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1. 发明授权

US07599585B2 Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof 有权
标题翻译：具有集成端耦合波导的蚀刻面半导体光学部件及其制造和使用方法
公开(公告)号：US07599585B2
公开(公告)日：2009-10-06
申请号：US11765134
申请日：2007-06-19
申请人： Henry A. Blauvelt , David W. Vernooy , Joel S. Paslaski , Charles I. Grosjean , Hao Lee , Franklin G. Monzon , Katrina H. Nguyen
发明人： Henry A. Blauvelt , David W. Vernooy , Joel S. Paslaski , Charles I. Grosjean , Hao Lee , Franklin G. Monzon , Katrina H. Nguyen
IPC分类号： G02B6/00 , G02B6/12 , G02B6/13
CPC分类号： H01S5/026 , G02B6/132 , G02B6/4204 , H01S5/02248 , H01S5/02284 , H01S5/141
摘要： An optical apparatus comprises: a semiconductor substrate; a semiconductor optical device integrally formed on the substrate and having a device end face; and a low-index planar optical waveguide integrally formed on the semiconductor substrate at the device end face. The waveguide is end-coupled at its proximal end to the optical device through the device end face and is arranged so as to comprise a waveguide mode converter. The waveguide is arranged at its distal end to transmit or receive an optical signal through its distal end to or from another low-index optical waveguide end-coupled with the integrally-formed waveguide and assembled with the integrally-formed waveguide, optical device, or substrate. The optical apparatus can further comprise a discrete low-index optical waveguide assembled with the integrally-formed waveguide, optical device, or substrate so as to be end-coupled with the integrally-formed waveguide at its distal end.
摘要翻译：光学装置包括：半导体衬底; 整体地形成在所述基板上并具有器件端面的半导体光学器件; 以及在器件端面上一体地形成在半导体衬底上的低折射率平面光波导。波导在其近端处通过器件端面端接到光学器件，并且被布置成包括波导模式转换器。波导布置在其远端处，以将光信号通过其远端传输或接收到与整体形成的波导端连接的另一个低折射率光波导，或者与一体形成的波导，光学器件或基质。光学装置还可以包括与整体形成的波导，光学器件或衬底组装的离散低折射率光波导，以便在其远端处与整体形成的波导端部耦合。

2. 发明授权

US07233713B2 Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof 有权
标题翻译：具有集成端耦合波导的蚀刻面半导体光学部件及其制造和使用方法
公开(公告)号：US07233713B2
公开(公告)日：2007-06-19
申请号：US11328406
申请日：2006-01-09
申请人： Henry A. Blauvelt , David W. Vernooy , Joel S. Paslaski , Charles I. Grosjean , Hao Lee , Franklin G. Monzon , Katrina H. Nguyen
发明人： Henry A. Blauvelt , David W. Vernooy , Joel S. Paslaski , Charles I. Grosjean , Hao Lee , Franklin G. Monzon , Katrina H. Nguyen
IPC分类号： G02B6/00 , G02B6/12 , G02B6/13
CPC分类号： H01S5/026 , G02B6/132 , G02B6/4204 , H01S5/02248 , H01S5/02284 , H01S5/141
摘要： An optical apparatus comprises a semiconductor optical device waveguide formed on a semiconductor substrate, and an integrated end-coupled waveguide formed on the semiconductor substrate. The integrated waveguide may comprise materials differing from those of the device waveguide and the substrate. Spatially selective material processing may be employed for first forming the optical device waveguide on the substrate, and for subsequently depositing and forming the integrated end-coupled waveguide on the substrate. Spatially selective material processing enables accurate spatial mode matching and transverse alignment of the waveguides, and multiple device waveguides and corresponding integrated end-coupled waveguides may be fabricated concurrently on a common substrate on a wafer scale. The integrated end-coupled waveguide may be adapted for fulfilling one or more functions, and the device waveguide and/or integrated waveguide and/or spatially selective material processing steps may be adapted in a variety of ways for achieving the needed/desired degree of end-coupling.
摘要翻译：光学装置包括形成在半导体衬底上的半导体光学器件波导和形成在半导体衬底上的集成端耦合波导。集成波导可以包括与器件波导和衬底不同的材料。可以采用空间选择性材料处理来首先在衬底上形成光学器件波导，并且用于随后在衬底上沉积和形成集成的端部耦合波导。空间选择性材料处理可实现波导的精确的空间模式匹配和横向对准，并且多个器件波导和相应的集成端耦合波导可以在晶片规模上的公共衬底上同时制造。集成端耦合波导可以适于实现一个或多个功能，并且器件波导和/或集成波导和/或空间选择性材料处理步骤可以以各种方式进行调整，以实现所需/期望的结束度 -耦合。

