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1. 发明授权

US07525115B2 Arrangement for inspecting objects, especially masks in microlithography 有权
标题翻译：用于检查物体的布置，特别是微光刻中的掩模
公开(公告)号：US07525115B2
公开(公告)日：2009-04-28
申请号：US10554048
申请日：2004-04-20
申请人： Hans-Juergen Dobschal , Wolfgang Harnisch , Thomas Scheruebl , Nobert Rosenkranz , Ralph Semmler
发明人： Hans-Juergen Dobschal , Wolfgang Harnisch , Thomas Scheruebl , Nobert Rosenkranz , Ralph Semmler
IPC分类号： G01N23/04 , G01N21/00
CPC分类号： B82Y10/00 , B82Y40/00 , G01N21/956 , G03F1/24 , G03F1/84
摘要： Apparatus for inspecting objects especially masks in microlithography that are disposed in a vacuum chamber. The apparatus includes a converter for converting illuminating radiation emitted from the object into a radiation of a higher wavelength. A sensor for recording images is disposed outside the vacuum chamber and arranged as an optical interface from the vacuum chamber to the sensor of the converter or at least one part of an image lens is arranged as a window in the vacuum chamber.
摘要翻译：用于检查物体的装置，特别是在微光刻中的掩模，其设置在真空室中。该装置包括用于将从物体发射的照射辐射转换成更高波长的辐射的转换器。用于记录图像的传感器设置在真空室的外部并且被布置为从真空室到转换器的传感器的光学界面，或者将图像透镜的至少一部分布置成在真空室中的窗口。

2. 发明申请

US20060262306A1 Arrangement for inspecting objects, especially masks in microlithography 有权
公开(公告)号：US20060262306A1
公开(公告)日：2006-11-23
申请号：US10554048
申请日：2004-04-20
申请人： Hans-Juergen Dobschal , Wolfgang Harnisch , Thomas Scheruebl , Nobert Rosenkranz , Ralph Semmler
发明人： Hans-Juergen Dobschal , Wolfgang Harnisch , Thomas Scheruebl , Nobert Rosenkranz , Ralph Semmler
IPC分类号： G01N21/00
CPC分类号： B82Y10/00 , B82Y40/00 , G01N21/956 , G03F1/24 , G03F1/84
摘要： Apparatus for inspecting objects especially masks in microlithography that are disposed in a vacuum chamber. The apparatus includes a converter for converting illuminating radiation emitted from the object into a radiation of a higher wavelength. A sensor for recording images is disposed outside the vacuum chamber and arranged as an optical interface from the vacuum chamber to the sensor of the converter or at least one part of an image lens is arranged as a window in the vacuum chamber.

3. 发明授权

US06894837B2 Imaging system for an extreme ultraviolet (EUV) beam-based microscope 失效
标题翻译：用于极紫外（EUV）光束显微镜的成像系统
公开(公告)号：US06894837B2
公开(公告)日：2005-05-17
申请号：US10626130
申请日：2003-07-24
申请人： Hans-Juergen Dobschal , Thomas Scheruebl , Robert Brunner , Norbert Rosenkranz , Joern Greif-Wuestenbecker
发明人： Hans-Juergen Dobschal , Thomas Scheruebl , Robert Brunner , Norbert Rosenkranz , Joern Greif-Wuestenbecker
IPC分类号： G21K1/06 , G21K7/00 , G02B21/00
CPC分类号： G21K1/06 , G21K7/00
摘要： Imaging system for a microscope based on extreme ultraviolet (EUV) radiation. The present invention is directed to a reflective imaging system for an x-ray microscope for examining and object in an object plane, wherein the object is illuminated by rays of a wavelength of less than 100 nm, particularly less than 30 nm, and is imaged in a magnified manner in an image plane. In the imaging system, according to the invention, for a microscope based on extreme ultraviolet (EUV) radiation with wavelengths in the range of less than 100 nm, with a magnification of 0.1× to 1000× and a structural length of less than 5 m, at least one of the imaging optical elements 2 and 3 in the beam path has a diffractive-reflective structure which is arranged on a spherical or plane area and has a non-rotationally symmetric, asymmetric shape. The arrangement according to the invention provides an imaging system which avoids the disadvantages of the prior art and ensures a high imaging quality. The manufacturing cost remains reasonable due to the exclusive use of spherical mirrors.
摘要翻译：基于极紫外（EUV）辐射的显微镜成像系统。本发明涉及一种用于检查和物体在物平面中的X射线显微镜的反射成像系统，其中物体被小于100nm，特别是小于30nm的波长的光照射，并被成像在图像平面中以放大的方式。在成像系统中，根据本发明，对于具有波长在小于100nm，具有0.1x至1000x的放大倍数和小于5μm的结构长度的基于极紫外（EUV）辐射的显微镜，光束路径中的成像光学元件2和3中的至少一个具有布置在球形或平面区域上并具有非旋转对称的不对称形状的衍射反射结构。根据本发明的装置提供了一种避免现有技术的缺点并确保高成像质量的成像系统。由于专门使用球面镜，制造成本仍然是合理的。

