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1. 发明授权

US06706090B2 Method for recovering and/or separating sulfur oxyfluorides from gas mixtures 失效
标题翻译：从气体混合物中回收和/或分离硫氧氟化物的方法
公开(公告)号：US06706090B2
公开(公告)日：2004-03-16
申请号：US10213429
申请日：2002-08-07
申请人： Heinz-Joachim Belt , Michael Pittroff , Matthias Rieland , Thomas Schwarze
发明人： Heinz-Joachim Belt , Michael Pittroff , Matthias Rieland , Thomas Schwarze
IPC分类号： B01D5322
CPC分类号： B01D53/04 , B01D53/22 , B01D2253/108 , B01D2253/304 , B01D2253/308 , B01D2256/26 , B01D2257/204 , B01D2257/30
摘要： A method for the recovery or separation of sulfur oxyfluorides from gas mixtures, in which the gas mixture passes through at least one adsorption stage or membrane stage containing or consisting of zeolites with a modulus >10. The sulfur oxyfluorides fixed to the adsorbent may be made available for use after desorption. The sulfur oxyfluorides enriched through the membrane can be re-used directly.
摘要翻译：用于从气体混合物中回收或分离硫氧氟酸盐的方法，其中气体混合物通过至少一个含有或多于10个模量的沸石的吸附阶段或膜段。固定在吸附剂上的硫氧氟化物可以在解吸后使其可用。通过膜富集的氟氧氟化硫可以直接重新使用。

2. 发明授权

US06454837B1 Separation of gases containing SF6 失效
标题翻译：含SF6的气体分离
公开(公告)号：US06454837B1
公开(公告)日：2002-09-24
申请号：US09763185
申请日：2001-02-20
申请人： Michael Pittroff , Thomas Schwarze , Heinz-Joachim Belt , Pierre Barthélemy
发明人： Michael Pittroff , Thomas Schwarze , Heinz-Joachim Belt , Pierre Barthélemy
IPC分类号： B01D5304
CPC分类号： B01D53/02 , B01D53/229 , B01D53/685 , B01D2253/108 , B01D2253/1085 , B01D2253/308 , B01D2257/102 , B01D2257/302 , B01D2259/402 , Y02C20/30
摘要： Gas mixtures of SF6 and N2, which have been used, for example, as an insulating filler gas for underground cables, for insulating-gas window panes or as a filler gas for car tires and SF6/air mixtures which have been used as a protective gas when casting magnesium can be separated if they are contacted with hydrophobic zeolites of a certain pore size as selective adsorption agent for sulfur hexafluoride. For a relatively high SF6 concentration, the mixture is preferably first subjected to a membrane separation process and the permeate is contacted with the adsorption agent. The invention also relates to an apparatus for carrying out the process. The process may also be used for separating SF6 from exhaust gases.
摘要翻译： SF6和N2的气体混合物已被用作例如用于地下电缆的绝缘填充气体，绝缘气体窗玻璃或用作汽车轮胎和SF6 /空气混合物的填充气体，其已被用作保护如果铸造镁的气体与一定孔径的疏水性沸石接触，则可分离出气体作为六氟化硫的选择性吸附剂。对于相对高的SF 6浓度，优选首先对该混合物进行膜分离处理，并使渗透物与吸附剂接触。本发明还涉及一种用于执行该过程的装置。该方法也可用于将SF6与废气分离。

3. 发明授权

US06723153B2 Isolation of SF6 from insulating gases in gas-insulated lines 失效
标题翻译：在气体绝缘线路中隔离SF6绝缘气体
公开(公告)号：US06723153B2
公开(公告)日：2004-04-20
申请号：US09988820
申请日：2001-11-20
申请人： Michael Pittroff , Thomas Schwarze , Heinz-Joachim Belt
发明人： Michael Pittroff , Thomas Schwarze , Heinz-Joachim Belt
IPC分类号： B01D5322
CPC分类号： C01B17/453 , B01D53/22 , C01B21/0438 , C01B2210/0043 , H01B3/16 , Y02P20/151
摘要： Gas mixtures of SF6 and N2 which have been used as an insulating filler gas for underground cables can be separated by use of a membrane separation in order to recover the SF6.
摘要翻译：已经用作地下电缆绝缘填料气体的SF6和N2的气体混合物可以通过使用膜分离来分离，以便回收SF6。

4. 发明申请

US20050183573A1 Method for separating gas mixtures 审中-公开
标题翻译：分离气体混合物的方法
公开(公告)号：US20050183573A1
公开(公告)日：2005-08-25
申请号：US11041243
申请日：2005-01-25
申请人： Heinz-Joachim Belt , Michael Pitroff , Thomas Schwarze
发明人： Heinz-Joachim Belt , Michael Pitroff , Thomas Schwarze
IPC分类号： B01D53/02 , B01D53/04 , B01D53/22
CPC分类号： B01D53/02 , B01D53/04 , B01D53/229 , B01D2253/108 , B01D2253/1085 , B01D2253/30 , B01D2253/302 , B01D2253/304 , B01D2253/308 , B01D2256/24 , B01D2256/26 , B01D2257/2066 , Y02C20/30
摘要： A method for separating gaseous mixtures from underground cables or gas-insulated circuits in which the gaseous mixtures, which contain partially fluorinated and/or perfluorinated hydrocarbons and inert gases, are brought into contact with hydrophobic zeolites in at least one adsorption step so that the fluorinated hydrocarbons are adsorbed.
摘要翻译：一种从地下电缆或气体绝缘回路分离气态混合物的方法，其中含有部分氟化和/或全氟化烃和惰性气体的气态混合物在至少一个吸附步骤中与疏水性沸石接触，使得氟化烃被吸附。

