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    • 3. 发明申请
    • Hybrid fiber optic transceiver optical subassembly
    • 混合光纤收发器光学组件
    • US20080246957A1
    • 2008-10-09
    • US11789121
    • 2007-04-05
    • Mark W. Beranek
    • Mark W. Beranek
    • G02B6/36
    • G02B6/4246G02B6/4203
    • The subassembly includes a laser for emitting signals towards fibers to be monitored, a first photodetector for monitoring reflected laser signals from the fibers, a second photodetector for monitoring laser output power, and an optical fiber. The optical fiber has an angled fiber facet. The laser emits signals toward and through the angled fiber facet, whereby a portion of the laser signal illuminates the second photodetector, and another portion illuminates the fibers that are being monitored and reflects back to the first photodetector such that faults on the fibers can be detected.
    • 子组件包括用于向要监视的光纤发射信号的激光器,用于监测来自光纤的反射激光信号的第一光电检测器,用于监视激光输出功率的第二光电检测器和光纤。 光纤具有成角度的光纤面。 激光器朝向并穿过成角度的光纤小面发射信号,由此激光信号的一部分照亮第二光电检测器,另一部分照亮被监视的光纤并反射回第一光电检测器,从而可以检测到光纤上的故障 。
    • 5. 发明授权
    • Method for growing single crystalline silicon with intermediate bonding
agent and combined thermal and photolytic activation
    • 用中间粘合剂生长单晶硅并结合热和光解活化的方法
    • US4940505A
    • 1990-07-10
    • US279566
    • 1988-12-02
    • Steven R. SchachameyerMark W. Beranek
    • Steven R. SchachameyerMark W. Beranek
    • H01L21/205H01L21/306
    • H01L21/02046H01L21/02049H01L21/02381H01L21/02532H01L21/0262H01L21/02658Y10S117/904Y10S148/017Y10S148/048Y10S438/974
    • A method is provided for epitaxially growing single crystalline silicon on a silicon substrate (10) from a silicon-bearing gas (26) at a temperature below the pyrolytic threshold of the gas and at temperatures below those normally required for epitaxial growth. An oxidized silicon substrate (10) is fluorinated (equation 2, FIG. 2) to replace the silicon-oxide layer with an adsorbed fluorinated layer. The substrate is placed in a laser photo-CVD reactor chamber (20), the chamber is evacuated to a sub-UHV level of 10.sup.-3 to 10.sup.-7 Torr, the substrate is heated to 570.degree. C., hydrogen gas (24) is introduced into the chamber, and excimer pulsed ultraviolet laser radiation (32 from laser 12) is applied through the hydrogen gas to impinge the wafer substrate. The combined effect removes regrown native oxide and removes the adsorbed fluorinated layer and breaks the hydrogen into atomic hydrogen such that the latter bonds with the silicon in the substrate and replaces the adsorbed fluorinated layer with silicon-hydrogen bonds (equation 4, FIG. 2). The substrate is maintained at 570.degree. C. and disilane is introduced into the chamber, and excimer pulsed ultraviolet laser radiation is applied through the disilane gas to impinge the wafer substrate. The combined effect breaks the silicon-hydrogen bond and decomposes the disilane to silane and an unstable intermediate SiH.sub.z which decomposes to hydrogen and atomic silicon (equation 5, FIG. 2), which atomic silicon bonds to the now unbonded silicon in the substrate to epitaxially grow single crystalline silicon.
    • 提供了一种用于在低于气体的热解阈值的温度下并且低于通常外延生长所需温度的温度从含硅气体(26)在硅衬底(10)上外延生长单晶硅的方法。 氟化氧化硅衬底(10)(等式2,图2)以用吸附的氟化层代替氧化硅层。 将基板放置在激光光CVD反应器室(20)中,将室抽真空至10-3至10-7乇的亚UHV水平,将基板加热至570℃,加入氢气(24 )引入室中,并且通过氢气施加准分子脉冲紫外激光辐射(来自激光器12的32)以冲击晶片衬底。 组合效应除去再生长的自然氧化物并除去吸附的氟化层并将氢分解成原子氢,使得后者与衬底中的硅结合并用硅 - 氢键取代吸附的氟化层(方程式4,图2) 。 将基板保持在570℃,并将乙硅烷引入室中,并通过乙硅烷气体施加准分子脉冲紫外激光辐射以冲击晶片基板。 组合效应破坏硅 - 氢键并将乙硅烷分解成硅烷和分解成氢和原子硅的不稳定中间SiHH(等式5,图2),其原子硅键合到衬底中的现在未结合的硅到外延 生长单晶硅。
    • 6. 发明授权
    • Optical bench fiber optic transmitter
    • 光台式光纤发射机
    • US07853144B2
    • 2010-12-14
    • US11900143
    • 2007-09-05
    • Mark W. Beranek
    • Mark W. Beranek
    • H04B10/08
    • H01S5/0683G02B6/4214H01S5/005
    • The subassembly includes a laser for emitting signals towards fibers to be monitored, a passive alignment carrier, a photodetector for monitoring reflected laser signals from the fibers and for monitoring laser output power, and an optical fiber. The laser is disposed within the passive alignment carrier. The optical fiber is embedded in the passive alignment carrier, and has an angled fiber facet. The laser emits signals toward and through the angled fiber facet, whereby a portion of the laser signal illuminates the photodetector, and another portion illuminates the fibers that are being monitored and reflects back to the photodetector such that faults on the fibers can be detected.
