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1. 发明授权

US5302266A Method and apparatus for filing high aspect patterns with metal 失效
标题翻译：用金属填充高方向图案的方法和装置
公开(公告)号：US5302266A
公开(公告)日：1994-04-12
申请号：US951924
申请日：1992-09-25
申请人： Henry J. Grabarz , Alfred Grill , William M. Holber , Joseph S. Logan , James T. C. Yeh
发明人： Henry J. Grabarz , Alfred Grill , William M. Holber , Joseph S. Logan , James T. C. Yeh
IPC分类号： C23C14/34 , C23C14/04 , C23C14/32 , C23C14/35 , H01J37/32 , H01L21/285 , H01L21/768 , H05H1/18
CPC分类号： C23C14/046 , C23C14/32 , C23C14/357 , H01J37/32009 , H01J37/32623 , H01J37/32678 , H01L21/76877 , H01J2237/3327
摘要： An electron cyclotron resonance plasma heating apparatus system and process in which microwave energy is transmitted directly in an axial direction through an evacuated chamber to generate energetic electrons. These energetic electrons spiral around the magnetic field lines formed by the solenoid and spiral substantially parallel to the axis. A metal atom vapor source transmits the metal atom vapor into the chamber through a housing port in the chamber wall. The metal atom vapor source in the housing is out of the line of sight of the substrate. The metal atoms are ionized by the energized electrons, and these ionized metal atoms are confined to the plasma column substantially free of neutral atoms as such ionized metal approaches and contacts the substrate in said evacuated chamber. In this way, the ionized metal atoms substantially avoid contact with the wall of chamber. A sputter target of a second metal may be placed in the plane of the substrate and a bias voltage applied to the target. Atoms of the second metal are then sputtered off and ionized by the plasma and are deposited on the substrate with the first metal ions.
摘要翻译：电子回旋共振等离子体加热装置系统和微波能量通过真空室沿轴向直接传递以产生高能电子的过程。这些高能电子围绕由螺线管形成的磁场线与螺旋线基本平行。金属原子蒸汽源通过室壁中的壳体端口将金属原子蒸气传输到室中。壳体中的金属原子蒸汽源不在衬底的视线之内。金属原子被激发电子电离，这些离子化的金属原子被限制在基本上不含中性原子的等离子体柱上，因为这样的电离金属靠近并接触所述真空室中的衬底。以这种方式，电离金属原子基本上避免与室的壁接触。可以将第二金属的溅射靶放置在基板的平面中，并将偏置电压施加到靶。然后将第二金属的原子溅射并通过等离子体离子化，并用第一金属离子沉积在基底上。

2. 发明授权

US5263776A Multi-wavelength optical thermometry 失效
标题翻译：多波长光学测温
公开(公告)号：US5263776A
公开(公告)日：1993-11-23
申请号：US951280
申请日：1992-09-25
申请人： David W. Abraham , William M. Holber , Joseph S. Logan , Hemantha K. Wickramasinghe
发明人： David W. Abraham , William M. Holber , Joseph S. Logan , Hemantha K. Wickramasinghe
IPC分类号： G01K11/00 , G01J3/427 , G01J3/45
CPC分类号： G01K11/00
摘要： Multi-wavelength optical thermometry provides for non-contact measurement of the temperature of a sample where the front surface and the back surface of the sample are used in a interferometer to measure changes in optical path length. Laser beams at two different wavelengths are used and the beam phase of the two resultant interference signals is used to unambiguously measure the path length change over a broad temperature range.
摘要翻译：多波长光学温度测量提供样品的温度的非接触式测量，其中样品的前表面和背面用于干涉仪中以测量光程长度的变化。使用两个不同波长的激光束，并且使用两个合成的干涉信号的光束相位来明确地测量在宽的温度范围内的路径长度变化。

