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1. 发明申请

US20130023126A1 Method for the manufacture of electronic devices with purified fluorine 审中-公开
标题翻译：用纯化氟制造电子器件的方法
公开(公告)号：US20130023126A1
公开(公告)日：2013-01-24
申请号：US13638658
申请日：2011-04-07
申请人： Christoph Sommer , Oliviero Diana , Johannes Eicher , Ercan Uenveren , Stefan Mross , Holger Pernice , Peter M. Predikant , Thomas Schwarze , Reiner Fischer
发明人： Christoph Sommer , Oliviero Diana , Johannes Eicher , Ercan Uenveren , Stefan Mross , Holger Pernice , Peter M. Predikant , Thomas Schwarze , Reiner Fischer
IPC分类号： H01L21/306
CPC分类号： B01D53/002 , B01D53/02 , B01D53/685 , B01D2251/304 , B01D2251/60 , B01D2253/112 , B01D2256/26 , B01D2257/2047 , B01D2258/0216 , C23C16/4405 , C25B1/245 , Y02C20/30
摘要： Elemental fluorine is used as etching agent for the manufacture of electronic devices, especially semiconductor devices, micro-electromechanical devices, thin film transistors, flat panel displays and solar panels, and as chamber cleaning agent mainly for plasma-enhanced chemical vapor deposition (PECVD) apparatus. For this purpose, fluorine often is produced on-site. The invention provides a process for the manufacture of electronic devices wherein fluorine is produced on site and is purified from HF by a low temperature treatment. A pressure of between 1.5 and 20 Bars absolute is especially advantageous.
摘要翻译：元素氟用作制造电子器件，特别是半导体器件，微机电器件，薄膜晶体管，平板显示器和太阳能电池板的蚀刻剂，以及主要用于等离子体增强化学气相沉积（PECVD）的腔室清洁剂，仪器。为此，氟通常在现场生产。本发明提供一种制造电子器件的方法，其中氟在现场产生，并通过低温处理从HF中纯化。 1.5至20巴之间的绝对压力是特别有利的。

2. 发明申请

US20130130505A1 Method for the purification of fluorine 有权
标题翻译：纯化氟的方法
公开(公告)号：US20130130505A1
公开(公告)日：2013-05-23
申请号：US13814033
申请日：2011-08-03
申请人： Oliviero Diana , Peter M. Predikant , Philippe Morelle , Maurizio Paganin , Christoph Sommer
发明人： Oliviero Diana , Peter M. Predikant , Philippe Morelle , Maurizio Paganin , Christoph Sommer
IPC分类号： C01B7/20 , H01L21/02 , H01L21/306
CPC分类号： C01B7/20 , C01B7/197 , H01L21/02057 , H01L21/30604
摘要： Elemental fluorine is often manufactured electrochemically from a solution of KF in hydrogen fluoride and contains varying amounts of entrained electrolyte salt in solid form as impurity. The invention concerns a process for the purification of such impure elemental fluorine by contact with liquid hydrogen fluoride, e.g., in a jet gas scrubber or by bubbling the raw fluorine through liquid hydrogen fluoride. After this purification step, any entrained hydrogen fluoride is removed by adsorption, condensing it out or both. After passing through a filter with very small pores, the purified fluorine is especially suited for the semiconductor industry as etching gas or as chamber cleaning gas in the manufacture of semiconductors, TFTs and solar cells, or for the manufacture of micro-electromechanical systems (“MEMS”).
摘要翻译：元素氟通常由KF在氟化氢中的溶液电化学制造，并且含有不同量的作为杂质的固体形式的夹带电解质盐。本发明涉及通过与液体氟化氢接触来净化这种不纯的元素氟的方法，例如在喷气气体洗涤器中或通过使氟氟化钠通过液体氟化氢鼓泡。在该纯化步骤之后，通过吸附除去夹带的氟化氢，将其冷凝出来或者两者。在通过具有非常小的孔的过滤器之后，纯化的氟特别适合作为半导体，TFT和太阳能电池的制造中的蚀刻气体或室清洁气体的半导体工业，或者用于制造微机电系统（“ MEMS“）。

