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    • 3. 发明授权
    • Apparatus for inspecting a wiring pattern according to a
micro-inspection and a macro-inspection performed in parallel
    • 根据微观检查和并行执行的宏观检查来检查布线图案的装置
    • US5608816A
    • 1997-03-04
    • US305968
    • 1994-09-15
    • Toyoki KawaharaAtsuharu YamamotoYuji MaruyamaHidehiko KawakamiHideaki Kawamura
    • Toyoki KawaharaAtsuharu YamamotoYuji MaruyamaHidehiko KawakamiHideaki Kawamura
    • G01N21/956G01R31/309G06T7/00G06K9/03H04N7/18
    • G06T7/0006G01N21/956G01R31/309G06T2207/10024G06T2207/30141
    • Pieces of feature information in a bi-level image such as a width, a branching point and an ending point of a wiring pattern are detected in a design rule checking section according to a micro inspection to find out pieces of feature information departing from a design rule. Also, feature codes in the bi-level image such as a corner of the wiring pattern are detected in a specific shape detecting section according to a macro inspection. The feature information are compared with pieces of referential feature information pertaining to a non-defective wiring pattern in a first comparing and judging section to judge whether the wiring pattern indicated by the feature information is defective or non-defective. The feature codes are compared with referential feature codes pertaining to a non-defective wiring pattern in a second comparing and judging section to judge whether the wiring pattern indicated by the feature codes is defective or non-defective. Therefore, defective types and portions of the wiring pattern can be detected by performing the macro inspection and the micro inspection in parallel without dividing the wiring pattern into processed regions.
    • 根据微观检查,在设计规则检查部中检测诸如布线图案的宽度,分支点和终点的双层图像中的特征信息的部分,以从设计中发现特征信息 规则。 此外,根据宏观检查,在特定形状检测部中检测诸如布线图案的角部的双电平图像中的特征码。 将特征信息与第一比较判断部中与无缺陷布线图案有关的参考特征信息进行比较,以判断由特征信息指示的布线图案是否有缺陷或无缺陷。 将特征代码与第二比较判断部分中与无缺陷布线图案有关的参考特征码进行比较,以判断由特征码指示的布线图案是否有缺陷或无缺陷。 因此,通过并行地进行宏观检查和微观检查,可以检测不良类型和布线图案的部分,而不将布线图案划分为加工区域。