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1. 发明授权

US09182672B2 System and method for production of nanostructures over large areas 有权
标题翻译：在大面积生产纳米结构的系统和方法
公开(公告)号：US09182672B2
公开(公告)日：2015-11-10
申请号：US13997335
申请日：2011-12-20
申请人： Harun Solak , Francis Clube
发明人： Harun Solak , Francis Clube
IPC分类号： G03F7/20
CPC分类号： G03F7/201 , G03F7/70408
摘要： A method and an apparatus print a pattern of periodic features into a photosensitive layer. The methods includes the steps of: providing a substrate bearing the layer, providing a mask, arranging the substrate such that the mask has a tilt angle with respect to the substrate in a first plane orthogonal thereto, and providing collimated light for illuminating the mask pattern so as to generate a transmitted light-field composed of a range of transversal intensity distributions between Talbot planes separated by a Talbot distance so that the transmitted light-field has an intensity envelope in the first plane. The mask is illuminated with the light while displacing the substrate relative to the mask in a direction parallel to the first plane and to the substrate. The tilt angle and the intensity envelope are arranged so that the layer is exposed to an average of the range of transversal intensity distributions.
摘要翻译：一种方法和装置将周期特征的图案打印到感光层中。所述方法包括以下步骤：提供承载该层的衬底，提供掩模，布置衬底，使得掩模在与其垂直的第一平面中相对于衬底具有倾斜角，并提供用于照亮掩模图案的准直光以产生由Talbot距离分开的Talbot平面之间的横向强度分布范围组成的透射光场，使得透射的光场在第一平面中具有强度包络。在平行于第一平面的方向和衬底上相对于掩模移动衬底的情况下，用光照亮面罩。倾斜角度和强度包络被布置成使得该层暴露于横向强度分布范围的平均值。

2. 发明申请

US20220155691A1 METHOD AND APPARATUS FOR PRINTING A PERIODIC PATTERN WITH A VARYING DUTY CYCLE 有权
公开(公告)号：US20220155691A1
公开(公告)日：2022-05-19
申请号：US17598409
申请日：2020-03-27
申请人： Francis Clube , Andreas Amrein , Maxime Lebugle , Harun Solak , Li Wang
发明人： Francis Clube , Andreas Amrein , Maxime Lebugle , Harun Solak , Li Wang
IPC分类号： G03F7/20 , G03F1/70 , G02B5/18
摘要： A method for forming a surface-relief grating with a desired spatial variation of duty cycle in a layer of photoresist includes: providing a first mask bearing a high-resolution grating of linear features, arranging the first mask at a first distance from a substrate, providing a second mask bearing a variable-transmission grating of opaque and transparent linear features that has a designed spatial variation of duty cycle, arranging the second mask at a distance before the first mask such that the linear features of the variable-transmission grating are orthogonal to the linear features of the high-resolution grating, illuminating the second mask while varying the first distance according to displacement Talbot lithography and also displacing the second mask at an angle to its linear features such that there is substantially no component of modulation with the period of the variable-transmission grating in the energy density distribution that exposes the photoresist.

3. 发明申请

US20130323651A1 SYSTEM AND METHOD FOR PRODUCTION OF NANOSTRUCTURES OVER LARGE AREAS 有权
标题翻译：用于生产大面积纳米结构的系统和方法
公开(公告)号：US20130323651A1
公开(公告)日：2013-12-05
申请号：US13997335
申请日：2011-12-20
申请人： Harun Solak , Francis Clube
发明人： Harun Solak , Francis Clube
IPC分类号： G03F7/20
CPC分类号： G03F7/201 , G03F7/70408
摘要： A method and an apparatus print a pattern of periodic features into a photosensitive layer. The methods includes the steps of: providing a substrate bearing the layer, providing a mask, arranging the substrate such that the mask has a tilt angle with respect to the substrate in a first plane orthogonal thereto, and providing collimated light for illuminating the mask pattern so as to generate a transmitted light-field composed of a range of transversal intensity distributions between Talbot planes separated by a Talbot distance so that the transmitted light-field has an intensity envelope in the first plane. The mask is illuminated with the light while displacing the substrate relative to the mask in a direction parallel to the first plane and to the substrate. The tilt angle and the intensity envelope are arranged so that the layer is exposed to an average of the range of transversal intensity distributions.
摘要翻译：一种方法和装置将周期特征的图案打印到感光层中。所述方法包括以下步骤：提供承载该层的衬底，提供掩模，布置衬底，使得掩模在与其垂直的第一平面中相对于衬底具有倾斜角，并提供用于照亮掩模图案的准直光以产生由Talbot距离分开的Talbot平面之间的横向强度分布范围组成的透射光场，使得透射的光场在第一平面中具有强度包络。在平行于第一平面的方向和衬底上相对于掩模移动衬底的情况下，用光照亮面罩。倾斜角度和强度包络被布置成使得该层暴露于横向强度分布范围的平均值。