3. 发明授权

US08821821B2 Method for the purification of fluorine 有权
标题翻译：纯化氟的方法
公开(公告)号：US08821821B2
公开(公告)日：2014-09-02
申请号：US13814033
申请日：2011-08-03
申请人： Oliviero Diana , Peter M. Predikant , Philippe Morelle , Maurizio Paganin , Christoph Sommer
发明人： Oliviero Diana , Peter M. Predikant , Philippe Morelle , Maurizio Paganin , Christoph Sommer
IPC分类号： B01D53/56 , C01B7/00 , C01B7/19 , H01L21/306 , C01B7/20 , H01L21/02
CPC分类号： C01B7/20 , C01B7/197 , H01L21/02057 , H01L21/30604
摘要： Elemental fluorine is often manufactured electrochemically from a solution of KF in hydrogen fluoride and contains varying amounts of entrained electrolyte salt in solid form as impurity. The invention concerns a process for the purification of such impure elemental fluorine by contact with liquid hydrogen fluoride, e.g., in a jet gas scrubber or by bubbling the raw fluorine through liquid hydrogen fluoride. After this purification step, any entrained hydrogen fluoride is removed by adsorption, condensing it out or both. After passing through a filter with very small pores, the purified fluorine is especially suited for the semiconductor industry as etching gas or as chamber cleaning gas in the manufacture of semiconductors, TFTs and solar cells, or for the manufacture of micro-electromechanical systems (“MEMS”).
摘要翻译：元素氟通常由KF在氟化氢中的溶液电化学制造，并且含有不同量的作为杂质的固体形式的夹带电解质盐。本发明涉及通过与液体氟化氢接触来净化这种不纯的元素氟的方法，例如在喷气气体洗涤器中或通过使氟氟化钠通过液体氟化氢鼓泡。在该纯化步骤之后，通过吸附除去夹带的氟化氢，将其冷凝出来或者两者。在通过具有非常小的孔的过滤器之后，纯化的氟特别适合作为半导体，TFT和太阳能电池的制造中的蚀刻气体或室清洁气体的半导体工业，或者用于制造微机电系统（“ MEMS“）。

4. 发明申请

US20120228144A1 High-purity fluorine gas, the production and use thereof, and a method for monitoring impurities in a fluorine gas 审中-公开
标题翻译：高纯度氟气，其生产和使用以及监测氟气中的杂质的方法
公开(公告)号：US20120228144A1
公开(公告)日：2012-09-13
申请号：US13501320
申请日：2010-10-13
申请人： Holger Pernice , Johannes Eicher , Francis Feys , Dominique Balthasart , Christoph Sommer , Harald Krueger
发明人： Holger Pernice , Johannes Eicher , Francis Feys , Dominique Balthasart , Christoph Sommer , Harald Krueger
IPC分类号： C25B15/00 , C25B9/18 , C25B1/24
CPC分类号： G01N21/3504 , C01B7/20 , G01N21/33 , G01N21/39 , G01N21/72 , G01N21/94 , G01N2021/399
摘要： An apparatus for producing a fluorine gas, comprising at least one fluorine generating cell, and at least one fluorine generating cell detector for detecting components of products obtained by the fluorine generating cell, wherein at least one of the fluorine generating cells is connected with the fluorine generating cell detector.
摘要翻译：一种氟气的制造装置，其特征在于，具有至少一个氟发生电池，以及至少一个氟发生电池检测器，用于检测由氟发生电池获得的产物的成分，其中至少一个氟发生电池与氟生成细胞检测器。

5. 发明申请

US20110009660A1 Process for the removal of HF from HF containing organic carbonates 审中-公开
标题翻译：从含有机碳酸盐的HF中除去HF的方法
公开(公告)号：US20110009660A1
公开(公告)日：2011-01-13
申请号：US12933503
申请日：2009-03-26
申请人： Harald Krueger , Christoph Sommer , Alain Lambert , Phillip Schwerdt , Jens Olschimke , Dirk Seffer , Saskia Wedekind
发明人： Harald Krueger , Christoph Sommer , Alain Lambert , Phillip Schwerdt , Jens Olschimke , Dirk Seffer , Saskia Wedekind
IPC分类号： C07C68/08
CPC分类号： C07D317/42 , C07C68/08 , C07D317/36 , C07D317/38 , C07C69/96
摘要： Mixtures comprising organic carbonates, such as carbonates not substituted by fluorine, but especially fluorosubstituted organic carbonates, which are depleted in HF can be obtained from respective mixtures with a higher HF content by a step of stripping such mixture with an inert gas. For example, a reaction mixture comprising fluoroethylene carbonate and HF can be treated in this way. The mixture comprising organic carbonate which is depleted in HF can be distilled to obtain highly purified organic carbonate.
摘要翻译：通过用惰性气体汽提该混合物的步骤，可以从具有较高HF含量的各自混合物中获得包含有机碳酸酯的混合物，例如不被氟取代的碳酸酯，特别是氟代取代的有机碳酸酯。例如，可以以这种方式处理包含氟代碳酸亚乙酯和HF的反应混合物。含有HF的有机碳酸酯的混合物可以蒸馏得到高纯度的有机碳酸盐。