4. 发明授权

US09030383B2 Display device and display method 有权
标题翻译：显示设备和显示方式
公开(公告)号：US09030383B2
公开(公告)日：2015-05-12
申请号：US13121168
申请日：2009-09-14
申请人： Karsten Lindig , Hans-Juergen Dobschal , Guenter Rudolph
发明人： Karsten Lindig , Hans-Juergen Dobschal , Guenter Rudolph
IPC分类号： G09G5/00 , G02B27/01 , G09G3/00 , F21V8/00
CPC分类号： G02B27/017 , G02B6/0038 , G02B27/0172 , G02B2027/0118 , G02B2027/014 , G09G3/001 , G09G2320/0626 , G09G2360/144
摘要： A display device has a holding device wearable on a user's head and holding a multifunctional glass that comprises a first and second coupling-out section and a coupling-in section, an image generation module that generates and couples an image into the multifunctional glass through the coupling-in section to the first coupling-out section redirecting the image in the direction of the user such that the user can perceive the image in superimposition with the real environment, a control unit for the image generation module, and a detector which is connected to the control unit and which measures the intensity of ambient light coupled through the first coupling-out section to the second coupling-out section and coupled out of the multifunctional glass through the second coupling-out section. The control unit controls the brightness of the image of the image generation module, the brightness controlled according to the intensity measured by the detector.
摘要翻译：一种显示装置具有可佩戴在用户头部上的保持装置，并且保持包括第一和第二耦合部分和耦合部分的多功能玻璃，图像生成模块，其通过所述多功能玻璃产生和耦合图像耦合入部分到第一耦合部分，以使用户方向的图像重定向，使得用户可以感知与真实环境叠加的图像，图像生成模块的控制单元和连接的检测器并且其测量通过第一耦合输出部分耦合到第二耦合输出部分的环境光的强度，并通过第二耦合输出部分耦合出多功能玻璃。控制单元控制图像生成模块的图像的亮度，根据由检测器测量的强度来控制亮度。

5. 发明申请

US20120002294A1 BEAM COMBINER FOR USE IN A HEAD-MOUNTED DISPLAY DEVICE AND BEAM SPLITTER 有权
标题翻译：光束组合器用于头戴显示装置和光束分离器
公开(公告)号：US20120002294A1
公开(公告)日：2012-01-05
申请号：US13203198
申请日：2010-02-25
申请人： Hans-Juergen Dobschal , Guenter Rudolph , Karsten Lindig
发明人： Hans-Juergen Dobschal , Guenter Rudolph , Karsten Lindig
IPC分类号： G02B27/01
CPC分类号： G02B27/0172 , G02B3/08 , G02B5/02 , G02B27/143 , G02B2027/0178
摘要： A beam combiner for combining a first beam cluster with a second beam cluster that is not parallel to the first, to form a common beam cluster. The beam combiner includes a transparent body for the first beam cluster, which has a superimposition region that is encountered by the first beam cluster as it passes through the body. The superimposition region is split into a first section and a second section. Only the first section formed from interspaced reflective and/or refractive deflection elements causes a deflection of the second beam cluster by reflection and/or refraction, such that the first beam cluster forms the common beam cluster with the deflected second beam cluster once it has left the body.
摘要翻译：一种用于组合第一光束与不与第一光束簇平行的第二光束簇的光束组合器，以形成公共光束束。光束组合器包括用于第一光束簇的透明体，其具有当第一光束聚集穿过身体时遇到的叠加区域。叠加区域被分成第一部分和第二部分。只有由间隔反射和/或折射偏转元件形成的第一部分通过反射和/或折射导致第二束束的偏转，使得第一束束一旦离开，则与偏转的第二束束一起形成公共束束身体。