4. 发明授权

US10365566B2 Methods and systems for printing arrays of features 有权
公开(公告)号：US10365566B2
公开(公告)日：2019-07-30
申请号：US16061041
申请日：2016-12-14
申请人： Francis Clube , Harun Solak
发明人： Francis Clube , Harun Solak
IPC分类号： G03F7/20
摘要： A method for printing a desired periodic pattern into a photosensitive layer on a substrate includes providing a mask bearing a periodic pattern whose period is a multiple of that of the desired pattern. The substrate is disposed in proximity to the mask, at least one beam is provided for illuminating the mask pattern to generate a transmitted light-field described by a Talbot distance. The layer is exposed to time-integrated intensity distributions in a number of sub-exposures by illuminating the mask pattern with the at least one beam while changing the separation between substrate and mask by at least a certain fraction of, but less than, the Talbot distance. The illumination or the substrate is configured relative to the mask for the different sub-exposures so that the layer is exposed to the same time-integrated intensity distributions that are mutually laterally offset by a certain distance and in a certain direction.

5. 发明授权

US09280056B2 Method and system for printing high-resolution periodic patterns 有权
标题翻译：打印高分辨率周期图案的方法和系统
公开(公告)号：US09280056B2
公开(公告)日：2016-03-08
申请号：US13979489
申请日：2012-01-10
申请人： Francis Clube , Harun Solak
发明人： Francis Clube , Harun Solak
IPC分类号： G03F7/20
CPC分类号： G03F7/70091 , G03F7/7035 , G03F7/70408
摘要： A method for printing a desired periodic pattern includes providing a mask bearing a pattern of features having a period, providing a substrate bearing a photosensitive layer, arranging the substrate with a separation from the mask, generating collimated light with a wavelength and an intensity, at least the former of which may be temporally varied to deliver a spectral distribution of energy density, illuminating the mask pattern with the light while varying at least its wavelength so as to deliver a spectral distribution of energy density, such that the light-field transmitted by the mask is instantaneously composed of a range of transversal intensity distributions between Talbot planes. The layer is exposed to a time-integrated intensity distribution that prints the desired pattern. The separation, spectral distribution and period are arranged so that the time-integrated intensity distribution corresponds to an average of the range of transversal intensity distributions.
摘要翻译：一种用于印刷期望的周期性图案的方法包括提供一种带有具有周期的特征图案的掩模，提供带有感光层的基底，将衬底与掩模分离，产生具有波长和强度的准直光，其中最前者可以在时间上变化以提供能量密度的光谱分布，用光照亮掩模图案，同时至少改变其波长，以便传递能量密度的光谱分布，使得光场通过面具瞬间由Talbot平面之间的一系列横向强度分布组成。该层暴露于打印所需图案的时间积分强度分布。布置分离，光谱分布和周期，使得时间积分强度分布对应于横向强度分布范围的平均值。

