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1. 发明申请

US20070091481A1 Variable-shape mirror and optical pickup apparatus therewith 审中-公开
标题翻译：可变形镜和光拾取装置
公开(公告)号：US20070091481A1
公开(公告)日：2007-04-26
申请号：US11585858
申请日：2006-10-25
申请人： Hideki Chouji , Shigeo Maeda , Hideroshi Kotera , Isaku Kanno
发明人： Hideki Chouji , Shigeo Maeda , Hideroshi Kotera , Isaku Kanno
IPC分类号： G02B5/08
CPC分类号： G11B7/1362 , G02B26/0825 , G11B7/0956 , G11B7/13927 , G11B2007/0006
摘要： A variable-shape mirror has a driver portion, which includes a piezoelectric film and first and second electrode films that sandwich it therebetween, and a substrate arranged on the first electrode film to support the driver portion. As the driver portion is driven, the shape of a mirror film is varied. The substrate is formed of at least one material selected from the group of Si, SiO2, and MgO. The piezoelectric film is formed of PZT or of a perovskite oxide that contains Nb and that is the same kind as PZT. The first electrode film is formed of a plurality of layers of different compositions, and, of those layers, the one formed on the substrate is a metal layer of a composition containing at least one element selected from the group of Ti, Cr, and W and the one formed on the piezoelectric film is a metal layer of a composition containing at least one element selected from the group of Pt, Ir, and Ru.
摘要翻译：可变形反射镜具有驱动部分，其包括压电膜和夹在其间的第一和第二电极膜，以及布置在第一电极膜上以支撑驱动器部分的基板。当驱动部分被驱动时，镜膜的形状是变化的。基板由选自Si，SiO 2和MgO的至少一种材料形成。该压电膜由PZT或含有Nb的钙钛矿氧化物形成，与PZT相同。第一电极膜由多层不同的组成形成，并且在这些层中，形成在基底上的层是含有选自Ti，Cr和W中的至少一种元素的组合物的金属层并且在压电膜上形成的是包含选自Pt，Ir和Ru中的至少一种元素的组合物的金属层。

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