3. 发明授权

US06985646B2 Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof 有权
标题翻译：具有集成端耦合波导的蚀刻面半导体光学部件及其制造和使用方法
公开(公告)号：US06985646B2
公开(公告)日：2006-01-10
申请号：US10759858
申请日：2004-01-16
申请人： Henry A. Blauvelt , David W. Vernooy , Joel S. Paslaski , Charles I. Grosjean , Hao Lee , Franklin G. Monzon , Katrina H. Nguyen
发明人： Henry A. Blauvelt , David W. Vernooy , Joel S. Paslaski , Charles I. Grosjean , Hao Lee , Franklin G. Monzon , Katrina H. Nguyen
IPC分类号： G02B6/00 , G02B6/12 , G02B6/13
CPC分类号： H01S5/026 , G02B6/132 , G02B6/4204 , H01S5/02248 , H01S5/02284 , H01S5/141
摘要： An optical apparatus comprises a semiconductor optical device waveguide formed on a semiconductor substrate, and an integrated end-coupled waveguide formed on the semiconductor substrate. The integrated waveguide may comprise materials differing from those of the device waveguide and the substrate. Spatially selective material processing may be employed for first forming the optical device waveguide on the substrate, and for subsequently depositing and forming the integrated end-coupled waveguide on the substrate. Spatially selective material processing enables accurate spatial mode matching and transverse alignment of the waveguides, and multiple device waveguides and corresponding integrated end-coupled waveguides may be fabricated concurrently on a common substrate on a wafer scale. The integrated end-coupled waveguide may be adapted for fulfilling one or more functions, and the device waveguide and/or integrated waveguide and/or spatially selective material processing steps may be adapted in a variety of ways for achieving the needed/desired degree of end-coupling.
摘要翻译：光学装置包括形成在半导体衬底上的半导体光学器件波导和形成在半导体衬底上的集成端耦合波导。集成波导可以包括与器件波导和衬底不同的材料。可以采用空间选择性材料处理来首先在衬底上形成光学器件波导，并且用于随后在衬底上沉积和形成集成的端部耦合波导。空间选择性材料处理可实现波导的精确的空间模式匹配和横向对准，并且多个器件波导和相应的集成端耦合波导可以在晶片规模上的公共衬底上同时制造。集成端耦合波导可以适于实现一个或多个功能，并且器件波导和/或集成波导和/或空间选择性材料处理步骤可以以各种方式进行调整，以实现所需/期望的结束度 -耦合。