    • 子组件包括用于向要监视的光纤发射信号的激光器,无源对准载体,用于监测来自光纤的反射激光信号和用于监测激光输出功率的光电检测器以及光纤。 激光器设置在无源对准载体内。 光纤被嵌入无源对准载体中,并且具有成角度的光纤小面。 激光器朝向并穿过成角度的光纤小面发射信号,由此激光信号的一部分照亮光电检测器,另一部分照亮被监视的光纤并反射回光电检测器,从而可以检测到光纤上的故障。
    • 7. 发明申请
    • Optical bench fiber optic transmitter
    • 光台式光纤发射机
    • US20090060529A1
    • 2009-03-05
    • US11900143
    • 2007-09-05
    • Mark W. Beranek
    • Mark W. Beranek
    • H04B10/12
    • H01S5/0683G02B6/4214H01S5/005
    • The subassembly includes a laser for emitting signals towards fibers to be monitored, a passive alignment carrier, a photodetector for monitoring reflected laser signals from the fibers and for monitoring laser output power, and an optical fiber. The laser is disposed within the passive alignment carrier. The optical fiber is embedded in the passive alignment carrier, and has an angled fiber facet. The laser emits signals toward and through the angled fiber facet, whereby a portion of the laser signal illuminates the photodetector, and another portion illuminates the fibers that are being monitored and reflects back to the photodetector such that faults on the fibers can be detected.
    • 子组件包括用于向要监视的光纤发射信号的激光器,无源对准载体,用于监测来自光纤的反射激光信号和用于监测激光输出功率的光电检测器以及光纤。 激光器设置在无源对准载体内。 光纤嵌入无源对准载体中,并具有成角度的光纤面。 激光器朝向并穿过成角度的光纤小面发射信号,由此激光信号的一部分照亮光电检测器,另一部分照亮被监视的光纤并反射回光电检测器,从而可以检测到光纤上的故障。
    • 8. 发明授权
    • Optical fiber locking submount and hermetic feedthrough assembly
    • 光纤锁定底座和密封馈通组件
    • US5692086A
    • 1997-11-25
    • US548179
    • 1995-10-25
    • Mark W. BeranekEric Y. ChanDavid GastellumMostafa RassaianMark Voitek
    • Mark W. BeranekEric Y. ChanDavid GastellumMostafa RassaianMark Voitek
    • G02B6/42G02B6/255
    • G02B6/4238G02B6/4248
    • An optoelectronic package includes an optical fiber cable assembly and feedthrough assembly which provide high performance and high reliability optical fiber alignment, locking and sealing. An optical fiber is fed through a nose tube into the package. The fiber is selectively metallized at its end. A solder lock joint on a substrate on the package floor preferably of an SnAg- based or SnSb- based solder. It surrounds at least part of the metallized portion of the fiber so as to hold the fiber in its desired position, in alignment with an optoelectronic device in the package. With Sn metallization on the fiber, this results in a highly reliable solder lock joint. A solder seal joint forms a hermetic seal between the nose tube and the Au metallized fiber. This solder is preferably 80Au20Sn. A rigid cylindrical seal tube sleeve insert on the fiber is designed to guide the fiber into the nose tube without bending or damaging the fiber.
    • 光电子封装包括光纤电缆组件和馈通组件,其提供高性能和高可靠性的光纤对准,锁定和密封。 光纤通过鼻管进入包装。 纤维在其末端选择性金属化。 在封装地板上的衬底上的焊接锁定接头,优选地基于SnAg或SnSb基焊料。 它围绕光纤的金属化部分的至少一部分,以将光纤保持在其所需位置,与封装中的光电器件对准。 通过在金属纤维上进行锡金属化,可以实现高可靠性的焊锁接头。 焊接密封接头在鼻管和Au金属化纤维之间形成气密密封。 该焊料优选为80Au20Sn。 纤维上的刚性圆柱形密封管套筒插入物被设计成将纤维引导到鼻管中而不会弯曲或损坏纤维。