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    • 1. 发明授权
    • Method and apparatus for vacuum deposition plating
    • 真空沉积电镀方法和装置
    • US4674443A
    • 1987-06-23
    • US855793
    • 1986-04-24
    • Heizaburo FurukawaKanji WakeYoshio ShimozatoKenichi YanagiMitsuo KatohTetsuyoshi WadaNorio TsukijiTakuya AikoToshiharu KittakaYasuji Nakanishi
    • Heizaburo FurukawaKanji WakeYoshio ShimozatoKenichi YanagiMitsuo KatohTetsuyoshi WadaNorio TsukijiTakuya AikoToshiharu KittakaYasuji Nakanishi
    • C21D9/56C23C14/56C23C13/08
    • C21D9/561C21D9/565C23C14/562
    • A vacuum deposition plating apparatus having an inlet-side vacuum sealing device provided in front of a vacuum deposition plating chamber, an inlet-side inactive gas replacement chamber provided between the inlet-side vacuum sealing device and an annealing furnace, an outlet-side vacuum sealing device provided in the rear of the vacuum deposition plating chamber, an outlet-side inactive gas replacement chamber provided between the outlet-side vacuum sealing device and the atmosphere, and an inactive gas circulating/purifying device for circulating an inactive gas from vacuum chambers of both the vacuum sealing devices to atmospheric pressure chambers of both the vacuum sealing devices and for removing water, oil and oxygen from the inactive gas; a pressure gauge provided on the annealing furnace; a pressure gauge, a control valve, an automatic valve, a hydrogen concentration detector and a discharge valve provided on the inlet-side inactive gas replacement chamber; a pressure gauge and an automatic valve provided on the outlet-side inactive gas replacement chamber; and an automatic valve connecting to an inactive gas tank for emergency provided on the atmospheric pressure chambers of both the vacuum sealing devices.
    • 一种真空沉积电镀装置,其具有设置在真空沉积电镀室前面的入口侧真空密封装置,设置在入口侧真空密封装置和退火炉之间的入口侧非活性气体置换室,出口侧真空 密封装置,设置在真空沉积电镀室的后部,设置在出口侧真空密封装置和大气之间的出口侧非活性气体置换室,以及用于使来自真空室的惰性气体循环的惰性气体循环/净化装置 两个真空密封装置与两个真空密封装置的大气压室和从惰性气体中除去水,油和氧的两个; 设置在退火炉上的压力计; 压力计,控制阀,自动阀,氢浓度检测器和设置在入口侧非活性气体置换室上的排出阀; 设置在出口侧非活性气体置换室上的压力计和自动阀; 以及连接到两个真空密封装置的大气压室上的用于紧急的惰性气体罐的自动阀。
    • 8. 发明授权
    • Vacuum vapor deposition system
    • 真空蒸镀系统
    • US4552092A
    • 1985-11-12
    • US652676
    • 1984-09-19
    • Kenichi YanagiToshio TaguchiTetsuyoshi WadaHeisaburo FurukawaKanji Wake
    • Kenichi YanagiToshio TaguchiTetsuyoshi WadaHeisaburo FurukawaKanji Wake
    • C23C14/56C23C14/24
    • C23C14/562
    • A vacuum vapor deposition system including a high-vacuum vapor deposition chamber provided with a rotary cell around which band steel is wound as it is passed through the chamber. A crucible for molten metal has a hood for guiding vapor of said metal to a vapor deposition port opposed to the rotary cell, and arcuate covers connected to the hood at the entrance and exit positions of the band steel. The vapor deposition port is spaced slightly from the rotary cell so that the covers will not come into contact with the band steel. A heater is provided for heating the surface of the rotary cell up to a temperature equal to or higher than a reevaporation temperature of the metal under a vapor pressure of the vapor of the metal in the proximity of the rotary cell so that the metal will not be deposited onto the opposite end portions of the rotary cell which are not covered by the band steel. A heater is also provided for heating the surfaces of the hood and the covers up to a temperature equal to or higher than such reevaporation temperature of the metal so that metal will not be deposited onto the hood and the covers.
    • 一种真空蒸镀系统,其特征在于,具有高真空蒸镀室,该真空蒸镀室设置有旋转槽,当所述旋转槽通过所述室时,带钢被卷绕。 用于熔融金属的坩埚具有用于将所述金属的蒸气引导到与旋转单元相对的气相沉积端口的罩,以及在带钢的入口和出口位置连接到罩的弓形盖。 气相沉积端口与旋转单元稍微间隔开,使得盖不会与带钢接触。 提供一种加热器,用于在旋转电池附近的金属蒸汽的蒸汽压力下,将旋转电池的表面加热至等于或高于金属的蒸发温度的温度,使金属不会 沉积在不被带钢覆盖的旋转电池的相对端部上。 还提供加热器,用于将罩和盖的表面加热到等于或高于金属的这种再蒸发温度的温度,使得金属不会沉积到罩和盖上。