6. 发明申请

US20140307242A1 METHOD AND APPARATUS FOR PRINTING PERIODIC PATTERNS USING MULTIPLE LASERS 审中-公开
标题翻译：使用多个激光打印周期性图案的方法和装置
公开(公告)号：US20140307242A1
公开(公告)日：2014-10-16
申请号：US14123330
申请日：2012-06-01
申请人： Harun Solak , Francis Clube , Christian Dais
发明人： Harun Solak , Francis Clube , Christian Dais
IPC分类号： G03F7/20
CPC分类号： G03F7/70075 , G03F7/70408
摘要： A method for printing a periodic pattern of features into a photosensitive layer includes providing a mask bearing a mask pattern, providing a substrate bearing the layer, arranging the substrate parallel to the mask, providing a number of lasers having a plurality of peak wavelengths, forming from the light a beam for illuminating the mask with a spectral distribution of exposure dose and a degree of collimation, illuminating the mask with the beam such that the light of each wavelength transmitted by the mask pattern forms a range of transversal intensity distributions between Talbot planes and exposes the photosensitive layer to an image component. The separation and the spectral distribution are arranged so that the superposition of the components is equivalent to an average of the range of transversal intensity distributions formed by light of one wavelength and the collimation is arranged so that the features are resolved.
摘要翻译：将特征的周期性图案印刷到感光层中的方法包括提供带有掩模图案的掩模，提供承载该层的基板，将该基板平行于掩模布置，提供多个具有多个峰值波长的激光器，形成从光照射具有照射剂量的光谱分布和准直程度的光束，用光束照射掩模，使得由掩模图案传输的每个波长的光形成Talbot平面之间的横向强度分布范围并将感光层暴露于图像分量。分离和光谱分布被布置成使得部件的叠加等价于由一个波长的光形成的横向强度分布的平均值，并且准直被设置为使得特征被解决。

7. 发明申请

US20130308112A1 METHOD AND SYSTEM FOR PRINTING HIGH-RESOLUTION PERIODIC PATTERNS 有权
标题翻译：打印高分辨率周期模式的方法和系统
公开(公告)号：US20130308112A1
公开(公告)日：2013-11-21
申请号：US13979489
申请日：2012-01-10
申请人： Francis Clube , Harun Solak
发明人： Francis Clube , Harun Solak
IPC分类号： G03F7/20
CPC分类号： G03F7/70091 , G03F7/7035 , G03F7/70408
摘要： A method for printing a desired periodic pattern includes providing a mask bearing a pattern of features having a period, providing a substrate bearing a photosensitive layer, arranging the substrate with a separation from the mask, generating collimated light with a wavelength and an intensity, at least the former of which may be temporally varied to deliver a spectral distribution of energy density, illuminating the mask pattern with the light while varying at least its wavelength so as to deliver a spectral distribution of energy density, such that the light-field transmitted by the mask is instantaneously composed of a range of transversal intensity distributions between Talbot planes. The layer is exposed to a time-integrated intensity distribution that prints the desired pattern. The separation, spectral distribution and period are arranged so that the time-integrated intensity distribution corresponds to an average of the range of transversal intensity distributions.
摘要翻译：一种用于印刷期望的周期性图案的方法包括提供一种带有具有周期的特征图案的掩模，提供带有感光层的基底，将衬底与掩模分离，产生具有波长和强度的准直光，其中最前者可以在时间上变化以提供能量密度的光谱分布，用光照亮掩模图案，同时至少改变其波长，以便传递能量密度的光谱分布，使得光场通过面具瞬间由Talbot平面之间的一系列横向强度分布组成。该层暴露于打印所需图案的时间积分强度分布。布置分离，光谱分布和周期，使得时间积分强度分布对应于横向强度分布范围的平均值。

8. 发明申请

US20130329203A1 METHOD AND APPARATUS FOR PRINTING HIGH-RESOLUTION TWO-DIMENSIONAL PERIODIC PATTERNS 有权
标题翻译：打印高分辨率二维周期图案的方法和装置
公开(公告)号：US20130329203A1
公开(公告)日：2013-12-12
申请号：US13885808
申请日：2011-11-16
申请人： Harun H. Solak , Francis Clube
发明人： Harun H. Solak , Francis Clube
IPC分类号： G03F7/20
CPC分类号： G03F7/70058 , G03F1/28 , G03F7/70408
摘要： A method for printing a periodic pattern having a first symmetry and a first period into a photosensitive layer. The method includes providing a mask bearing a pattern of at least two overlapping sub-patterns which have a second symmetry and a second period, the features of each sub-pattern being formed in a transmissive material, providing a substrate bearing the layer, arranging the mask with a separation from the substrate, providing light having a central wavelength for illuminating the mask to generate a light-field in which light of the central wavelength forms a range of intensity distributions between Talbot planes, illuminating said mask pattern with said light while maintaining the separation or changing it by a distance whereby the photosensitive layer is exposed to an average of the range of intensity distributions, wherein the light transmitted by each sub-pattern is shifted in phase relative to that transmitted by another sub-pattern.
摘要翻译：一种用于将具有第一对称性和第一周期的周期性图案印刷到感光层中的方法。该方法包括提供具有至少两个具有第二对称性和第二周期的重叠子图案的图案的掩模，每个子图案的特征形成在透射材料中，提供承载该层的基底，掩模，与衬底分离，提供具有用于照亮掩模的中心波长的光以产生光场，其中中心波长的光形成Talbot平面之间的强度分布范围，用所述光照亮所述掩模图案，同时保持分离或改变一段距离，由此光敏层暴露于强度分布范围的平均值，其中由每个子图案发送的光相对于由另一子图案传输的光相位移位。