3. 发明授权

US5208512A Scanned electron cyclotron resonance plasma source 失效
标题翻译：扫描电子回旋共振等离子体源
公开(公告)号：US5208512A
公开(公告)日：1993-05-04
申请号：US902773
申请日：1992-06-23
申请人： John C. Forster , William M. Holber , Joseph S. Logan
发明人： John C. Forster , William M. Holber , Joseph S. Logan
IPC分类号： H01J37/32
CPC分类号： H01J37/32623 , H01J37/32192 , H01J37/32366 , H01J37/32678
摘要： Electron cyclotron apparatus is described in which the locus of cyclotron resonance is scanned away from and toward the axis of a magnetic field by varying the strength of the magnetic field, the frequency of electromagnetic waves passing along its axis, or both.
摘要翻译：描述了电子回旋加速器装置，其中通过改变磁场的强度，沿其轴线通过的电磁波的频率，或者两者，回旋共振的轨迹被扫描远离磁场的轴线。

4. 发明授权

US08334505B2 Chemical ionization reaction or proton transfer reaction mass spectrometry 失效
标题翻译：化学电离反应或质子转移反应质谱
公开(公告)号：US08334505B2
公开(公告)日：2012-12-18
申请号：US12026799
申请日：2008-02-06
申请人： Timothy Roger Robinson , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
发明人： Timothy Roger Robinson , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
IPC分类号： H01J49/26
CPC分类号： G01N27/62 , G01N33/497 , H01J49/105 , Y10T436/24
摘要： A system and methods are described for generating reagent ions and product ions for use in a mass spectrometry system. Applications for the system and method are also disclosed for detecting volatile organic compounds in trace concentrations. A microwave or high-frequency RF energy source ionizes particles of a reagent vapor to form reagent ions. The reagent ions enter a chamber, such as a drift chamber, to interact with a fluid sample. An electric field directs the reagent ions and facilitates an interaction with the fluid sample to form product ions. The reagent ions and product ions then exit the chamber under the influence of an electric field for detection by a mass spectrometer module. The system includes various control modules for setting values of system parameters and analysis modules for detection of mass and peak intensity values for ion species during spectrometry and faults within the system.
摘要翻译：描述了用于产生用于质谱系统的试剂离子和产物离子的系统和方法。还公开了用于检测痕量浓度的挥发性有机化合物的系统和方法的应用。微波或高频RF能源将试剂蒸气的颗粒电离以形成试剂离子。试剂离子进入诸如漂移室的室以与流体样品相互作用。电场引导试剂离子并促进与流体样品的相互作用以形成产物离子。然后试剂离子和产物离子在电场的影响下离开室，由质谱模块检测。该系统包括用于设置系统参数值和分析模块的各种控制模块，用于在光谱测定和系统内的故障期间检测离子物质的质量和峰值强度值。

5. 发明授权

US08173986B2 Laser-heated infrared source 有权
标题翻译：激光加热红外线源
公开(公告)号：US08173986B2
公开(公告)日：2012-05-08
申请号：US12847468
申请日：2010-07-30
申请人： William M. Holber , Donald K. Smith , Stephen F. Horne , Matthew M. Besen , Paul A. Blackborow
发明人： William M. Holber , Donald K. Smith , Stephen F. Horne , Matthew M. Besen , Paul A. Blackborow
IPC分类号： G01N21/00 , G01N21/35 , G01J3/10
CPC分类号： G01J3/108 , Y10S430/145
摘要： Described are infrared light sources and methods for generating infrared radiation. The infrared light source includes a source of laser radiation, a target and an enclosure. The target is positioned in a path of an output region of the source of laser radiation. The target includes an absorbing material that absorbs radiation at a wavelength within the lasing spectrum of the source of laser radiation and converts the absorbed radiation into thermal energy. The enclosure defines a cavity that includes the target. The enclosure includes an infrared reflecting film on a side that defines the cavity.
摘要翻译：描述了用于产生红外辐射的红外光源和方法。红外光源包括激光辐射源，靶和外壳。目标位于激光辐射源的输出区域的路径中。目标包括吸收激光辐射源的激光光谱内的波长的辐射的吸收材料，并将吸收的辐射转换成热能。外壳定义了包含目标的空腔。外壳包括在限定空腔的一侧的红外反射膜。

