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2. 发明申请

US20130299130A1 COOLING MODULE AND APPARATUS FOR THERMALLY TREATING SUBSTRATES 审中-公开
标题翻译：用于热处理基板的冷却模块和装置
公开(公告)号：US20130299130A1
公开(公告)日：2013-11-14
申请号：US13994796
申请日：2012-01-27
申请人： Hans-Peter Elser , Matthias Tumback , Reinhard Lenz , Moritz Vogt
发明人： Hans-Peter Elser , Matthias Tumback , Reinhard Lenz , Moritz Vogt
IPC分类号： F28F9/00
CPC分类号： F28F9/00 , H01L21/67098
摘要： A cooling module for cooling substrates, in particular solar cells having a paste printed thereon after passing through a heating module is described. The cooling module comprises an elongated cooling chamber having an inlet opening, which is adjacent to a heating module, and an outlet opening, as well as a transport unit for transporting substrates through the elongated cooling chamber, wherein the transport unit defines a transport plane for the substrates. At least one first cooling unit is provided. The cooling unit has a plurality of first plate elements, which are arranged in substance perpendicular to and above the transport plane in the cooling chamber, at least one first conduit which extends through the first plate elements and is in a thermally conducting relationship therewith, and at least one conveying unit for conveying a cooling fluid through the first conduit. A conveying unit for conveying gas, in particular air, via spaces between the plate elements towards the transport plane is also provided. Also, an apparatus for thermally treating substrates, in particular solar cells, having a paste printed thereon is described. Said apparatus comprises a heating module having an elongated heating chamber and at least one adjacent cooling module having an elongated cooling chamber. A transport unit for transporting that substrates through the heating chamber and the cooling chamber is provided, wherein the transport unit comprises a revolving, gas permeable transport belt, which forms a transport section and a return section. The transport section extends through the heating chamber and the cooling chamber, while the return section has a portion which extends through at least a portion of the cooling chamber and wherein the return section is arranged outside of the heating chamber.
摘要翻译：描述了用于冷却基板的冷却模块，特别是在通过加热模块之后具有印刷在其上的糊状物的太阳能电池。冷却模块包括细长的冷却室，其具有与加热模块相邻的入口开口和出口开口，以及用于通过细长冷却室输送基板的输送单元，其中运输单元限定用于底物。提供至少一个第一冷却单元。冷却单元具有多个第一板元件，其在物体中垂直于冷却室中的输送平面并且高于输送平面;至少一个第一导管，其延伸穿过第一板元件并与其导热关系;以及至少一个输送单元，用于输送冷却流体通过第一导管。还提供了用于经由板元件之间的空间朝向输送平面输送气体，特别是空气的输送单元。此外，描述了一种用于热处理印刷有糊状物的基板，特别是太阳能电池的设备。所述装置包括具有细长加热室的加热模块和具有细长冷却室的至少一个相邻冷却模块。提供了一种用于将基板输送通过加热室和冷却室的输送单元，其中运输单元包括形成运输部分和返回部分的旋转的透气输送带。输送部分延伸穿过加热室和冷却室，而返回部分具有延伸穿过冷却室的至少一部分的部分，并且其中返回部分设置在加热室的外部。

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