4. 发明授权

US07817882B2 Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof 有权
标题翻译：具有集成端耦合波导的蚀刻面半导体光学部件及其制造和使用方法
公开(公告)号：US07817882B2
公开(公告)日：2010-10-19
申请号：US12541916
申请日：2009-08-15
申请人： Henry A. Blauvlet , David W. Vernooy , Joel S. Paslaski , Charles I. Grosjean , Hao Lee , Franklin G. Monzon , Katrina H. Nguyen
发明人： Henry A. Blauvlet , David W. Vernooy , Joel S. Paslaski , Charles I. Grosjean , Hao Lee , Franklin G. Monzon , Katrina H. Nguyen
IPC分类号： G02B6/00 , G02B6/12 , G02B6/13
CPC分类号： H01S5/026 , G02B6/132 , G02B6/4204 , H01S5/02248 , H01S5/02284 , H01S5/141
摘要： An optical apparatus comprises: a semiconductor substrate; a semiconductor optical device integrally formed on the substrate and having an off-normal device end face; and a low-index planar optical waveguide integrally formed on the semiconductor substrate at the device end face. The device and waveguide are non-collinear, and the waveguide is end-coupled at its proximal end to the optical device by refraction at the device end face. The apparatus further includes a reflective coating between the waveguide and substrate, an etched end face curved in the horizontal dimension, or an etched end face with a lower portion that protrudes beneath a proximal portion of the waveguide.
摘要翻译：光学装置包括：半导体衬底; 半导体光学器件整体地形成在基板上并具有非正常的器件端面; 以及在器件端面上一体地形成在半导体衬底上的低折射率平面光波导。器件和波导是非共线的，并且波导通过在器件端面处的折射在其近端端接到光学器件。该装置还包括在波导和基板之间的反射涂层，在水平尺寸上弯曲的蚀刻端面，或具有在波导的近端部分下方突出的下部的蚀刻端面。

5. 发明授权

US07885499B2 Optical junction apparatus and methods employing optical power transverse-transfer 有权
标题翻译：光学接合装置及采用光功率横向传输的方法
公开(公告)号：US07885499B2
公开(公告)日：2011-02-08
申请号：US12860307
申请日：2010-08-20
申请人： Henry A. Blauvelt , Kerry J. Vahala , David W. Vernooy , Joel S. Paslaski
发明人： Henry A. Blauvelt , Kerry J. Vahala , David W. Vernooy , Joel S. Paslaski
IPC分类号： G02B6/26
CPC分类号： G02B6/2852 , G02B6/12002 , G02B6/12007 , G02B6/1228 , G02B6/125 , G02B6/2804 , G02B6/2821 , G02B6/30 , G02B6/305 , G02B6/42 , G02B6/4204 , G02B6/423 , G02B6/4232 , G02B6/4246 , G02B2006/12119 , G02B2006/12195 , Y10T29/49826
摘要： A method comprises: (i) forming a first optical waveguide on a first substrate; (ii) forming a second, structurally discrete optical waveguide on a structurally discrete second substrate; (iii) assembling the second substrate or second optical waveguide with the first substrate or first optical waveguide so that the first and second optical waveguides are positioned between the first and second substrates and are relatively positioned for transferring the optical signal therebetween via optical transverse coupling; and (iv) arranging the first or second optical waveguide for transferring the optical signal therebetween via substantially adiabatic optical transverse coupling with the first and second waveguides so positioned.
摘要翻译：一种方法包括：（i）在第一衬底上形成第一光波导; （ii）在结构上离散的第二基板上形成第二结构分立的光波导; （iii）将第二基板或第二光波导与第一基板或第一光波导组装，使得第一和第二光波导位于第一和第二基板之间，并且被相对定位以通过光学横向耦合传递其间的光信号; 以及（iv）将第一或第二光波导布置在其间通过基本上绝热的光学横向耦合传送光信号，并使第一和第二波导如此定位。