6. 发明申请

US20110127450A1 Laser-Heated Infrared Source 有权
标题翻译：激光加热红外源
公开(公告)号：US20110127450A1
公开(公告)日：2011-06-02
申请号：US12847468
申请日：2010-07-30
申请人： William M. Holber , Donald K. Smith , Stephen F. Horne , Matthew M. Besen , Paul A. Blackborow
发明人： William M. Holber , Donald K. Smith , Stephen F. Horne , Matthew M. Besen , Paul A. Blackborow
IPC分类号： G01J3/10
CPC分类号： G01J3/108 , Y10S430/145
摘要： Described are infrared light sources and methods for generating infrared radiation. The infrared light source includes a source of laser radiation, a target and an enclosure. The target is positioned in a path of an output region of the source of laser radiation. The target includes an absorbing material that absorbs radiation at a wavelength within the lasing spectrum of the source of laser radiation and converts the absorbed radiation into thermal energy. The enclosure defines a cavity that includes the target. The enclosure includes an infrared reflecting film on a side that defines the cavity.
摘要翻译：描述了用于产生红外辐射的红外光源和方法。红外光源包括激光辐射源，靶和外壳。目标位于激光辐射源的输出区域的路径中。目标包括吸收激光辐射源的激光光谱内的波长的辐射的吸收材料，并将吸收的辐射转换成热能。外壳定义了包含目标的空腔。外壳包括在限定空腔的一侧的红外反射膜。

7. 发明授权

US07541558B2 Inductively-coupled toroidal plasma source 有权
标题翻译：电感耦合环形等离子体源
公开(公告)号：US07541558B2
公开(公告)日：2009-06-02
申请号：US11636891
申请日：2006-12-11
申请人： Donald K. Smith , Xing Chen , William M. Holber , Eric Georgelis
发明人： Donald K. Smith , Xing Chen , William M. Holber , Eric Georgelis
IPC分类号： B23K10/00
CPC分类号： H05H1/46 , H05H2001/4667 , H05H2001/4682
摘要： Apparatus for dissociating gases includes a plasma chamber comprising a gas. A first transformer having a first magnetic core surrounds a first portion of the plasma chamber and has a first primary winding. A second transformer having a second magnetic core surrounds a second portion of the plasma chamber and has a second primary winding. A first solid state AC switching power supply including one or more switching semiconductor devices is coupled to a first voltage supply and has a first output that is coupled to the first primary winding. A second solid state AC switching power supply including one or more switching semiconductor devices is coupled to a second voltage supply and has a second output that is coupled to the second primary winding. The first solid state AC switching power supply drives a first AC current in the first primary winding. The second solid state AC switching power supply drives a second AC current in the second primary winding. The first AC current and the second AC current induce a combined AC potential inside the plasma chamber that directly forms a toroidal plasma that completes a secondary circuit of the transformer and that dissociates the gas.
摘要翻译：用于解离气体的装置包括包含气体的等离子体室。具有第一磁芯的第一变压器包围等离子体室的第一部分并且具有第一初级绕组。具有第二磁芯的第二变压器包围等离子体室的第二部分并且具有第二初级绕组。包括一个或多个切换半导体器件的第一固态AC开关电源耦合到第一电压源并且具有耦合到第一初级绕组的第一输出。包括一个或多个开关半导体器件的第二固态AC开关电源耦合到第二电压源，并且具有耦合到第二初级绕组的第二输出。第一固态交流开关电源驱动第一初级绕组中的第一交流电流。第二固态交流开关电源驱动第二初级绕组中的第二交流电流。第一AC电流和第二AC电流引起等离子体室内的组合AC电位，其直接形成环形等离子体，其完成变压器的次级电路并且解离气体。