6. 发明申请

US20100007878A1 HIGHLY SENSITIVE SPECTROSCOPIC UNIT 有权
标题翻译：高灵敏度光谱仪
公开(公告)号：US20100007878A1
公开(公告)日：2010-01-14
申请号：US12444244
申请日：2007-10-02
申请人： Ralf Wolleschensky , Hans-Juergen Dobschal , Reinhard Steiner
发明人： Ralf Wolleschensky , Hans-Juergen Dobschal , Reinhard Steiner
IPC分类号： G01J3/18 , G01J3/36 , G01J3/28
CPC分类号： G01J3/1804 , G01J3/02 , G01J3/021 , G01J3/0291 , G01J3/14 , G01J3/26 , G01J3/2803
摘要： The invention is directed to a highly sensitive spectrum analysis unit with a diffraction grating, wherein a parallel light bundle having a wavelength range impinges on a diffraction grating which splits the different wavelengths into spectra by diffraction in first directions, and wavelength partial ranges of the spectrally split light bundle can be focused on a detector row by means of camera optics, and evaluation electronics are connected to the detector row and acquire the generated spectrum as information and display it. The invention is characterized in that the light bundle passes a first optical element, and then wavelength partial ranges of a spectrally split light bundle impinge on respective partial regions of a diffraction grating, the diffraction grating having the same grating constant across all partial regions and a changing profile shape, the profile shapes generating different blaze wavelengths that lie in the respective wavelength partial ranges.
摘要翻译：本发明涉及一种具有衍射光栅的高灵敏度光谱分析单元，其中具有波长范围的平行光束照射在衍射光栅上，衍射光栅通过在第一方向上的衍射将不同波长分裂成光谱，并且光谱的波长部分范围分光束可以通过相机光学器件聚焦在检测器行上，并且评估电子器件连接到检测器行并且获取所生成的光谱作为信息并显示它。本发明的特征在于，光束通过第一光学元件，然后将光谱分裂的光束的部分范围波动在衍射光栅的各个部分区域上，衍射光栅在所有部分区域具有相同的光栅常数，并且改变轮廓形状，产生位于相应波长部分范围内的不同火焰波长的轮廓形状。

7. 发明授权

US07298557B2 Projection unit for a head-up display 有权
标题翻译：平视显示器的投影单元
公开(公告)号：US07298557B2
公开(公告)日：2007-11-20
申请号：US11377110
申请日：2006-03-16
申请人： Hans-Juergen Dobschal , Dirk Jahn
发明人： Hans-Juergen Dobschal , Dirk Jahn
IPC分类号： G02B27/10 , G09G5/00
CPC分类号： G02B27/0101 , G02B2027/011 , G02B2027/0118
摘要： The invention is directed is directed to a projection unit for a head-up display having an image generator, a mirror and a refractive lens which are arranged in a housing one behind the other in the light propagation direction. The beam path is directed to a windshield. Notably the mirror has a concave reflection surface, and the lens has a free-form surface at lease on one of the optically active surfaces (D-U and/or D-O).
摘要翻译：本发明涉及一种用于平视显示器的投影单元，其具有在光传播方向上彼此相对配置的壳体中的图像发生器，反射镜和折射透镜。光束路径被引导到挡风玻璃。值得注意的是，反射镜具有凹入的反射表面，并且透镜在光学活性表面（D-U和/或D-O）之一上至少具有自由曲面。

8. 发明申请

US20140233029A1 SPECTROMETER 审中-公开
标题翻译：光谱仪
公开(公告)号：US20140233029A1
公开(公告)日：2014-08-21
申请号：US14236599
申请日：2012-07-23
申请人： Hans-Juergen Dobschal , Jochen Mueller
发明人： Hans-Juergen Dobschal , Jochen Mueller
IPC分类号： G01J3/02 , G01J3/18
CPC分类号： G01J3/0256 , G01J3/0205 , G01J3/0208 , G01J3/0259 , G01J3/18
摘要： A spectrometer with a detector and a transparent body which has an entry area and an exit area on a front side of the body and a reflection grating on a rear side of the body. A beam entering the body via the entry area is reflected at the reflection grating to the exit area and in the process is spectrally split and passes through the exit area and impinges on the detector. The rear side is curved at least in the region of the reflection grating in such a way that the beam is focused in the horizontal and vertical planes when it is reflected at the reflection grating.
摘要翻译：具有检测器和透明体的光谱仪，其具有在主体前侧上的入口区域和出口区域以及位于身体后侧的反射光栅。通过入口区域进入身体的光束在反射光栅处被反射到出射区域，并且在该过程中光谱分裂并穿过出射区域并撞击检测器。后侧至少在反射光栅的区域中弯曲，使得当光束在反射光栅处被反射时聚焦在水平和垂直平面中。

