625 , H01L27/14627 , H01L27/14645 , H01L27/14685 , H01L31/02161 , H01L31/0232 , H01L31/0236 , H01L33/58
摘要： A solid-state image capture device includes: at least one photoelectric converter provided at an image capture surface of a substrate to receive incident light at a light-receiving surface of the photoelectric converter and photoelectrically convert the incident light to thereby generate signal charge; at least one on-chip lens provided at the image capture surface of the substrate and above the light-receiving surface of the photoelectric converter to focus the incident light onto the light-receiving surface; and an antireflection layer provided on an upper surface of the on-chip lens at the image capture surface of the substrate. The antireflection layer contains a binder resin having a lower refractive index than the on-chip lens and low-refractive-index particles having a lower refractive index than the binder resin.
摘要翻译：固态图像捕获装置包括：至少一个光电转换器，设置在基板的图像捕获表面处，用于接收光电转换器的光接收表面处的入射光，并对入射光进行光电转换，从而产生信号电荷; 至少一个片上透镜，设置在所述基板的所述图像捕获表面上并且在所述光电转换器的所述光接收表面之上，以将入射光聚焦到所述光接收表面上; 以及设置在片上透镜的上表面上的抗反射层的基板的图像捕获表面。抗反射层含有比片上透镜低的折射率的粘合剂树脂和具有比粘合剂树脂低的折射率的低折射率颗粒。

6. 发明申请

US20100133420A1 SOLID-STATE IMAGING DEVICE, METHOD OF PRODUCING THE SAME, AND CAMERA 有权
标题翻译：固态成像装置，其制造方法和相机
公开(公告)号：US20100133420A1
公开(公告)日：2010-06-03
申请号：US12629264
申请日：2009-12-02
申请人： Akiko Ogino
发明人： Akiko Ogino
IPC分类号： H01L31/0232 , H01L21/00 , G01J3/51
CPC分类号： G01J1/44 , G01J1/02 , G01J1/0209 , G01J1/04 , G01J1/0407 , G01J1/0411 , G01J1/0422 , H01L27/14621 , H01L27/14625 , H01L27/14685
摘要： A method of producing a solid-state imaging device includes the steps of forming on a substrate a photoelectric conversion portion that receives light on a light-receiving surface and that photoelectrically converts the received light to generate a signal charge, forming above the light-receiving surface an optical waveguide that guides light to the light-receiving surface, and forming above the optical waveguide a color filter which colors light and from which colored light is emitted to the optical waveguide, wherein, in forming the color filter, the color filter is formed from a photosensitive resin film containing a dye by performing an exposure process and then performing a development process on the film, and in forming the optical waveguide, a core portion of the optical waveguide is formed so that the core portion absorbs exposure light radiated onto the photosensitive resin film when the exposure process is performed.
摘要翻译：一种固态成像装置的制造方法，其特征在于，在基板上形成在受光面上接受光的光电转换部，对所述受光的光进行光电转换，生成信号电荷的步骤，表示将光导向光接收表面的光波导，并且在光波导上方形成将光发出的光并且从其发射有色光的滤色器，其中，在形成滤色器时，滤色器为由含有染料的感光性树脂膜通过进行曝光处理而对膜进行显影处理而形成，在形成光波导时，形成光波导的芯部，使得芯部吸收照射到进行曝光处理时的感光性树脂膜。

7. 发明授权

US08890055B2 Solid-state imaging device, method of producing the same, and camera 有权
标题翻译：固态成像装置，其制造方法和相机
公开(公告)号：US08890055B2
公开(公告)日：2014-11-18
申请号：US12629264
申请日：2009-12-02
申请人： Akiko Ogino
发明人： Akiko Ogino
IPC分类号： G01J3/50 , H01L27/146 , G01J1/02 , G01J1/04 , G01J1/44
CPC分类号： G01J1/44 , G01J1/02 , G01J1/0209 , G01J1/04 , G01J1/0407 , G01J1/0411 , G01J1/0422 , H01L27/14621 , H01L27/14625 , H01L27/14685
摘要： A method of producing a solid-state imaging device includes the steps of forming on a substrate a photoelectric conversion portion that receives light on a light-receiving surface and that photoelectrically converts the received light to generate a signal charge, forming above the light-receiving surface an optical waveguide that guides light to the light-receiving surface, and forming above the optical waveguide a color filter which colors light and from which colored light is emitted to the optical waveguide, wherein, in forming the color filter, the color filter is formed from a photosensitive resin film containing a dye by performing an exposure process and then performing a development process on the film, and in forming the optical waveguide, a core portion of the optical waveguide is formed so that the core portion absorbs exposure light radiated onto the photosensitive resin film when the exposure process is performed.
摘要翻译：一种固态成像装置的制造方法，其特征在于，在基板上形成在受光面上接受光的光电转换部，对所述受光的光进行光电转换，生成信号电荷的步骤，表示将光导向光接收表面的光波导，并且在光波导上方形成将光发出的光并且从其发射有色光的滤色器，其中，在形成滤色器时，滤色器为由含有染料的感光性树脂膜通过进行曝光处理而对膜进行显影处理而形成，在形成光波导时，形成光波导的芯部，使得芯部吸收照射到进行曝光处理时的感光性树脂膜。

