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1. 发明授权

US07817882B2 Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof 有权
标题翻译：具有集成端耦合波导的蚀刻面半导体光学部件及其制造和使用方法
公开(公告)号：US07817882B2
公开(公告)日：2010-10-19
申请号：US12541916
申请日：2009-08-15
申请人： Henry A. Blauvlet , David W. Vernooy , Joel S. Paslaski , Charles I. Grosjean , Hao Lee , Franklin G. Monzon , Katrina H. Nguyen
发明人： Henry A. Blauvlet , David W. Vernooy , Joel S. Paslaski , Charles I. Grosjean , Hao Lee , Franklin G. Monzon , Katrina H. Nguyen
IPC分类号： G02B6/00 , G02B6/12 , G02B6/13
CPC分类号： H01S5/026 , G02B6/132 , G02B6/4204 , H01S5/02248 , H01S5/02284 , H01S5/141
摘要： An optical apparatus comprises: a semiconductor substrate; a semiconductor optical device integrally formed on the substrate and having an off-normal device end face; and a low-index planar optical waveguide integrally formed on the semiconductor substrate at the device end face. The device and waveguide are non-collinear, and the waveguide is end-coupled at its proximal end to the optical device by refraction at the device end face. The apparatus further includes a reflective coating between the waveguide and substrate, an etched end face curved in the horizontal dimension, or an etched end face with a lower portion that protrudes beneath a proximal portion of the waveguide.
摘要翻译：光学装置包括：半导体衬底; 半导体光学器件整体地形成在基板上并具有非正常的器件端面; 以及在器件端面上一体地形成在半导体衬底上的低折射率平面光波导。器件和波导是非共线的，并且波导通过在器件端面处的折射在其近端端接到光学器件。该装置还包括在波导和基板之间的反射涂层，在水平尺寸上弯曲的蚀刻端面，或具有在波导的近端部分下方突出的下部的蚀刻端面。

2. 发明授权

US07599585B2 Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof 有权
标题翻译：具有集成端耦合波导的蚀刻面半导体光学部件及其制造和使用方法
公开(公告)号：US07599585B2
公开(公告)日：2009-10-06
申请号：US11765134
申请日：2007-06-19
申请人： Henry A. Blauvelt , David W. Vernooy , Joel S. Paslaski , Charles I. Grosjean , Hao Lee , Franklin G. Monzon , Katrina H. Nguyen
发明人： Henry A. Blauvelt , David W. Vernooy , Joel S. Paslaski , Charles I. Grosjean , Hao Lee , Franklin G. Monzon , Katrina H. Nguyen
IPC分类号： G02B6/00 , G02B6/12 , G02B6/13
CPC分类号： H01S5/026 , G02B6/132 , G02B6/4204 , H01S5/02248 , H01S5/02284 , H01S5/141
摘要： An optical apparatus comprises: a semiconductor substrate; a semiconductor optical device integrally formed on the substrate and having a device end face; and a low-index planar optical waveguide integrally formed on the semiconductor substrate at the device end face. The waveguide is end-coupled at its proximal end to the optical device through the device end face and is arranged so as to comprise a waveguide mode converter. The waveguide is arranged at its distal end to transmit or receive an optical signal through its distal end to or from another low-index optical waveguide end-coupled with the integrally-formed waveguide and assembled with the integrally-formed waveguide, optical device, or substrate. The optical apparatus can further comprise a discrete low-index optical waveguide assembled with the integrally-formed waveguide, optical device, or substrate so as to be end-coupled with the integrally-formed waveguide at its distal end.
摘要翻译：光学装置包括：半导体衬底; 整体地形成在所述基板上并具有器件端面的半导体光学器件; 以及在器件端面上一体地形成在半导体衬底上的低折射率平面光波导。波导在其近端处通过器件端面端接到光学器件，并且被布置成包括波导模式转换器。波导布置在其远端处，以将光信号通过其远端传输或接收到与整体形成的波导端连接的另一个低折射率光波导，或者与一体形成的波导，光学器件或基质。光学装置还可以包括与整体形成的波导，光学器件或衬底组装的离散低折射率光波导，以便在其远端处与整体形成的波导端部耦合。