6. 发明申请

US20070167921A1 Injection Device with Dose Metering Mechanism with Multiple Anti-Rotation Locking System 有权
标题翻译：具有多个防旋转锁定系统的剂量计量机构的注射装置
公开(公告)号：US20070167921A1
公开(公告)日：2007-07-19
申请号：US11550998
申请日：2006-10-19
申请人： Stefan Burren , Ulrich Moser , Christian Schrul , Christoph Sommer
发明人： Stefan Burren , Ulrich Moser , Christian Schrul , Christoph Sommer
IPC分类号： A61M5/00
CPC分类号： A61M5/3158 , A61M5/24 , A61M5/31536 , A61M5/31553 , A61M5/3156 , A61M5/31563 , A61M5/31593 , A61M5/3202 , A61M5/502 , A61M2005/2407 , A61M2005/2488
摘要： A drive and dosing module for an injection device, and an injection device including the module, wherein the module includes a dosing member which can be displaced into one of several dosing positions in relation to a drive member to set a product dose, wherein one of the dosing or drive members forms several dosing stops at axially different heights and rotational stops that are associated with the dosing stops and the other member forms at least one selection element, and wherein the drive member can be moved in relation to the dosing member until it reaches a trigger position in which the at least one selection element attains one of the dosing stops and, in said trigger position, the selection element and the rotational stops combine to lock the rotation of the dosing member in both directions.
摘要翻译：一种用于注射装置的驱动和计量模块以及包括该模块的注射装置，其中模块包括计量构件，其可以相对于驱动构件移位到多个计量位置之一以设定产品剂量，其中，剂量或驱动构件在轴向不同的高度处形成多个计量停止，并且与定量停止件相关联的旋转止动件，而另一个构件形成至少一个选择元件，并且其中驱动构件可以相对于计量构件移动，直到它到达触发位置，其中至少一个选择元件到达定量停止之一，并且在所述触发位置中，选择元件和旋转止动器组合以锁定计量构件在两个方向上的旋转。

7. 发明授权

US06681639B2 Method of estimating the lifetime of thermal barrier coatings 失效
标题翻译：估算热障涂层寿命的方法
公开(公告)号：US06681639B2
公开(公告)日：2004-01-27
申请号：US10120416
申请日：2002-04-12
申请人： Otto Bernhardi , Roland Muecke , Hans Joachim Schmutzler , Christoph Sommer , Marianne Sommer
发明人： Otto Bernhardi , Roland Muecke , Hans Joachim Schmutzler , Christoph Sommer , Marianne Sommer
IPC分类号： G01N332
CPC分类号： C23C28/3215 , C23C4/12 , C23C28/345 , C23C28/3455 , G01N17/00
摘要： A method of estimating the lifetime of a thermal barrier coating (14), which is applied to the surface of a member subjected to cyclical thermal loads, especially a vane and/or blade of a gas turbine, by means of a bond coat (12) lying in between the coating and the member, leads to more accurate results with simplified calculation by determining, in a first step, the amplitude of the normal stress (&Dgr;&sgr;n) perpendicular to the interface between the bond coat (12) and the thermal barrier coating (14) during cyclical loading, and calculating, in a second step, the number Ni of cycles to failure for every normal stress amplitude (&Dgr;&sgr;n) in accordance with the formula N i ⁢ = C ⁡ ( △σ n σ 0 ) m where &sgr;0 is a stress reference value and C(&dgr;ox) and m(&dgr;ox) are material parameters, which depend on the thickness (&Dgr;ox) of an oxide layer (13), which is located between the thermal barrier layer (14) and the bond coat (12) and grows with the cyclical loading.
摘要翻译：一种估计热障涂层（14）的寿命的方法，其通过粘合涂层（12）施加到受到循环热负荷的构件的表面，特别是燃气轮机的叶片和/或叶片）通过在第一步骤中确定垂直于粘合涂层（12）和热障壁之间的界面的法向应力（Deltasigman）的振幅，通过简化的计算得到更准确的结果，在循环加载期间涂覆（14），并且在第二步骤中，计算根据公式sigma0的每个法向应力幅度（Deltasigman）的失效循环次数Ni是应力参考值，C（deltaox）和m（ deltaox）是材料参数，其取决于位于热阻层（14）和粘合涂层（12）之间的氧化物层（13）的厚度（Deltaox），并以循环负载生长。