8. 发明申请

US20090095902A1 CHEMICAL IONIZATION REACTION OR PROTON TRANSFER REACTION MASS SPECTROMETRY WITH A TIME-OF-FLIGHT MASS SPECTROMETER 失效
标题翻译：化学离子反应或原子转移反应与时间飞行质谱仪的质谱
公开(公告)号：US20090095902A1
公开(公告)日：2009-04-16
申请号：US11869980
申请日：2007-10-10
申请人： TIMOTHY ROGER ROBINSON , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
发明人： TIMOTHY ROGER ROBINSON , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
IPC分类号： H01J49/40 , H01J49/26 , H01J49/36
CPC分类号： H01J49/145
摘要： A system, components thereof, and methods are described for time-of-flight mass spectrometry. A microwave or high-frequency RF energy source is used to ionize a reagent vapor to form reagent ions. The reagent ions enter a chamber and interact with a fluid sample to form product ions. The reagent ions and product ions are directed to a time-of-flight mass spectrometer module for detection and determination of a mass value for the ions. The time-of-flight mass spectrometer module can include an optical system and an ion beam adjuster for focusing, interrupting, or altering a flow of reagent and product ions according to a specified pattern. The time-of-flight mass spectrometer module can include signal processing techniques to collect and analyze an acquired signal, for example, using statistical signal processing, such as maximum likelihood signal processing.
摘要翻译：描述了用于飞行时间质谱的系统及其组件和方法。微波或高频RF能量源用于电离试剂蒸气以形成试剂离子。试剂离子进入室并与流体样品相互作用以形成产物离子。试剂离子和产物离子被引导到飞行时间质谱仪模块，用于检测和确定离子的质量值。飞行时间质谱模块可以包括用于根据指定图案聚焦，中断或改变试剂和产物离子流的光学系统和离子束调节器。飞行时间质谱仪模块可以包括用于收集和分析所获取的信号的信号处理技术，例如使用诸如最大似然信号处理的统计信号处理。

9. 发明授权

US07501600B2 Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel 有权
标题翻译：具有介电真空容器的环形低场反应气体和等离子体源
公开(公告)号：US07501600B2
公开(公告)日：2009-03-10
申请号：US11058620
申请日：2005-02-15
申请人： William M. Holber , Xing Chen , Andrew B. Cowe , Matthew M. Besen , Ronald W. Collins, Jr. , Susan C. Trulli , Shouqian Shao
发明人： William M. Holber , Xing Chen , Andrew B. Cowe , Matthew M. Besen , Ronald W. Collins, Jr. , Susan C. Trulli , Shouqian Shao
IPC分类号： B23K10/00
CPC分类号： H01J37/32357 , H01J37/32009 , H01J37/32091 , H01J37/321 , H01J37/32449 , H01J37/32467 , H01J37/32522
摘要： Plasma ignition and cooling apparatus and methods for plasma systems are described. An apparatus can include a vessel and at least one ignition electrode adjacent to the vessel. A total length of a dimension of the at least one ignition electrode is greater than 10% of a length of the vessel's channel. The apparatus can include a dielectric toroidal vessel, a heat sink having multiple segments urged toward the vessel by a spring-loaded mechanism, and a thermal interface between the vessel and the heat sink. A method can include providing a gas having a flow rate and a pressure and directing a portion of the flow rate of the gas into a vessel channel. The gas is ignited in the channel while the remaining portion of the flow rate is directed away from the channel.
摘要翻译：描述了等离子体点火和冷却装置和等离子体系统的方法。装置可以包括容器和与容器相邻的至少一个点火电极。所述至少一个点火电极的尺寸的总长度大于所述容器通道的长度的10％。该装置可以包括介质环形容器，具有通过弹簧加载机构朝向容器推动的多个部分的散热器以及容器和散热器之间的热界面。一种方法可以包括提供具有流速和压力的气体并将气体的一部分流量引导到容器通道中。气体在通道中被点燃，而流量的剩余部分被引导离开通道。

10. 发明申请

US20080083609A1 OXYGEN CONDITIONING OF PLASMA VESSELS 审中-公开
标题翻译：等离子体容器的氧气调节
公开(公告)号：US20080083609A1
公开(公告)日：2008-04-10
申请号：US11867342
申请日：2007-10-04
申请人： Shou-Qian Shao , Jack Jerome Schuss , John Thomas Summerson , William M. Holber , Thomas M. Parrill
发明人： Shou-Qian Shao , Jack Jerome Schuss , John Thomas Summerson , William M. Holber , Thomas M. Parrill
IPC分类号： H05H1/24
CPC分类号： H01J37/32862 , H01J37/32357
摘要： Methods and apparatus for operating plasmas are described. The vessel receives an oxygen containing plasma to clean and/or condition the vessel. Some embodiments of the invention feature methods and apparatus for improving ignition properties of the plasmas.
摘要翻译：描述了操作等离子体的方法和装置。容器接收含氧等离子体以清洁和/或调节容器。本发明的一些实施方案的特征在于改进等离子体的点燃性能的方法和装置。

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