3. 发明授权

US06985646B2 Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof 有权
标题翻译：具有集成端耦合波导的蚀刻面半导体光学部件及其制造和使用方法
公开(公告)号：US06985646B2
公开(公告)日：2006-01-10
申请号：US10759858
申请日：2004-01-16
申请人： Henry A. Blauvelt , David W. Vernooy , Joel S. Paslaski , Charles I. Grosjean , Hao Lee , Franklin G. Monzon , Katrina H. Nguyen
发明人： Henry A. Blauvelt , David W. Vernooy , Joel S. Paslaski , Charles I. Grosjean , Hao Lee , Franklin G. Monzon , Katrina H. Nguyen
IPC分类号： G02B6/00 , G02B6/12 , G02B6/13
CPC分类号： H01S5/026 , G02B6/132 , G02B6/4204 , H01S5/02248 , H01S5/02284 , H01S5/141
摘要： An optical apparatus comprises a semiconductor optical device waveguide formed on a semiconductor substrate, and an integrated end-coupled waveguide formed on the semiconductor substrate. The integrated waveguide may comprise materials differing from those of the device waveguide and the substrate. Spatially selective material processing may be employed for first forming the optical device waveguide on the substrate, and for subsequently depositing and forming the integrated end-coupled waveguide on the substrate. Spatially selective material processing enables accurate spatial mode matching and transverse alignment of the waveguides, and multiple device waveguides and corresponding integrated end-coupled waveguides may be fabricated concurrently on a common substrate on a wafer scale. The integrated end-coupled waveguide may be adapted for fulfilling one or more functions, and the device waveguide and/or integrated waveguide and/or spatially selective material processing steps may be adapted in a variety of ways for achieving the needed/desired degree of end-coupling.
摘要翻译：光学装置包括形成在半导体衬底上的半导体光学器件波导和形成在半导体衬底上的集成端耦合波导。集成波导可以包括与器件波导和衬底不同的材料。可以采用空间选择性材料处理来首先在衬底上形成光学器件波导，并且用于随后在衬底上沉积和形成集成的端部耦合波导。空间选择性材料处理可实现波导的精确的空间模式匹配和横向对准，并且多个器件波导和相应的集成端耦合波导可以在晶片规模上的公共衬底上同时制造。集成端耦合波导可以适于实现一个或多个功能，并且器件波导和/或集成波导和/或空间选择性材料处理步骤可以以各种方式进行调整，以实现所需/期望的结束度 -耦合。

4. 发明授权

US07233713B2 Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof 有权
标题翻译：具有集成端耦合波导的蚀刻面半导体光学部件及其制造和使用方法
公开(公告)号：US07233713B2
公开(公告)日：2007-06-19
申请号：US11328406
申请日：2006-01-09
申请人： Henry A. Blauvelt , David W. Vernooy , Joel S. Paslaski , Charles I. Grosjean , Hao Lee , Franklin G. Monzon , Katrina H. Nguyen
发明人： Henry A. Blauvelt , David W. Vernooy , Joel S. Paslaski , Charles I. Grosjean , Hao Lee , Franklin G. Monzon , Katrina H. Nguyen
IPC分类号： G02B6/00 , G02B6/12 , G02B6/13
CPC分类号： H01S5/026 , G02B6/132 , G02B6/4204 , H01S5/02248 , H01S5/02284 , H01S5/141
摘要： An optical apparatus comprises a semiconductor optical device waveguide formed on a semiconductor substrate, and an integrated end-coupled waveguide formed on the semiconductor substrate. The integrated waveguide may comprise materials differing from those of the device waveguide and the substrate. Spatially selective material processing may be employed for first forming the optical device waveguide on the substrate, and for subsequently depositing and forming the integrated end-coupled waveguide on the substrate. Spatially selective material processing enables accurate spatial mode matching and transverse alignment of the waveguides, and multiple device waveguides and corresponding integrated end-coupled waveguides may be fabricated concurrently on a common substrate on a wafer scale. The integrated end-coupled waveguide may be adapted for fulfilling one or more functions, and the device waveguide and/or integrated waveguide and/or spatially selective material processing steps may be adapted in a variety of ways for achieving the needed/desired degree of end-coupling.
摘要翻译：光学装置包括形成在半导体衬底上的半导体光学器件波导和形成在半导体衬底上的集成端耦合波导。集成波导可以包括与器件波导和衬底不同的材料。可以采用空间选择性材料处理来首先在衬底上形成光学器件波导，并且用于随后在衬底上沉积和形成集成的端部耦合波导。空间选择性材料处理可实现波导的精确的空间模式匹配和横向对准，并且多个器件波导和相应的集成端耦合波导可以在晶片规模上的公共衬底上同时制造。集成端耦合波导可以适于实现一个或多个功能，并且器件波导和/或集成波导和/或空间选择性材料处理步骤可以以各种方式进行调整，以实现所需/期望的结束度 -耦合。