8. 发明授权

US08686337B2 Solid-state imaging device, solid-state imaging device manufacturing method, electronic device, and lens array 有权
标题翻译：固态成像装置，固态成像装置制造方法，电子装置和透镜阵列
公开(公告)号：US08686337B2
公开(公告)日：2014-04-01
申请号：US12886952
申请日：2010-09-21
申请人： Akiko Ogino , Yoichi Otsuka
发明人： Akiko Ogino , Yoichi Otsuka
IPC分类号： H01L27/00 , H01J3/14
CPC分类号： H01L27/14627 , G02B3/0056 , H01L27/146 , H01L27/14609 , H01L27/14612 , H01L27/14625 , H01L27/1464 , H01L27/14643 , H01L27/14685 , H01L27/148 , H04N1/195 , H04N1/19526 , H04N5/3575 , H04N5/365 , H04N5/3765
摘要： A solid-state imaging device includes: multiple micro lenses, which are disposed in each of a first direction and a second direction orthogonal to the first direction, focus the incident light into the light-receiving surface; with the multiple micro lenses of which the planar shape is a shape including a portion divided by a side extending in the first direction and a side extending in the second direction being disposed arrayed mutually adjacent to each of the first direction and the second direction; and with the multiple micro lenses being formed so that the depth of a groove between micro lenses arrayed in a third direction is deeper than the depth of a groove between micro lenses arrayed in the first direction, and also the curvature of the lens surface in the third direction is higher than the curvature of the lens surface in the first direction.
摘要翻译：固态成像装置包括：多个微透镜，其设置在与第一方向正交的第一方向和第二方向中的每一方向上，将入射光聚焦到光接收表面中; 其中，所述多个微透镜的平面形状为包括沿着所述第一方向延伸的一侧分割的部分和在所述第二方向上延伸的一侧的形状，所述多个微透镜相对于所述第一方向和所述第二方向中的每一方排列配置; 并且多个微透镜被形成为使得在第三方向上排列的微透镜之间的凹槽的深度比在第一方向上排列的微透镜之间的凹槽的深度更深，以及在第一方向上的透镜表面的曲率第三方向高于第一方向上的透镜表面的曲率。

9. 发明申请

US20120258563A1 SOLID-STATE IMAGE PICKUP DEVICE, METHOD OF MANUFACTURING THE SAME AND ELECTRONIC APPARATUS 有权
标题翻译：固态图像拾取装置，其制造方法和电子装置
公开(公告)号：US20120258563A1
公开(公告)日：2012-10-11
申请号：US13523417
申请日：2012-06-14
申请人： Akiko Ogino , Yukihiro Sayama , Takayuki Shoya , Masaya Shimoji
发明人： Akiko Ogino , Yukihiro Sayama , Takayuki Shoya , Masaya Shimoji
IPC分类号： H01L31/18
CPC分类号： H01L27/14685 , H01L27/14621 , H01L27/14627 , H01L27/14629
摘要： Disclosed herein is a solid-state image pickup device including: a trench formed in an insulating film above a light-receiving portion; a first waveguide core portion provided on an inner wall side of the trench; a second waveguide core portion filled in the trench via the first waveguide core portion; and a rectangular lens formed of the same material as that of the second waveguide core portion and provided integrally with the second waveguide core portion.
摘要翻译：本文公开了一种固态摄像装置，包括：形成在光接收部分上方的绝缘膜中的沟槽; 设置在所述沟槽的内壁侧的第一波导芯部; 通过第一波导芯部分填充在沟槽中的第二波导芯部分; 以及与第二波导芯部分相同的材料形成的矩形透镜，并且与第二波导芯部分一体地设置。

10. 发明申请

US20120147208A1 Solid-state imaging device, manufacturing method thereof, and electronic apparatus 有权
标题翻译：固态成像装置及其制造方法以及电子装置
公开(公告)号：US20120147208A1
公开(公告)日：2012-06-14
申请号：US13317465
申请日：2011-10-19
申请人： Yoichi Otsuka , Akiko Ogino
发明人： Yoichi Otsuka , Akiko Ogino
IPC分类号： H04N5/228 , H01L31/18 , H01L31/0232
CPC分类号： H01L27/14629 , H01L27/14621 , H01L27/14623 , H01L27/1464 , H01L27/14685 , H01L27/14687
摘要： A solid-state imaging device includes a light blocking layer formed in an active pixel region of a pixel region on a light incident side so as to surround a photoelectric conversion unit of each pixel and formed in an extending manner to an optical black region, a concave portion formed so as to be surrounded by the light blocking layer in a region corresponding to the photoelectric conversion unit, a first refractive index layer formed on surfaces of the light blocking layer and the concave portion and having a relatively low refractive index, a second refractive index layer formed on the first refractive index layer so as to be buried in the concave portion and having a relatively high refractive index, and an anti-flare layer formed on the first refractive index layer in the optical black region.
摘要翻译：固态成像装置包括形成在光入射侧的像素区域的有源像素区域中的遮光层，以围绕每个像素的光电转换单元并以延伸方式形成为光学黑色区域，凹部，其形成为在与光电转换单元相对应的区域中被遮光层包围，形成在光阻挡层和凹部的表面上并且折射率相对较低的第一折射率层，第二折射率层，形成在第一折射率层上，以埋入凹部并具有相对较高的折射率，以及形成在光学黑色区域中的第一折射率层上的防扩散层。

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