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    • 1. 发明授权
    • Capacitive humidity sensor and method for the manufacture of same
    • 电容式湿度传感器及其制造方法
    • US4500940A
    • 1985-02-19
    • US562746
    • 1983-12-19
    • Heikki T. KuismaAri LehtoJouko S. Jalava
    • Heikki T. KuismaAri LehtoJouko S. Jalava
    • G01N27/22H01G7/00H01G5/20
    • G01N27/225
    • The present publication describes a capacitive humidity sensor and a method for the manufacture of same. The sensor comprises a substrate (1), first (5) and second bottom electrodes (4), which have been fitted close to each other on the substrate (1), an active layer (7), which fills the area between the first (5) and the second bottom electrodes (4) on the substrate (1) and extends to above the top face of the second electrode (4). According to the invention, the sensor further consists of structures (6) connected to the top face of the first electrode (5), made of a conductive material, and being beam-shaped with an upwardly widening section and being placed side by side, the said structures (6) limiting portions (7) of the active layer between themselves from two sides, and a narrow slot (26) being provided between the top faces of the said structures. Owing to its construction, the sensor is not sensitive to touching.
    • 本出版物描述了一种电容式湿度传感器及其制造方法。 传感器包括在基板(1)上彼此靠近配合的基板(1),第一(5)和第二底部电极(4),活性层(7),其填充第一 (5)和所述第二底部电极(4)延伸到所述第二电极(4)的顶面上方。 根据本发明,传感器还包括连接到第一电极(5)的顶面的由导电材料制成并且具有向上扩大部分并且并排放置的梁状结构(6) 所述结构(6)在两侧之间限制其自身之间的有源层的部分(7),以及设置在所述结构的顶面之间的窄槽(26)。 由于其结构,传感器对触摸不敏感。