5. 发明申请

US20090304326A1 ETCHED-FACET SEMICONDUCTOR OPTICAL COMPONENT WITH INTEGRATED END-COUPLED WAVEGUIDE AND METHODS OF FABRICATION AND USE THEREOF 有权
标题翻译：具有集成端接波导的嵌入式半导体半导体光学元件及其制造和使用方法
公开(公告)号：US20090304326A1
公开(公告)日：2009-12-10
申请号：US12541916
申请日：2009-08-15
申请人： Henry A. Blauvelt , David W. Vemooy , Joel S. Paslaski , Charles I. Grosjean , Hao Lee , Franklin G. Monzon , Katrina H. Nguyen
发明人： Henry A. Blauvelt , David W. Vemooy , Joel S. Paslaski , Charles I. Grosjean , Hao Lee , Franklin G. Monzon , Katrina H. Nguyen
IPC分类号： G02B6/12 , H01L21/00 , G02B6/10
CPC分类号： H01S5/026 , G02B6/132 , G02B6/4204 , H01S5/02248 , H01S5/02284 , H01S5/141
摘要： An optical apparatus comprises: a semiconductor substrate; a semiconductor optical device integrally formed on the substrate and having an off-normal device end face; and a low-index planar optical waveguide integrally formed on the semiconductor substrate at the device end face. The device and waveguide are non-collinear, and the waveguide is end-coupled at its proximal end to the optical device by refraction at the device end face. The apparatus further includes a reflective coating between the waveguide and substrate, an etched end face curved in the horizontal dimension, or an etched end face with a lower portion that protrudes beneath a proximal portion of the waveguide.
摘要翻译：光学装置包括：半导体衬底; 半导体光学器件整体地形成在基板上并具有非正常的器件端面; 以及在器件端面上一体地形成在半导体衬底上的低折射率平面光波导。器件和波导是非共线的，并且波导通过在器件端面处的折射在其近端端接到光学器件。该装置还包括在波导和基板之间的反射涂层，在水平尺寸上弯曲的蚀刻端面，或具有在波导的近端部分下方突出的下部的蚀刻端面。

6. 发明申请

US20100314027A1 OPTICAL JUNCTION APPARATUS AND METHODS EMPLOYING OPTICAL POWER TRANSVERSE-TRANSFER 有权
标题翻译：光接口装置和采用光功率转换的方法
公开(公告)号：US20100314027A1
公开(公告)日：2010-12-16
申请号：US12860307
申请日：2010-08-20
申请人： Henry A. Blauvelt , Kerry J. Vahala , David W. Vernooy , Joel S. Paslaski
发明人： Henry A. Blauvelt , Kerry J. Vahala , David W. Vernooy , Joel S. Paslaski
IPC分类号： B32B7/08 , B65H69/02
CPC分类号： G02B6/2852 , G02B6/12002 , G02B6/12007 , G02B6/1228 , G02B6/125 , G02B6/2804 , G02B6/2821 , G02B6/30 , G02B6/305 , G02B6/42 , G02B6/4204 , G02B6/423 , G02B6/4232 , G02B6/4246 , G02B2006/12119 , G02B2006/12195 , Y10T29/49826
摘要： A method comprises: (i) forming a first optical waveguide on a first substrate; (ii) forming a second, structurally discrete optical waveguide on a structurally discrete second substrate; (iii) assembling the second substrate or second optical waveguide with the first substrate or first optical waveguide so that the first and second optical waveguides are positioned between the first and second substrates and are relatively positioned for transferring the optical signal therebetween via optical transverse coupling; and (iv) arranging the first or second optical waveguide for transferring the optical signal therebetween via substantially adiabatic optical transverse coupling with the first and second waveguides so positioned.
摘要翻译：一种方法包括：（i）在第一衬底上形成第一光波导; （ii）在结构上离散的第二基板上形成第二结构分立的光波导; （iii）将第二基板或第二光波导与第一基板或第一光波导组装，使得第一和第二光波导位于第一和第二基板之间，并且被相对定位以通过光学横向耦合传送其间的光信号; 以及（iv）将第一或第二光波导布置在其间通过基本上绝热的光学横向耦合传送光信号，并使第一和第二波导如此定位。