8. 发明授权

US09353450B2 Electrolyzer apparatus 有权
标题翻译：电解器
公开(公告)号：US09353450B2
公开(公告)日：2016-05-31
申请号：US13988027
申请日：2011-11-16
申请人： Philippe Morelle , Joachim Lange , Christoph Sommer
发明人： Philippe Morelle , Joachim Lange , Christoph Sommer
IPC分类号： C25B15/02 , C25B1/24
CPC分类号： C25B15/02 , C25B1/245
摘要： An electrolyzer apparatus for the electrolytic manufacture of elemental F2 from an electrolyte/HF-solution, e.g., KF×1.8 HF, comprising at least one electrolytic cell which contains at least two anodes, often 20 to 30 anodes, a metallic cathodic vessel, and at least two rectifiers such that each anode is allocated to one rectifier. In this manner, each anode can be controlled and regulated individually. Failure of each individual anode, e.g., anode break, causes the production of undesired side products, e.g., of CF4. Any faulty anode can be detected easily, and each anode can be shut off individually, if needed, and repaired.
摘要翻译：一种用于从电解质/ HF溶液（例如KF×1.8HF）电解制造元素F2的电解装置，其包括至少一个电解槽，其包含至少两个阳极，通常20至30个阳极，金属阴极容器和至少两个整流器，使得每个阳极分配给一个整流器。以这种方式，可以单独地控制和调节每个阳极。每个单独阳极（例如阳极断裂）的故障导致产生不期望的副产物，例如CF 4。可以容易地检测到任何有故障的阳极，如果需要，可以单独关闭阳极并进行维修。

9. 发明申请

US20130233723A1 Electrolyzer Apparatus 有权
标题翻译：电解器
公开(公告)号：US20130233723A1
公开(公告)日：2013-09-12
申请号：US13988027
申请日：2011-11-16
申请人： Philippe Morelle , Joachim Lange , Christoph Sommer
发明人： Philippe Morelle , Joachim Lange , Christoph Sommer
IPC分类号： C25B15/02 , C25B1/24
CPC分类号： C25B15/02 , C25B1/245
摘要： An electrolyzer apparatus for the electrolytic manufacture of elemental F2 from an electrolyte/HF-solution, e.g., KF×1.8 HF, comprising at least one electrolytic cell which contains at least two anodes, often 20 to 30 anodes, a metallic cathodic vessel, and at least two rectifiers such that each anode is allocated to one rectifier. In this manner, each anode can be controlled and regulated individually. Failure of each individual anode, e.g., anode break, causes the production of undesired side products, e.g., of CF4. Any faulty anode can be detected easily, and each anode can be shut off individually, if needed, and repaired.
摘要翻译：一种用于从电解质/ HF溶液（例如KF×1.8HF）电解制造元素F2的电解装置，其包括至少一个电解槽，其包含至少两个阳极，通常20至30个阳极，金属阴极容器和至少两个整流器，使得每个阳极分配给一个整流器。以这种方式，可以单独地控制和调节每个阳极。每个单独阳极（例如阳极断裂）的故障导致产生不期望的副产物，例如CF 4。可以容易地检测到任何有故障的阳极，如果需要，可以单独关闭阳极并进行维修。

10. 发明授权

US08075534B2 Injection device with dose metering mechanism with multiple anti-rotation locking system 有权
标题翻译：具有多个防旋转锁定系统的剂量计量机构的注射装置
公开(公告)号：US08075534B2
公开(公告)日：2011-12-13
申请号：US12839987
申请日：2010-07-20
申请人： Stefan Burren , Ulrich Moser , Christian Schrul , Christoph Sommer
发明人： Stefan Burren , Ulrich Moser , Christian Schrul , Christoph Sommer
IPC分类号： A61M5/00
CPC分类号： A61M5/3158 , A61M5/24 , A61M5/31536 , A61M5/31553 , A61M5/3156 , A61M5/31563 , A61M5/31593 , A61M5/3202 , A61M5/502 , A61M2005/2407 , A61M2005/2488
摘要： A drive and dosing module for an injection device, and an injection device including the module, wherein the module includes a dosing member which can be displaced into one of several dosing positions in relation to a drive member to set a product dose, wherein one of the dosing or drive members forms several dosing stops at axially different heights and rotational stops that are associated with the dosing stops and the other member forms at least one selection element, and wherein the drive member can be moved in relation to the dosing member until it reaches a trigger position in which the at least one selection element attains one of the dosing stops and, in said trigger position, the selection element and the rotational stops combine to lock the rotation of the dosing member in both directions.
摘要翻译：一种用于注射装置的驱动和计量模块以及包括该模块的注射装置，其中模块包括计量构件，其可以相对于驱动构件移位到多个计量位置之一以设定产品剂量，其中，剂量或驱动构件在轴向不同的高度处形成多个计量停止，并且与定量停止件相关联的旋转止动件，而另一个构件形成至少一个选择元件，并且其中驱动构件可以相对于计量构件移动，直到它到达触发位置，其中至少一个选择元件到达定量停止之一，并且在所述触发位置中，选择元件和旋转止动器组合以锁定计量构件在两个方向上的旋转。

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