5. 发明申请

US20090068844A1 Etching Process 审中-公开
标题翻译：蚀刻工艺
公开(公告)号：US20090068844A1
公开(公告)日：2009-03-12
申请号：US12296139
申请日：2007-04-06
申请人： Anja Pischtiak , Thomas Schwarze , Michael Pittroff
发明人： Anja Pischtiak , Thomas Schwarze , Michael Pittroff
IPC分类号： H01L21/3065 , B08B5/00 , B08B7/00 , H01L21/306 , C11D3/02 , C23F1/08 , C09K13/00
CPC分类号： C23F4/00 , B08B7/00 , B08B7/0035 , C23C16/4405 , H01J37/32431 , H01L21/31116 , H01L21/32136
摘要： Mixtures of fluorine and inert gases like nitrogen and/or argon can be used for etching of semiconductors, solar panels and flat panels (TFTs and LCDs), and for cleaning of semiconductor surfaces and plasma chambers. Preferably, fluorine is comprised in an amount of 15 to 25 vol.-% in binary mixtures. The gas mixtures can be used as substitute or drop-in for respective mixtures comprising NF3 and permit a very flexible operation of plasma apparatus. For example, apparatus tuned for NF3/Ar mixtures can be operated without further tuning using fluorine and argon, optionally together with nitrogen. The fluorine content is preferably in the range of 1 to 5 vol.-%, if ternary mixtures of fluorine, nitrogen and argon are used.
摘要翻译：氟和惰性气体如氮气和/或氩气的混合物可用于半导体，太阳能电池板和平板（TFT和LCD）的蚀刻以及半导体表面和等离子体室的清洗。优选地，氟以二元混合物计含量为15至25体积％。气体混合物可以用作包含NF 3的相应混合物的替代或滴加，并允许等离子体装置的非常灵活的操作。例如，调节NF3 / Ar混合物的设备可以在不进一步调节的情况下使用氟和氩，任选与氮一起进行操作。如果使用氟，氮和氩的三元混合物，氟含量优选在1至5体积％的范围内。

6. 发明申请

US20090241432A1 ABRASIVE MEANS, USE OF ALKALI METAL FLUOROALUMINATES OR ALKALINE EARTH FLUOROALUMINATES FOR STABILIZING POLYMERS AGAINST CHANGE IN COLOR BY THE ACTION OF HEAT, AND MIXTURE CONSISTING OF POTASSIUM TETRAFLUOROALUMINATE AND DIPOTASSIUM PENTAFLUOROALUMINATE AND OF OTHER ABRASIVE-ACTIVE FILLERS 审中-公开
标题翻译：研磨方法，使用碱金属氟代铝酸盐或碱土金属氟化铝来稳定聚合物，通过热处理和颜料混合形成四氯氟铝酸钠和二氧化钛和其他活性填料的混合物
公开(公告)号：US20090241432A1
公开(公告)日：2009-10-01
申请号：US11909395
申请日：2006-03-21
申请人： Axel Pakusch , Anja Pischtiak , Thomas Schwarze
发明人： Axel Pakusch , Anja Pischtiak , Thomas Schwarze
IPC分类号： C09K3/14
CPC分类号： B24D3/004 , B24D3/342 , B24D11/00
摘要： The invention relates to an abrasive means with abrasive-active fillers. The abrasive means is comprised, in general, of a support, abrasive grit and of a binder system. In order to improve the abrasive action and the serviceable life of the abrasive means, the binding agent system contains synthetic alkali metal fluoroaluminates, and/or alkaline earth metal fluoroaluminates, in particular, alkali metal tetrafluoroaluminate, preferably potassium tetrafluoroaluminate, together with at least one additional abrasive-active filler.
摘要翻译：本发明涉及一种具有磨料活性填料的研磨装置。研磨装置通常由支撑体，磨料砂砾和粘合剂体系组成。为了改善研磨剂的研磨作用和使用寿命，粘合剂体系包含合成的碱金属氟铝酸盐和/或碱土金属氟铝酸盐，特别是碱金属四氟铝酸盐，优选四氟铝酸钾，以及至少一种额外的磨料活性填料。