7. 发明申请

US20100024192A1 OPTICAL JUNCTION APPARATUS AND METHODS EMPLOYING OPTICAL POWER TRANSVERSE-TRANSFER 有权
标题翻译：光接口装置和采用光功率转换的方法
公开(公告)号：US20100024192A1
公开(公告)日：2010-02-04
申请号：US12510273
申请日：2009-07-28
申请人： Henry A. Blauvelt , Kerry J. Vahala , David W. Vernooy , Joel S. Paslaski
发明人： Henry A. Blauvelt , Kerry J. Vahala , David W. Vernooy , Joel S. Paslaski
IPC分类号： B23P17/04
CPC分类号： G02B6/2852 , G02B6/12002 , G02B6/12007 , G02B6/1228 , G02B6/125 , G02B6/2804 , G02B6/2821 , G02B6/30 , G02B6/305 , G02B6/42 , G02B6/4204 , G02B6/423 , G02B6/4232 , G02B6/4246 , G02B2006/12119 , G02B2006/12195 , Y10T29/49826
摘要： A method comprises: forming an optical device on a device substrate; forming a first optical waveguide on the device or device substrate; forming a second, structurally discrete optical waveguide on a structurally discrete waveguide substrate; and assembling the optical device, first waveguide, or device substrate with the second waveguide or waveguide substrate. The device and first waveguide are arranged for transferring an optical signal between the device and the first waveguide. Upon assembly the first and second waveguides are positioned between the device and waveguide substrates and are relatively positioned for transferring the optical signal therebetween via optical transverse coupling. The first or second optical waveguide is arranged for transferring the optical signal therebetween via substantially adiabatic optical transverse coupling with the first and second waveguides so positioned.
摘要翻译：一种方法包括：在器件衬底上形成光学器件; 在所述器件或器件衬底上形成第一光波导; 在结构上分立的波导衬底上形成第二个结构分立的光波导; 以及将所述光学器件，第一波导或器件基板与所述第二波导或波导基板组装。器件和第一波导被布置用于在器件和第一波导之间传送光信号。在组装时，第一和第二波导位于器件和波导基片之间，并且被相对定位以通过光学横向耦合传递其间的光学信号。第一或第二光波导被布置用于通过基本绝热的光学横向耦合将光信号转移到第一和第二波导的位置。

8. 发明申请

US20080226224A1 OPTICAL JUNCTION APPARATUS AND METHODS EMPLOYING OPTICAL POWER TRANSVERSE-TRANSFER 有权
标题翻译：光接口装置和采用光功率转换的方法
公开(公告)号：US20080226224A1
公开(公告)日：2008-09-18
申请号：US12126883
申请日：2008-05-25
申请人： Henry A. Blauvelt , Kerry J. Vahala , David W. Vernooy , Joel S. Paslaski
发明人： Henry A. Blauvelt , Kerry J. Vahala , David W. Vernooy , Joel S. Paslaski
IPC分类号： G02B6/12 , G02B6/26
CPC分类号： G02B6/2852 , G02B6/12002 , G02B6/12007 , G02B6/1228 , G02B6/125 , G02B6/2804 , G02B6/2821 , G02B6/30 , G02B6/305 , G02B6/42 , G02B6/4204 , G02B6/423 , G02B6/4232 , G02B6/4246 , G02B2006/12119 , G02B2006/12195 , Y10T29/49826
摘要： An optical apparatus comprises an optical device formed on a device substrate, a first optical waveguide formed on the substrate or on the optical device, and a second, mechanically discrete optical waveguide assembled with the device substrate, optical device, or first optical waveguide. The first optical waveguide is arranged for transferring an optical signal between the optical device and the first optical waveguide. The first and second optical waveguides are arranged, when the second optical waveguide is assembled with the device substrate, optical device, or first optical waveguide, for transferring the optical signal therebetween via optical transverse coupling.
摘要翻译：光学装置包括形成在器件基板上的光学器件，形成在基板上或光学器件上的第一光波导，以及与器件基板，光学器件或第一光波导组装的第二机械分立的光波导。第一光波导被布置用于在光学器件和第一光波导之间传送光信号。当第二光波导与器件基板，光学器件或第一光波导组装在一起时，第一和第二光波导被布置成用于经由光学横向耦合传送光信号。