6. 发明授权

US07366379B2 Optical component for free-space optical propagation between waveguides 失效
标题翻译：用于波导之间的自由空间光学传播的光学部件
公开(公告)号：US07366379B2
公开(公告)日：2008-04-29
申请号：US11564144
申请日：2006-11-28
申请人： Henry A. Blauvelt , Joel S. Paslaski , David W. Vernooy
发明人： Henry A. Blauvelt , Joel S. Paslaski , David W. Vernooy
IPC分类号： G02B6/26
CPC分类号： G02B6/4228 , G02B6/12007 , G02B6/266 , G02B6/2804 , G02B6/29352 , G02B6/30 , G02B6/3636 , G02B6/3652 , G02B6/4204 , G02B6/4224 , G02B2006/12147 , G02B2006/12164 , G02B2006/12166
摘要： An optical component may comprise a horizontal member with two side walls and a substantially transparent end wall protruding from the horizontal member. The end wall, side walls and horizontal member may partially enclose an interior volume, and optical functionality is imparted in any suitable manner on at least a portion of the end wall. An optical assembly may comprise such an optical component mounted on a waveguide substrate along with a planar waveguide and a second waveguide, which are end-coupled by either reflection from the optical component end wall or transmission through the optical component end wall. An end portion of a planar waveguide may be received within the interior volume of the mounted component. Proper positioning of the optical component relative to the waveguides may be facilitated by alignment surfaces and/or alignment marks on the component and/or waveguide substrate.
摘要翻译：光学部件可以包括具有两个侧壁的水平部件和从水平部件突出的基本上透明的端壁。端壁，侧壁和水平构件可以部分地包围内部体积，并且光学功能性以任何合适的方式施加在端壁的至少一部分上。光学组件可以包括安装在波导衬底上的平面波导和第二波导的这种光学部件，其通过来自光学部件端壁的反射或通过光学部件端壁的透射件端接耦合。平面波导的端部可以被容纳在安装部件的内部空间内。光学部件相对于波导的适当定位可以通过部件和/或波导基板上的对准表面和/或对准标记来促进。

7. 发明授权

US07227880B2 Grating-stabilized semiconductor laser 有权
标题翻译：光栅稳定半导体激光器
公开(公告)号：US07227880B2
公开(公告)日：2007-06-05
申请号：US11140022
申请日：2005-05-26
申请人： Henry A. Blauvelt , David W. Vernooy , Joel S. Paslaski
发明人： Henry A. Blauvelt , David W. Vernooy , Joel S. Paslaski
IPC分类号： H01S5/00 , H01S3/03 , H01S3/08
CPC分类号： H01S5/125 , H01S5/026 , H01S5/0654 , H01S5/0656 , H01S5/0687 , H01S5/1032 , H01S5/1092 , H01S5/1096 , H01S5/12 , H01S5/1209 , H01S5/14 , H01S5/141
摘要： A grating-stabilized semiconductor laser comprises a semiconductor laser gain medium, an integrated low-index waveguide, and a waveguide grating segment providing optical feedback for laser oscillation. The laser may be adapted for multi-mode or single-mode operation. A multiple-mode laser may oscillate with reduced power and/or wavelength fluctuations associated with longitudinal mode wavelength shifts, relative to Fabry-Perot lasers lacking gratings. A single-mode laser may include a compensator, wavelength reference, and detector for generating an error signal, and a feedback mechanism for controlling the compensator for maintaining the laser wavelength locked to the reference. The laser may include means for altering, enhancing, tuning, and/or stabilizing the waveguide grating reflectivity spectral profile. The laser may be adapted for optical transverse-coupling to another waveguide.
摘要翻译：光栅稳定的半导体激光器包括半导体激光增益介质，集成低折射率波导和提供用于激光振荡的光反馈的波导光栅段。激光器可适用于多模式或单模式操作。相对于缺乏光栅的法布里 - 珀罗（Fabry-Perot）激光器，多模激光器可以以相对于纵向模式波长偏移的功率和/或波长波动降低而振荡。单模激光器可以包括用于产生误差信号的补偿器，波长参考和检测器，以及用于控制补偿器的反馈机构，用于保持锁定到参考的激光波长。激光器可以包括用于改变，增强，调谐和/或稳定波导光栅反射率光谱分布的装置。激光器可适用于与另一个波导的光学横向耦合。

