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    • 6. 发明申请
    • ULTRASONIC CLEANING APPARATUS, ULTRASONIC CLEANING METHOD, AND STORAGE MEDIUM STORING COMPUTER PROGRAM FOR EXECUTING ULTRASONIC CLEANING METHOD
    • 超声波清洗装置,超声波清洗方法和存储中央存储计算机程序,用于执行超声波清洗方法
    • US20110056512A1
    • 2011-03-10
    • US12876566
    • 2010-09-07
    • Hideaki SATOKazuyoshi EshimaHiromi HaraHirozumi Hoshino
    • Hideaki SATOKazuyoshi EshimaHiromi HaraHirozumi Hoshino
    • B08B3/12
    • B08B3/12H01L21/67057
    • An ultrasonic cleaning apparatus according to the present invention comprises: a plurality of cleaning tanks configured to store a cleaning liquid; an object-to-be-processed holder capable of being inserted into each cleaning tank, the object-to-be-processed holder being configured to hold an object to be processed and to immerse the object to be processed into the cleaning liquid; a vibrator disposed on each cleaning tank; a single ultrasonic oscillator configured to make each vibrator ultrasonically vibrate; an output switch interposed between the ultrasonic oscillator and the vibrator of each respective cleaning tank, the output switch being configured to switch the vibrator that is connected to the ultrasonic oscillator; and a control device configured to control the ultrasonic oscillator and the output switch; wherein the control device controls the ultrasonic oscillator and the output switch such that a timing at which the vibrator of one of the cleaning tanks is made to ultrasonically vibrate, and a timing at which the vibrator of another cleaning tank is made to ultrasonically vibrate, are not overlapped with each other.
    • 根据本发明的超声波清洗装置包括:多个清洗槽,其构造成存储清洗液; 被处理物体能够插入到每个清洗槽中,被处理物体被构造成保持被处理物体并将被处理物体浸入清洗液中; 设置在每个清洗槽上的振动器; 构造成使每个振动器超声振动的单个超声波振荡器; 输出开关,其插入在每个相应的清洁槽的超声波振荡器和振动器之间,输出开关被配置为切换连接到超声波振荡器的振动器; 以及控制装置,被配置为控制所述超声波振荡器和所述输出开关; 其中所述控制装置控制所述超声波振荡器和所述输出开关,使得所述清洗槽中的一个的振动器被超声波振动的时刻以及使另一个清洗槽的振动器超声波振动的时刻为止 不重叠。
    • 7. 发明申请
    • HEAT PUMP UNIT AND RECIPROCATING COMPRESSOR FOR REFRIGERANT
    • 热泵单元和制冷机的再生压缩机
    • US20110203304A1
    • 2011-08-25
    • US12712553
    • 2010-02-25
    • Hideaki SATOAtsushi YAMAMOTOKazuya YAMADA
    • Hideaki SATOAtsushi YAMAMOTOKazuya YAMADA
    • F25B13/00F04B37/00
    • F04B53/08F04B39/062F25B1/02F25B1/10F25B31/008F25B2400/13
    • To prevent the decline in the volumetric efficiency and the decline in the performance of the heat pump having the reciprocating compressor integrated therein by decreasing the temperature of discharge gas in the reciprocating compressor with a simple construction, a heat pump unit 1 constituting a heat pump cycle in which the reciprocating compressor 3, a condenser 5, an expansion valve 7 and an evaporator 8 are interposed in a refrigerant circulating path 2, comprises a refrigerant-liquid returning path 9 for returning a portion of the refrigerant liquid having been condensed by the condenser 5 to a discharge chamber provided in a cylinder top assembly 20 of the reciprocating compressor 3 so that a portion of the refrigerant liquid is supplied to the discharge chamber 36 via the refrigerant-liquid returning path 9 and a discharge gas passageway 36a is cooled by evaporative latent heat of the refrigerant liquid.
    • 为了通过以简单的结构降低往复式压缩机中的排出气体的温度来防止集成有往复式压缩机的热泵的体积效率下降和性能下降,构成热泵循环的热泵单元1 其中往复式压缩机3,冷凝器5,膨胀阀7和蒸发器8被插入在制冷剂循环路径2中,包括制冷剂 - 液体返回路径9,用于使由冷凝器冷凝的冷凝液的一部分 5到设置在往复式压缩机3的气缸顶部组件20中的排出室,使得一部分制冷剂液体经由制冷剂 - 液体返回路径9供给到排出室36,并且排出气体通道36a被蒸发 制冷剂液体的潜热。
    • 8. 发明申请
    • SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND COMPUTER-READABLE MEDIUM STORING PROGRAM
    • 基板处理装置,基板处理方法和计算机可读介质存储程序
    • US20100307533A1
    • 2010-12-09
    • US12795071
    • 2010-06-07
    • Hideaki SATO
    • Hideaki SATO
    • B08B3/08
    • H01L21/02052H01L21/67057
    • Disclosed is a substrate processing apparatus, a substrate processing method and a computer-readable medium capable of recovering an extended amount of discharged solution from a processing unit thereby reducing the amount of deionized water for the processing and the cost. The substrate processing apparatus includes, inter alia, a first and second discharge solution lines each connected to a downstream side of a discharge unit, and the discharged solution from each of the first and second discharge solution lines is independently delivered to the processing solution supply unit as a recovered solution. Also, the substrate processing apparatus includes a converting unit that converts flow of the discharged solution from the discharge unit either to the first discharge solution line or to the second discharge solution line. The processing solution supply unit selectively delivers the recovered solution from the first and second discharge solution lines to the processing unit.
