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    • 2. 发明授权
    • Capacitive humidity sensor and method for the manufacture of same
    • 电容式湿度传感器及其制造方法
    • US4500940A
    • 1985-02-19
    • US562746
    • 1983-12-19
    • Heikki T. KuismaAri LehtoJouko S. Jalava
    • Heikki T. KuismaAri LehtoJouko S. Jalava
    • G01N27/22H01G7/00H01G5/20
    • G01N27/225
    • The present publication describes a capacitive humidity sensor and a method for the manufacture of same. The sensor comprises a substrate (1), first (5) and second bottom electrodes (4), which have been fitted close to each other on the substrate (1), an active layer (7), which fills the area between the first (5) and the second bottom electrodes (4) on the substrate (1) and extends to above the top face of the second electrode (4). According to the invention, the sensor further consists of structures (6) connected to the top face of the first electrode (5), made of a conductive material, and being beam-shaped with an upwardly widening section and being placed side by side, the said structures (6) limiting portions (7) of the active layer between themselves from two sides, and a narrow slot (26) being provided between the top faces of the said structures. Owing to its construction, the sensor is not sensitive to touching.
    • 本出版物描述了一种电容式湿度传感器及其制造方法。 传感器包括在基板(1)上彼此靠近配合的基板(1),第一(5)和第二底部电极(4),活性层(7),其填充第一 (5)和所述第二底部电极(4)延伸到所述第二电极(4)的顶面上方。 根据本发明,传感器还包括连接到第一电极(5)的顶面的由导电材料制成并且具有向上扩大部分并且并排放置的梁状结构(6) 所述结构(6)在两侧之间限制其自身之间的有源层的部分(7),以及设置在所述结构的顶面之间的窄槽(26)。 由于其结构,传感器对触摸不敏感。
    • 3. 发明授权
    • Capacitive pressure detector independent of temperature
    • 电容式压力检测器独立于温度
    • US4589054A
    • 1986-05-13
    • US701864
    • 1985-02-15
    • Heikki T. Kuisma
    • Heikki T. Kuisma
    • G01L9/12G01L9/00H01G7/00
    • G01L9/0073
    • A capacitive pressure detector, which comprises a support plate (5, 6; 19), a stationary capacitor plate (4; 7) disposed on the support plate, (5, 6; 19), and a silicon plate (2; 13) disposed on the support plate (5, 6; 19) so that it surrounds the stationary capacitor plate (4; 7), the middle portion of the silicon plate having been made thinner so that it forms membrane-like structure (3; 16) acting as a mobile capacitor plate. The support plate consists of a silicon layer (6; 21) and of a glass layer (5; 20) attached onto said silicon layer and placed against the silicon plate (2; 13), said glass layer being essentially thinner than the silicon layer. Hence, in the combination plate (5, 6; 20, 21) in this way obtained, owing to the elasticity coefficients and thermal expansion coefficients of the different layers (5 and 6; 20 and 21), the difference in thermal expansion between the combination plate (5, 6; 20, 21) and the silicon membrane (3; 16) is essentially reduced.
    • 一种电容式压力检测器,包括支撑板(5,6; 19),设置在所述支撑板上的固定电容器板(4; 7)(5,6)和硅板(2; 13) 设置在所述支撑板(5,6; 19)上,使得其围绕所述固定电容器板(4; 7),所述硅板的中间部分被制成较薄,使得其形成膜状结构(3; 16) 作为移动电容器板。 支撑板由硅层(6; 21)和附着在所述硅层上的玻璃层(5; 20)组成,并抵靠硅板(2; 13)放置,所述玻璃层基本上比硅层薄 。 因此,由于不同层(5和6; 20和21)的弹性系数和热膨胀系数,以这种方式获得的组合板(5,6; 20,21)中, 组合板(5,6; 20,21)和硅膜(3; 16)基本上被还原。
    • 4. 发明授权
    • Capacitive detector for absolute pressure
    • 绝对压力电容式探测器
    • US4628403A
    • 1986-12-09
    • US701857
    • 1985-02-15
    • Heikki T. Kuisma
    • Heikki T. Kuisma
    • H01H35/24G01L9/00G01L9/12H01G5/16
    • G01L9/0073
    • A capacitive detector for absolute pressure, which comprises a base and a stationary capacitor plate (7) attached onto the base (3). An aneroid capsule (4) is arranged in connection with the base (3) and provided with a mobile capacitor plate area (5, 6) directed towards the base (3) and changing its distance from the stationary capacitor plate (7) by the effect of pressure. A silicon plate (2) is attached onto the base and has membrane-like middle portion (5, 6) acting as a mobile capacitor plate. A plate structure (1) is attached hermetically onto the silicon plate (2) such that the space of the aneroid capsule (4) is located between the plate structure (1) and the silicon plate (2).
    • 一种用于绝对压力的电容式检测器,其包括附接到基座(3)上的基座和固定电容器板(7)。 一个空心胶囊(4)与基座(3)连接设置,并设有一个指向底座(3)的移动电容器板区域(5,6),并将其与固定电容器板(7)的距离改变为 压力的影响。 将硅板(2)安装在基座上,并具有用作移动电容器板的膜状中间部分(5,6)。 板结构(1)气密地附着到硅板(2)上,使得空气囊(4)的空间位于板结构(1)和硅板(2)之间。
    • 5. 发明授权
    • Capacitive pressure detector
    • 电容式压力检测器
    • US4594639A
    • 1986-06-10
    • US701870
    • 1985-02-15
    • Heikki T. Kuisma
    • Heikki T. Kuisma
    • H01H35/24G01L9/00G01L9/12H01H35/34H01G7/00
    • G01L9/0073
    • A capacitive pressure detector, comprising a plate-shaped base (13), a stationary capacitor plate (14) disposed on the base (13), an aneroid capsule (6) arranged in connection with the base (13) and proviced with an area (8) with a mobile capacitor plate facing the stationary capacitor plate (14) and changing its distance from the stationary capacitor disc (14) by the effect of pressure. On the plate-shaped base (13), a silicon plate (5) is disposed, into which a membrane-like middle portion (8) functioning as the mobile capacitor plate has been worked. On the silicon plate (5), a preferably plate-shaped cover structure (12) is hermetically disposed so that a basin space (6) of the aneroid capsule is formed between the cover structure (12) and said middle portion (8). The membrane-like middle portion (8) of the silicon plate (5) is connected to the edge portion of the silicon plate (5) by means of a relatively thin-walled collar structure (11) extending from the edge of the middle portion (8) to the proximity of the inner face of the cover structure (12).
    • 一种电容式压力检测器,包括板形基座(13),设置在基座(13)上的固定电容器板(14),与基座(13)相连并布置的空隙胶囊(6) (8),其具有面向固定电容器板(14)的移动电容器板,并且通过压力的作用改变其与固定电容器盘(14)的距离。 在板状基体(13)上设置硅板(5),作为移动电容器板起作用的膜状中间部(8)进行加工。 在硅板(5)上,优选板状盖结构(12)被气密地设置,使得在盖结构(12)和所述中间部分(8)之间形成空隙胶囊的盆空间(6)。 硅板(5)的膜状中间部分(8)通过从中间部分的边缘延伸的相对薄壁的环形结构(11)连接到硅板(5)的边缘部分, (8)到盖结构(12)的内表面附近。