8. 发明授权

US07158702B2 Optical junction apparatus and methods employing optical power transverse-transfer 有权
标题翻译：光学接合装置及采用光功率横向传输的方法
公开(公告)号：US07158702B2
公开(公告)日：2007-01-02
申请号：US11333933
申请日：2006-01-17
申请人： Henry A. Blauvelt , Kerry J. Vahala , David W. Vernooy , Joel S. Paslaski
发明人： Henry A. Blauvelt , Kerry J. Vahala , David W. Vernooy , Joel S. Paslaski
IPC分类号： G02B6/26 , G02B6/30
CPC分类号： G02B6/2852 , G02B6/12002 , G02B6/12007 , G02B6/1228 , G02B6/125 , G02B6/2804 , G02B6/2821 , G02B6/30 , G02B6/305 , G02B6/42 , G02B6/4204 , G02B6/423 , G02B6/4232 , G02B6/4246 , G02B2006/12119 , G02B2006/12195 , Y10T29/49826
摘要： Discrete first and second optical transmission subunits are formed each having a corresponding transmission optical waveguide with a corresponding optical junction region. The first transmission optical waveguide is a planar optical waveguide formed on a substrate. The first transmission optical waveguide or the second transmission optical waveguide is adapted for enabling substantially adiabatic transverse-transfer of optical power between the optical waveguides at the respective optical junction regions. The first and second optical transmission subunits are assembled together to form an optical apparatus.
摘要翻译：形成分离的第一和第二光传输子单元，每个具有对应的具有对应的光学结区域的透射光波导。第一透射光波导是形成在基板上的平面光波导。第一透射光波导或第二透射光波导适于在相应的光学接合区域处实现光波导之间的光功率的基本上绝热的横向传输。第一和第二光传输子单元组装在一起以形成光学装置。

9. 发明授权

US07136564B2 Waveguides assembled for transverse-transfer of optical power 有权
公开(公告)号：US07136564B2
公开(公告)日：2006-11-14
申请号：US11298264
申请日：2005-12-09
申请人： Henry A. Blauvelt , David W. Vernooy , Joel S. Paslaski , Guido Hunziker
发明人： Henry A. Blauvelt , David W. Vernooy , Joel S. Paslaski , Guido Hunziker
IPC分类号： G02B6/10
CPC分类号： G02B6/1223 , B82Y20/00 , G02B6/12002 , G02B6/122 , G02B6/125 , G02B2006/12147
摘要： Formation of a substantially flat upper cladding surface over a waveguide core facilitates transverse-coupling between assembled waveguides, and/or provides mechanical alignment and/or support. An embedding medium may be employed for securing optical assemblies and protecting optical surfaces thereof. Structural elements fabricated with a low-profile core may be employed for providing mechanical alignment and/or support, aiding in the encapsulation process, and so forth.

10. 发明授权

US07050681B2 Optical junction apparatus and methods employing optical power transverse-transfer 有权
公开(公告)号：US07050681B2
公开(公告)日：2006-05-23
申请号：US11138841
申请日：2005-05-25
申请人： Henry A. Blauvelt , Kerry J. Vahala , David W. Vernooy , Joel S. Paslaski
发明人： Henry A. Blauvelt , Kerry J. Vahala , David W. Vernooy , Joel S. Paslaski
IPC分类号： G02B6/26
CPC分类号： G02B6/2852 , G02B6/12002 , G02B6/12007 , G02B6/1228 , G02B6/125 , G02B6/2804 , G02B6/2821 , G02B6/30 , G02B6/305 , G02B6/42 , G02B6/4204 , G02B6/423 , G02B6/4232 , G02B6/4246 , G02B2006/12119 , G02B2006/12195 , Y10T29/49826
摘要： An optical apparatus comprises an optical device fabricated on a substrate, an external-transfer optical waveguide fabricated on the substrate and/or on the optical device, and a transmission optical waveguide. The optical device and/or the external-transfer waveguide are adapted for and positioned for transfer of optical power therebetween (end-transfer or transverse-transfer). The external-transfer waveguide and/or the transmission waveguide are adapted for transverse-transfer of optical power therebetween (mode-interference-coupled or adiabatic). The transmission waveguide is initially provided as a component mechanically separate from the substrate, device, and external-transfer waveguide. Assembly of the transmission waveguide with the substrate, device, and/or external-transfer waveguide results in relative positioning of the external-transfer waveguide and the transmission waveguide for enabling transverse-transfer of optical power therebetween. Optical power transfer between the device and the transmission waveguide through the external-transfer waveguide is thereby enabled. The transmission waveguide may preferably comprise a planar waveguide on a waveguide substrate.

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