    • 公开了一种基板处理装置,基板处理方法和计算机可读介质,其能够从处理单元回收扩展量的排出溶液,从而减少用于处理的去离子水量和成本。 基板处理装置尤其包括连接到排出单元的下游侧的第一和第二排出液管线,并且来自第一和第二排出液管线中的每一个的排出溶液被独立地输送到处理液供给单元 作为回收溶液。 此外,基板处理装置还具有转换单元,其将排出溶液的流动从排出单元转换到第一排出液管线或第二排出液管路。 处理溶液供应单元将回收的溶液从第一和第二排出液管线选择性地输送到处理单元。
    • 9. 发明申请
    • HEATING UNIT, SUBSTRATE PROCESSING APPARATUS, AND METHOD FOR HEATING FLUID
    • 加热单元,基板加工装置和加热流体的方法
    • US20100078423A1
    • 2010-04-01
    • US12509725
    • 2009-07-27
    • Hideaki SATOHiromi Hara
    • Hideaki SATOHiromi Hara
    • H05B1/02F24H9/20F24D19/10
    • H05B1/0244F24H9/2014F24H9/2028
    • In a heating unit, based on a required output amount Q, a control part 50 performs: (A) when the required output amount Q is not more than a predetermined set value, a control in which none of the heating devices 24a is continuously kept on throughout a heating cycle, and all or one or more heating devices 24a are controlled in a periodically divided manner; and (B) when the required output amount is larger than the predetermined set value, a control in which all or one or more heating devices 24a are continuously kept on throughout the heating cycle, and all or one or more heating devices 24a among the remaining heating devices 24a are controlled in the periodically divided manner during this heating cycle. At this time, a difference between the maximum number and the minimum number of the heating devices 24a that are simultaneously kept on during the heating cycle is made not more than 1.
    • 在加热单元中,基于要求的输出量Q,控制部50执行以下操作:(A)当所需输出量Q不大于预定设定值时,不进行连续保持加热装置24a的控制 在整个加热循环中,并且以周期性分割的方式控制全部或一个或多个加热装置24a; 和(B)当所需输出量大于预定设定值时,在整个加热循环中连续保持全部或一个以上加热装置24a的控制,以及剩余的全部或一个以上的加热装置24a 在该加热循环期间,加热装置24a以周期性分割的方式被控制。 此时,在加热循环中同时保持的加热装置24a的最大数量和最小数量之差不大于1。
    • 10. 发明申请
    • DATA CONTROL APPARATUS, STORAGE SYSTEM, AND COMPUTER PROGRAM PRODUCT
    • 数据控制设备,存储系统和计算机程序产品
    • US20100005228A1
    • 2010-01-07
    • US12393654
    • 2009-02-26
    • Kazuhiro FUKUTOMIHideaki SATOShinichi KANNOShigehiro ASANO
    • Kazuhiro FUKUTOMIHideaki SATOShinichi KANNOShigehiro ASANO
    • G06F12/00G06F13/00G06F12/02G06F11/07
    • G06F12/0246G06F11/108G06F2212/7208G06F2212/7211
    • A data control apparatus includes a mapping-table managing unit that manages a mapping table that is associated with a corrupted-data recovery function of recording data and error correcting code data as redundant data that is given separately from the data, distributed and stored in units of stripe blocks in the plural nonvolatile semiconductor memory devices, the mapping table containing arrangement information of the data and the error correcting code data; a determining unit that determines whether to differentiate frequencies of writing the data into the semiconductor memory devices; and a changing unit that changes the arrangement information by switching the data stored in units of the stripe blocks managed using the mapping table to differentiate the frequencies of writing the data into the semiconductor memory devices, when the determining unit determines that the frequencies of writing the data into the semiconductor memory devices are to be differentiated.
    • 数据控制装置包括映射表管理单元,其管理与记录数据的损坏数据恢复功能和纠错码数据相关联的映射表,作为与数据分开地分配并以单元分布和存储的冗余数据 所述多个非易失性半导体存储器件中的条形块,所述映射表包含所述数据的排列信息和所述纠错码数据; 确定单元,其确定是否将写入数据的频率区分成半导体存储器件; 以及改变单元,其通过切换存储在使用映射表管理的条带块的单元中的数据来改变排列信息,以将写入数据的频率区分为半导体存储器件,当确定单元确定写入的频率 差分数据到半导体存储器件中。