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1. 发明授权

US4300045A Beam guidance for electron beam tests, and electron impact spectrometer having such beam guidance 失效
标题翻译：电子束测试的光束指导和具有这种光束引导的电子轰击光谱仪
公开(公告)号：US4300045A
公开(公告)日：1981-11-10
申请号：US107592
申请日：1979-12-27
申请人： Harald Ibach , Hermann Froitzheim , Heinz-Dieter Bruchmann , Sieghard Lehwald
发明人： Harald Ibach , Hermann Froitzheim , Heinz-Dieter Bruchmann , Sieghard Lehwald
IPC分类号： H01J49/08 , G01N23/203 , G01Q30/02 , G01Q30/18 , G01Q70/18 , H01J49/06 , H01J49/14 , H01J49/44 , H01J49/48 , H01J40/00 , H01J47/00
CPC分类号： H01J49/06 , H01J49/48
摘要： A beam guidance for electron beam tests, especially of solid bodies. The ctrons cathodically emitted and electron-optically bundled are subjected at least to an energy selection in a cylinder condenser deflection unit and are subsequently detected or indicated in a detector. The emission and bundling systems are arranged in such a way that the electrons, in the plane at right angles to the cylinder condenser axis, are focused upon the inlet shield or baffle of the condenser, yet are focused at right angles thereto upon the detector. Also disclosed is an electron impact spectrometer having such a beam guidance, and an emission system encompassing a cathode and a lens system for focusing an electron current or flow upon an inlet baffle of a monochromator, with such flow entering into the cylinder condenser monochromator for energy selection of the electrons, which emanate bundled from the monochromator and strike or fall upon the probe or test sample and after reflection thereon come by way of a lens system into the cylinder condenser analyzer and after energy selection and passage through the outlet baffle of the analyzer strike or impinge upon a detector.
摘要翻译：用于电子束测试的光束引导，特别是固体的测试。阴极发射的电子和电子束的电子至少在气缸冷凝器偏转单元中进行能量选择，随后在检测器中检测或指示。发射和捆扎系统被布置成使得在与圆柱形冷凝器轴线成直角的平面中的电子被聚焦在冷凝器的入口屏蔽或挡板上，但是在检测器上与其成直角聚焦。还公开了具有这种光束引导的电子轰击光谱仪，以及包括阴极和透镜系统的发射系统，用于将电子流或流动聚焦在单色仪的入口挡板上，这样的流进入气缸电容器单色器以获得能量从单色仪发射并发射或落在探针或测试样品上并在其上反射之后的电子的选择通过透镜系统进入气瓶冷凝器分析器，并且在能量选择和通过分析器的出口挡板之后撞击或撞击检测器。

2. 发明授权

US4845361A Process for electron beam guiding with energy selection and electron spectrometer 失效
标题翻译：用能量选择和电子光谱仪进行电子束引导的过程
公开(公告)号：US4845361A
公开(公告)日：1989-07-04
申请号：US149596
申请日：1988-01-28
申请人： Harald Ibach , Heinz-Dieter Bruchmann , Sieghart Lehwald
发明人： Harald Ibach , Heinz-Dieter Bruchmann , Sieghart Lehwald
IPC分类号： G01N23/225 , H01J37/05 , H01J49/06 , H01J49/44
CPC分类号： H01J49/44 , H01J49/06
摘要： High energy resolution at high electron current at the specimen or at the detector is obtained by an electron beam guiding with focusing energy selection, in particular in an electron spectrometer with emission system and at least one energy dispersive system with different focusing in two mutually perpendicular directions, by a non-circular-symmetrical lens system placed after or before the energy dispersive system and correcting the different focusing of the electrons in the two mutually perpendicular directions such that either the virtual or the real entry stop of the energy dispersive system is imaged on an accessible image plane outside the energy dispersive system or an object outside the energy dispersive system is imaged on the virtual or real exit stop of the latter.
摘要翻译：通过具有聚焦能量选择的电子束引导，特别是在具有发射系统的电子光谱仪和至少一个在两个相互垂直的方向上具有不同聚焦的能量分散系统的能量分散系统，可以获得在样品或检测器处的高电子电流下的高能量分辨率通过放置在能量色散系统之后或之前的非圆形对称透镜系统，并校正电子在两个相互垂直的方向上的不同聚焦，使得能量色散系统的虚拟或实际进入停止被成像在能量分散系统之外的可访问图像平面或能量分散系统外部的对象被成像在后者的虚拟或实际出口停止点上。

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