9. 发明授权

US07379638B2 Optical junction apparatus and methods employing optical power transverse-transfer 有权
标题翻译：光学接合装置及采用光功率横向传输的方法
公开(公告)号：US07379638B2
公开(公告)日：2008-05-27
申请号：US11623688
申请日：2007-01-16
申请人： Henry A. Blauvelt , Kerry J. Vahala , David W. Vernooy , Joel S. Paslaski
发明人： Henry A. Blauvelt , Kerry J. Vahala , David W. Vernooy , Joel S. Paslaski
IPC分类号： G02B6/42
CPC分类号： G02B6/2852 , G02B6/12002 , G02B6/12007 , G02B6/1228 , G02B6/125 , G02B6/2804 , G02B6/2821 , G02B6/30 , G02B6/305 , G02B6/42 , G02B6/4204 , G02B6/423 , G02B6/4232 , G02B6/4246 , G02B2006/12119 , G02B2006/12195 , Y10T29/49826
摘要： An optical apparatus comprises an optical device fabricated on a substrate, an external-transfer optical waveguide fabricated on the substrate and/or on the optical device, and a transmission optical waveguide. The optical device and/or the external-transfer waveguide are adapted for and positioned for transfer of optical power therebetween (end-transfer or transverse-transfer). The external-transfer waveguide and/or the transmission waveguide are adapted for transverse-transfer of optical power therebetween (mode-interference-coupled or adiabatic). The transmission waveguide is initially provided as a component mechanically separate from the substrate, device, and external-transfer waveguide. Assembly of the transmission waveguide with the substrate, device, and/or external-transfer waveguide results in relative positioning of the external-transfer waveguide and the transmission waveguide for enabling transverse-transfer of optical power therebetween. Optical power transfer between the device and the transmission waveguide through the external-transfer waveguide is thereby enabled. The transmission waveguide may preferably comprise a planar waveguide on a waveguide substrate.
摘要翻译：光学装置包括制造在基板上的光学装置，在基板上和/或光学装置上制造的外部转移光波导和透射光波导。光学器件和/或外部传输波导适用于并定位用于在其间传递光功率（终端传输或横向传输）。外部传输波导和/或传输波导适用于其间的光功率的横向传输（模干扰耦合或绝热）。传输波导最初设置为与基板，器件和外部传输波导机械分离的部件。具有衬底，器件和/或外部传输波导的传输波导的组装导致外部传输波导和传输波导的相对定位，以实现它们之间的光功率的横向传递。从而能够通过外部传输波导在器件与透射波导之间进行光功率传递。传输波导可以优选地包括在波导衬底上的平面波导。

10. 发明授权

US07269317B2 Optical assemblies for free-space optical propagation between waveguide(s) and/or fiber(s) 有权
标题翻译：波导和/或光纤之间的自由空间光学传播的光学组件
公开(公告)号：US07269317B2
公开(公告)日：2007-09-11
申请号：US10652955
申请日：2003-08-29
申请人： Henry A. Blauvelt , David W. Vernooy , Joel S. Paslaski
发明人： Henry A. Blauvelt , David W. Vernooy , Joel S. Paslaski
IPC分类号： G02B6/26
CPC分类号： G02B6/3652 , G02B6/2746 , G02B6/30 , G02B6/32 , G02B6/3636 , G02B6/3692
摘要： An optical apparatus comprises a substrate, first and second transmission optical elements on the substrate, and an optical component (such as an isolator) and focusing optical element(s) on the substrate between the transmission elements. Transmission elements may include planar waveguide(s) formed on the substrate and/or optical fiber(s) mounted in groove(s) on the substrate. The focusing element(s) may include: gradient-index (GRIN) segment(s) mounted on the substrate or spliced onto a fiber, a focusing segment(s) of a planar waveguide, ball lens(es), aspheric lens(es), and/or Fresnel lens(es). A dual-lens optical assembly comprises a pair of GRIN segments secured to a substrate in one or more grooves, and may be formed from a common length of GRIN optical medium. An optical component (such as an isolator) is positioned between the paired GRIN segments, and optical power is transmitted by the dual-lens assembly between planar waveguide(s) and/or fiber(s) through the optical component.
摘要翻译：光学装置包括基板，基板上的第一和第二透射光学元件以及光学部件（例如隔离器）和在透光元件之间的基板上的聚焦光学元件。传输元件可以包括形成在衬底上的平面波导和/或安装在衬底上的凹槽中的光纤。聚焦元件可以包括：安装在基板上或拼接到光纤上的梯度折射率（GRIN）段，平面波导的聚焦段，球透镜，非球面透镜）和/或菲涅尔透镜。双透镜光学组件包括在一个或多个凹槽中固定到基底的一对GRIN部分，并且可以由公共长度的GRIN光学介质形成。光学部件（例如隔离器）位于成对的GRIN部分之间，并且光功率由双透镜组件在平面波导和/或光纤之间通过光学部件传输。

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