9. 发明授权

US08368871B2 Lithographic fabrication of general periodic structures 有权
标题翻译：一般周期性结构的平版印刷
公开(公告)号：US08368871B2
公开(公告)日：2013-02-05
申请号：US12706081
申请日：2010-02-16
申请人： Harun H. Solak , Christian Dais , Francis Clube
发明人： Harun H. Solak , Christian Dais , Francis Clube
IPC分类号： G03B27/52
CPC分类号： G03F7/70408 , G03B27/58 , G03F7/70325 , G03F7/7035
摘要： A lithographic method related to Talbot imaging for printing a desired pattern of features that is periodic or quasi-periodic in at least one direction onto a substrate surface, which method includes providing a mask bearing a pattern of mask features, arranging the substrate parallel and in proximity to the mask, providing an illumination source having a central wavelength and a spectral bandwidth, forming from said source an illumination beam with an angular distribution of intensity, arranging the distance of the substrate from the mask and exposing the mask pattern to said beam so that each angular component of illumination exposes the substrate to substantially the entire range of lateral intensity distributions that occur between successive Talbot image planes for the illumination wavelengths, wherein the angular distribution of the beam is designed in conjunction with the pattern of features in the mask and the distance of the substrate from the mask.
摘要翻译：与Talbot成像相关的平版印刷方法，用于将至少一个方向上周期性或准周期性的所需特征图案打印到基底表面上，该方法包括提供具有掩模特征图案的掩模，将基片平行放置靠近掩模，提供具有中心波长和光谱带宽的照明源，从所述源形成具有强度角度分布的照明光束，将衬底距离掩模布置并将掩模图案暴露于所述光束，从而照明的每个角度分量使衬底基本上暴露在用于照明波长的连续Talbot像面之间出现的横向强度分布的整个范围内，其中光束的角分布结合掩模中的特征图案设计，衬底与掩模的距离。

10. 发明授权

US08904316B2 Method and apparatus for printing high-resolution two-dimensional periodic patterns 有权
标题翻译：用于打印高分辨率二维周期图案的方法和装置
公开(公告)号：US08904316B2
公开(公告)日：2014-12-02
申请号：US13885808
申请日：2011-11-16
申请人： Harun H. Solak , Francis Clube
发明人： Harun H. Solak , Francis Clube
IPC分类号： G06F17/50 , G03F7/20 , G03F1/28
CPC分类号： G03F7/70058 , G03F1/28 , G03F7/70408
摘要： A method for printing a periodic pattern having a first symmetry and a first period into a photosensitive layer. The method includes providing a mask bearing a pattern of at least two overlapping sub-patterns which have a second symmetry and a second period, the features of each sub-pattern being formed in a transmissive material, providing a substrate bearing the layer, arranging the mask with a separation from the substrate, providing light having a central wavelength for illuminating the mask to generate a light-field in which light of the central wavelength forms a range of intensity distributions between Talbot planes, illuminating said mask pattern with said light while maintaining the separation or changing it by a distance whereby the photosensitive layer is exposed to an average of the range of intensity distributions, wherein the light transmitted by each sub-pattern is shifted in phase relative to that transmitted by another sub-pattern.
摘要翻译：一种用于将具有第一对称性和第一周期的周期性图案印刷到感光层中的方法。该方法包括提供具有至少两个具有第二对称性和第二周期的重叠子图案的图案的掩模，每个子图案的特征形成在透射材料中，提供承载该层的基底，掩模，与衬底分离，提供具有用于照亮掩模的中心波长的光以产生光场，其中中心波长的光形成Talbot平面之间的强度分布范围，用所述光照亮所述掩模图案，同时保持分离或改变一段距离，由此光敏层暴露于强度分布范围的平均值，其中由每个子图案发送的光相对于由另一子图案传输的光相位移位。

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