7. 发明申请

US20130023126A1 Method for the manufacture of electronic devices with purified fluorine 审中-公开
标题翻译：用纯化氟制造电子器件的方法
公开(公告)号：US20130023126A1
公开(公告)日：2013-01-24
申请号：US13638658
申请日：2011-04-07
申请人： Christoph Sommer , Oliviero Diana , Johannes Eicher , Ercan Uenveren , Stefan Mross , Holger Pernice , Peter M. Predikant , Thomas Schwarze , Reiner Fischer
发明人： Christoph Sommer , Oliviero Diana , Johannes Eicher , Ercan Uenveren , Stefan Mross , Holger Pernice , Peter M. Predikant , Thomas Schwarze , Reiner Fischer
IPC分类号： H01L21/306
CPC分类号： B01D53/002 , B01D53/02 , B01D53/685 , B01D2251/304 , B01D2251/60 , B01D2253/112 , B01D2256/26 , B01D2257/2047 , B01D2258/0216 , C23C16/4405 , C25B1/245 , Y02C20/30
摘要： Elemental fluorine is used as etching agent for the manufacture of electronic devices, especially semiconductor devices, micro-electromechanical devices, thin film transistors, flat panel displays and solar panels, and as chamber cleaning agent mainly for plasma-enhanced chemical vapor deposition (PECVD) apparatus. For this purpose, fluorine often is produced on-site. The invention provides a process for the manufacture of electronic devices wherein fluorine is produced on site and is purified from HF by a low temperature treatment. A pressure of between 1.5 and 20 Bars absolute is especially advantageous.
摘要翻译：元素氟用作制造电子器件，特别是半导体器件，微机电器件，薄膜晶体管，平板显示器和太阳能电池板的蚀刻剂，以及主要用于等离子体增强化学气相沉积（PECVD）的腔室清洁剂，仪器。为此，氟通常在现场生产。本发明提供一种制造电子器件的方法，其中氟在现场产生，并通过低温处理从HF中纯化。 1.5至20巴之间的绝对压力是特别有利的。

8. 发明授权

US6105850A Aluminum brazing method which avoids waste water 失效
标题翻译：铝钎焊法避免废水
公开(公告)号：US6105850A
公开(公告)日：2000-08-22
申请号：US186660
申请日：1998-11-06
申请人： Daniel Clement Lauzon , Thomas Schwarze
发明人： Daniel Clement Lauzon , Thomas Schwarze
IPC分类号： B23K1/19 , B23K3/00 , B23K35/36 , B23K35/363 , C23C2/12 , B23K1/20
CPC分类号： B23K35/3605 , B23K1/19 , B23K2203/10
摘要： A method of avoiding generation of waste water while brazing components made of aluminium or an aluminium alloy using a flux, especially a flux composed of an aqueous suspension of potassium fluoroaluminate. Since used suspension is replaced with fresh suspension after a given period of time and the apparatus regularly have to be cleaned, waste water is produced which contains flux, e.g. potassium fluoroaluminate. In the past, such waste water has been discharged into the environment. It has now been discovered that such waste water can be recycled to the brazing process after separation of the flux. In this manner, the production of waste water can be largely avoided. Since surfactants are frequently used, and these are likewise recirculated, a corresponding saving in terms of surfactant is possible. Furthermore, the environment is protected correspondingly.
摘要翻译：一种避免产生废水的方法，同时使用助熔剂特别是由氟铝酸钾的水悬浮液组成的焊剂钎焊铝或铝合金制成的组分。由于在给定的时间段内使用的悬浮液被新鲜的悬浮液代替，并且该装置经常需要清洁，因此产生含有助熔剂的废水，氟铝酸钾过去这种废水已经排入环境。现在已经发现，在分离助熔剂之后，这种废水可以再循环到钎焊过程中。以这种方式，可以大大地避免废水的生产。由于表面活性剂经常被使用，并且它们同样被再循环，因此表面活性剂的相应的节省是可能的。此外，相应地保护环境。

9. 发明申请

US20130112687A1 Fluorine container 审中-公开
标题翻译：氟容器
公开(公告)号：US20130112687A1
公开(公告)日：2013-05-09
申请号：US13808322
申请日：2011-06-30
申请人： Marcello Riva , Stefan Mross , Thomas Schwarze
发明人： Marcello Riva , Stefan Mross , Thomas Schwarze
IPC分类号： B65D88/02 , B65D88/06 , B65D25/14
CPC分类号： B65D88/027 , B65D25/14 , B65D88/06 , C01B7/20 , F17C13/083 , F17C2205/0107 , F17C2205/0111 , F17C2205/0134 , F17C2221/03 , F17C2270/0171 , F17C2270/0518
摘要： A tube trailer containing a gas comprising from 35 to 92.5 vol % of molecular fluorine. A semiconductor manufacturing plant having a gas supply system wherein such tube trailer is connected to the gas supply system of the semiconductor manufacturing plant. A method for supplying a gas comprising using such tube trailer to transport gas from a gas manufacturing site to a user site.
摘要翻译：一种含有包含35-92.5体积％分子氟的气体的管拖车。一种具有气体供应系统的半导体制造工厂，其中这种管式拖车连接到半导体制造工厂的气体供应系统。一种用于供应气体的方法，包括使用这种管状拖车将气体从气体制造现场运送到用户现场。

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