9. 发明授权

US08405904B2 Device for superimposing an image into the beam path of an aiming optic 有权
标题翻译：用于将图像叠加到瞄准光学器件的光束路径中的装置
公开(公告)号：US08405904B2
公开(公告)日：2013-03-26
申请号：US12629117
申请日：2009-12-02
申请人： Hans-Juergen Dobschal , Guenter Rudolph , Eva-Maria Menzel , Christian Sinn , Karsten Lindig , Thomas Wagner
发明人： Hans-Juergen Dobschal , Guenter Rudolph , Eva-Maria Menzel , Christian Sinn , Karsten Lindig , Thomas Wagner
IPC分类号： G02B23/00
CPC分类号： G02B27/32 , G02B23/105
摘要： The invention relates to a device for superimposing an image in the beam path of an aiming optics, having an at least partially transparent optical support element which is arranged in the beam path of the aiming optics and has at least one diffractive optical coupling element and at least one diffractive optical decoupling element, the at least one diffractive optical coupling element leading light of the image to be superimposed, which light is incident on said coupling element and is to be coupled in, through the optical support element to the at least one diffractive optical decoupling element for the purpose of superimposition with the beam path. The image to be superimposed is imaged into the beam path of the aiming optics by the at least one diffractive optical coupling element and the least one diffractive optical decoupling element.
摘要翻译：本发明涉及一种用于将图像叠加在瞄准光学器件的光束路径中的装置，其具有布置在瞄准光学器件的光束路径中的至少部分透明的光学支撑元件，并且具有至少一个衍射光学耦合元件至少一个衍射光学去耦元件，所述至少一个衍射光学耦合元件引导要叠加的图像的光，所述光入射在所述耦合元件上，并通过光学支撑元件耦合到至少一个衍射光光学去耦元件，用于与光束路径叠加。要叠加的图像通过至少一个衍射光学耦合元件和至少一个衍射光学去耦元件成像到瞄准光学器件的光束路径中。

10. 发明授权

US08098374B2 Highly sensitive spectroscopic unit 有权
标题翻译：高灵敏度光谱单位
公开(公告)号：US08098374B2
公开(公告)日：2012-01-17
申请号：US12444244
申请日：2007-10-02
申请人： Ralf Wolleschensky , Hans-Juergen Dobschal , Reinhard Steiner
发明人： Ralf Wolleschensky , Hans-Juergen Dobschal , Reinhard Steiner
IPC分类号： G01J3/28
CPC分类号： G01J3/1804 , G01J3/02 , G01J3/021 , G01J3/0291 , G01J3/14 , G01J3/26 , G01J3/2803
摘要： The invention is directed to a highly sensitive spectrum analysis unit with a diffraction grating, wherein a parallel light bundle having a wavelength range impinges on a diffraction grating which splits the different wavelengths into spectra by diffraction in first directions, and wavelength partial ranges of the spectrally split light bundle can be focused on a detector row by means of camera optics, and evaluation electronics are connected to the detector row and acquire the generated spectrum as information and display it. The invention is characterized in that the light bundle passes a first optical element, and then wavelength partial ranges of a spectrally split light bundle impinge on respective partial regions of a diffraction grating, the diffraction grating having the same grating constant across all partial regions and a changing profile shape, the profile shapes generating different blaze wavelengths that lie in the respective wavelength partial ranges.
摘要翻译：本发明涉及一种具有衍射光栅的高灵敏度光谱分析单元，其中具有波长范围的平行光束照射在衍射光栅上，衍射光栅通过在第一方向上的衍射将不同波长分裂成光谱，并且光谱的波长部分范围分光束可以通过相机光学器件聚焦在检测器行上，并且评估电子器件连接到检测器行并且获取所生成的光谱作为信息并显示它。本发明的特征在于，光束通过第一光学元件，然后将光谱分裂的光束的部分范围波动在衍射光栅的各个部分区域上，衍射光栅在所有部分区域具有相同的光栅常数，并且改变轮廓形状，产生位于相应波长部分范围内的不同火焰波长的轮廓形状。

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